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Institution · Ogden Engineering & Associates

Most cited papers from Ogden Engineering & Associates

Ogden Engineering & Associates

What are the most cited papers from Ogden Engineering & Associates?

The most cited paper from Ogden Engineering & Associates is "Piezoelectric aluminum nitride thin films for microelectromechanical systems" (Gianluca Piazza, Valeriy V. Felmetsger, Paul Muralt et al., 2012), with 241 citations. Next come "Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications" (129) and "AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices" (78).

Showing 28 of 28 papers. Every paper is listed.

Most cited papers, sortable by citations and release date
#Paper
1 Piezoelectric aluminum nitride thin films for microelectromechanical systems Gianluca Piazza, Valeriy V. Felmetsger, Paul Muralt et al. · MRS Bulletin Open access Nov 2012 241
2 Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications Chih‐Ming Lin, Ting-Ta Yen, Valery V. Felmetsger et al. · Applied Physics Letters 23 Aug 2010 129
3 AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices Chih‐Ming Lin, Wei-Cheng Lien, Valery V. Felmetsger et al. · Applied Physics Letters 4 Oct 2010 78
4 Deposition of ultrathin AlN films for high frequency electroacoustic devices Valery V. Felmetsger, Pavel N. Laptev, Roger J. Graham · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 14 Feb 2011 56
5 Characteristics of AlN Lamb wave resonators with various bottom electrode configurations Chih‐Ming Lin, Ventsislav Yantchev, Yung-Yu Chen et al. Conference paper May 2011 34
6 Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators E. Iborra, Marta Clement, Jose E. Capilla et al. · Thin Solid Films Open access 11 Nov 2011 29
7 Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films E. Iborra, Jimena Olivares, Marta Clement et al. Conference paper Jul 2013 19
8 Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content E. Iborra, Jose E. Capilla, Jimena Olivares et al. Conference paperOpen access Oct 2012 19
9 High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonator Matteo Rinaldi, Augusto Tazzoli, Jeronimo Segovia-Fernandez et al. Conference paper 2012 17
10 Optimization of thin AlN sputtered films for X-band BAW resonators E. Iborra, Marta Clement, Jose E. Capilla et al. Conference paper Oct 2010 15
11 Properties of InGaN/GaN MQW LEDs grown by MOCVD with and without hydrogen carrier gas Huseyin Ekinci, Vladimir V. Kuