Institution · Energetiq Technology (United States)
Most cited papers from Energetiq Technology (United States)
What are the most cited papers from Energetiq Technology (United States)?
The most cited paper from Energetiq Technology (United States) is "20 years of research on the Alcator C-Mod tokamak" (M. Greenwald et al., 2014), with 126 citations. Next come "Ultrabroadband Nanospectroscopy with a Laser-Driven Plasma Source" (35) and "Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development" (28).
Showing 50 of 59 papers. Every paper is listed.
| # | Paper | ||
|---|---|---|---|
| 1 | 20 years of research on the Alcator C-Mod tokamak M. Greenwald et al. · Physics of Plasmas | Nov 2014 | 126 |
| 2 | Ultrabroadband Nanospectroscopy with a Laser-Driven Plasma Source Martin Wagner, Devon S. Jakob, Steve F. Horne et al. · ACS Photonics | 5 Feb 2018 | 35 |
| 3 | Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development Stephen F. Horne, Matthew M. Besen, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 10 Mar 2006 | 28 |
| 4 | Extreme-ultraviolet light source development to enable pre-production mask inspection Matthew J. Partlow, Matthew M. Besen, Paul A. Blackborow et al. · Journal of Micro/Nanolithography MEMS and MOEMS | 21 May 2012 | 28 |
| 5 | A novel high-brightness broadband light-source technology from the VUV to the IR Stephen F. Horne, Don Smith, Matthew M. Besen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 19 Apr 2010 | 25 |
| 6 | Reconfigurable Microfluidics With Metallic Containers Jung-Rae Park, Daniel A. Slanac, Timothy G. Leong et al. · Journal of Microelectromechanical Systems | Apr 2008 | 12 |
| 7 | Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist Paul A. Blackborow, Deborah S. Gustafson, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 16 Mar 2007 | 11 |
| 8 | A compact soft X-ray microscope using an electrode-less Z-pinch source Stephen F. Horne, Jacob Silterra, William M. Holber · Journal of Physics Conference Series | Sep 2009 | 11 |
| 9 | Extreme ultraviolet interference lithography with incoherent light Patrick P Naulleau, Christopher N. Anderson, Stephen F. Horne · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 16 Mar 2007 | 10 |
| 10 | A stigmatic ultraviolet-visible monochromator for use with a high brightness laser driven plasma light source Jun Feng, James R. Nasiatka, Jared Wong et al. · Review of Scientific Instruments | Aug 2013 | 10 |
| 11 | EUV source development at Energetiq Paul A. Blackborow, Matthew J. Partlow, Stephen F. Horne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 6 Mar 2008 | 9 |
| 12 | High brightness electrodeless Z-Pinch EUV source for mask inspection tools Stephen F. Horne, Matthew J. Partlow, Deborah S. Gustafson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 23 Mar 2012 | 8 |
| 13 | Inductively coupled plasma light source driven by an all solid-state pulsed power system David B. Reisman, Daniel Arcaro, F. Niell · Applied Physics Letters | 30 Oct 2023 | 7 |
| 14 | Status report on EUV source development and EUV source applications in EUVL Vivek Bakshi, Rainer Lebert, Bernhard Jägle et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 8 Feb 2007 | 6 |
| 15 | Study on photochemical analysis system (VLES) for EUV lithography Atushi Sekiguchi, Yoshinobu Kono, Mikio Kadoi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 16 Mar 2007 | 6 |
| 16 | Development of a high-pulse-rate EUV source Stephen F. Horne, F. Niell, Matthew J. Partlow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 13 Mar 2009 | 5 |
| 17 | EUV source development for AIMS and blank inspection Paul A. Blackborow, Matthew J. Partlow, Stephen F. Horne et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 11 Mar 2010 | 4 |
| 18 | A 380-1100nm spectrum matching light source with high spectral resolution, throughput, speed, and stability Qingsong Wang, Kosuke Saito, Jing Zhou et al. | 28 Sep 2023 | 3 |
| 19 | Laser-Driven Plasma Source Technology and Applications Huiling Zhu, Toru Fujinami, Xiaohua Ye et al. · SPIE eBooks | 19 Sep 2023 | 3 |
| 20 | A spectrum matching light source with an improved spectral resolution, throughput, and matching fidelity Qingsong Wang, Kosuke Saito, Alex Cutler et al. | 2 Mar 2022 | 3 |
| 21 | LDLS™ Powered Tunable Light Source with Far-UVC Output X. Ye, M. Alfaris, William L. Grube et al. · Frontiers in Optics / Laser Science | 2020 | 3 |
| 22 | LDLSTM Powered Tunable Light Source for Advance Sensor Characterization X. Ye, A. Cutler, R.G. Collins et al. | 2019 | 3 |
| 23 | Laser-Driven Light Sources for Nanometrology Applications Huiling Zhu, Paul A. Blackborow · Journal of Microelectronic Manufacturing | 2019 | 3 |
| 24 | Vis-NIR spectral flatness improvement for Laser-Driven Light Sources (LDLS) Xiaohua Ye, Huiling Zhu, Matthew M. Besen et al. | 14 Sep 2018 | 3 |
| 25 | EQ-10 electrodeless Z-pinch EUV source for metrology applications Deborah S. Gustafson, Stephen F. Horne, Matthew J. Partlow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 23 Sep 2011 | 3 |
| 26 | Better flat-fielding for ground-based UV spectrographs F. Kerber, Reinhard W. Hanuschik, S. Moehler et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 8 Jul 2014 | 3 |
| 27 | Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications Stephen F. Horne, Deborah S. Gustafson, Matthew J. Partlow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | 17 Mar 2011 | 3 |
| 28 | LDLS-powered spectrum-simulating light source for the application of hyperspectral imaging Xiaohua Ye, William L. Grube, Jing Zhou et al. | 4 Oct 2023 | 2 |
| 29 | Simulation of a discharge produced plasma (DPP) for Blue-X (6.x nm) EUV radiation David Reisman, Kosuke Saito, Wolfram Neff | 22 Apr 2022 | 2 |
| 30 | High-resolution spectral-domain optical coherence tomography for surface and subsurface defect detection using broadband laser-driven light source (LDLS) Qingsong Wang, Shaival Buch, Craig M. Schiller et al. | 19 Mar 2025 | 1 |
| 31 | The characterization and matching algorithm of LDLS-based broadband spectrum matching light source Jing Zhou, Qingsong Wang, Kosuke Saito et al. | 11 Mar 2024 | 1 |
| 32 | Dual fiber coupled laser-driven light source Jing Zhou, Qingsong Wang, Neal Foley et al. | 28 Sep 2023 | 1 |
| 33 | Design of a novel spectrum simulating light source enabling advanced optical sensor testing Jonathan P. Murray, Alexander Y. Cutler, Jing Zhou et al. | 4 Mar 2022 | 1 |
| 34 | Laser-Driven Light Source (LDLS™) With Multiple Fiber Outputs X. Ye, Q. Wang, Megan Dube et al. · Conference on Lasers and Electro-Optics | 2020 | 1 |
| 35 | LDLS Powered High Throughput Tunable Light Source X. Ye, A. Cutler, Q. Wang et al. · Frontiers in Optics / Laser Science | 2018 | 1 |
| 36 | Estimation of Internal DC-DC Converter’s Components for Fault Prediction based on Transfer Function Identification Technique Aleksei Chernyshov, Mikhail Pugach, Nikolay Kalugin et al. | Jun 2026 | 0 |
| 37 | Enhancing Photochemical Dissociation Research with an LDLS®-Powered Tunable UV Light Source Xiaohua Ye, Renaud Richard, William L. Grube et al. | 2025 | 0 |
| 38 | Novel Broadband Light Sources for 3D and Hyperspectral Imaging Shaival Buch, Shrenik Deliwala, Missael Garcia et al. | 2025 | 0 |
| 39 | High brightness tunable light source powered by LDLS facilitates diamond inspection Xiaohua Ye, Nanu Brates, Renaud . Richard et al. | 19 Mar 2025 | 0 |
| 40 | High-brightness broadband laser-driven pulsed source Nanu Brates, Huiling Zhu, Jeffrey G. Manni | 19 Mar 2025 | 0 |
| 41 | Enhanced Sensor Characterization with Visible and NIR Spectrum-Simulation Light Sources Xiaohua Ye, William L. Grube, Huiling Zhu et al. | 2024 | 0 |
| 42 | LDLS® Powered Broad-band TLS for the Application of Diamond Inspection Xiaohua Ye, Nanu Brates, Shaival Buch et al. | 2024 | 0 |
| 43 | Next-generation DPP EUV light source to support the HVM lithography ecosystem Chris Lee, David B. Reisman, F. Niell et al. | 26 Nov 2024 | 0 |
| 44 | Visible and NIR Spectrum-simulation Light Source Facilitates Hyperspectral Imaging Applications Xiaohua Ye, William L. Grube, Huiling Zhu et al. | 2024 | 0 |
| 45 | High-Brightness Laser-Driven Light Source (LDLS®) with Manipulated Spectral Output to Facilitate UV Applications Xiaohua Ye, William L. Grube, Huiling Zhu et al. | 2024 | 0 |
| 46 | High Brightness Tunable Light Source Encompassing the Wavelength Range of 200nm to 1000nm Xiaohua Ye, William L. Grube, Debbie Gustafson et al. | 2023 | 0 |
| 47 | The Electrode-less Z-pinch Metrology Source Stephen F. Horne, Matthew J. Partlow, Michael L. Roderick et al. · SPIE eBooks | 19 Sep 2023 | 0 |
| 48 | Preparing for cost effective soft x-ray metrology for 3D chip architecture Henry Chou, Don McDaniel, Deborah S. Gustafson et al. | 18 Aug 2023 | 0 |
| 49 | Tunable Light Source Powered by LDLSTM and Liquid Crystal Tunable Filter for Hyperspectral Applications X. Ye, Leah A. Owens, P. Vandermeulen et al. | 2023 | 0 |
| 50 | Tunable Light Source with LDLS and AOTF X. Ye, A. Cutler, R.G. Collins et al. · Conference on Lasers and Electro-Optics | 2019 | 0 |
Citations are OpenAlex's own counts, from its 2026-09-23 snapshot, so the ranking can differ from Google Scholar or Web of Science. A paper is listed for an institution when any of its authors gave it as an affiliation; retracted papers and papers whose citation count cannot be traced to citing works are left out, and a preprint and the article it became are shown once. Release dates are OpenAlex's: where a source gave only a month or a year, that is what is shown. How the lists are chosen.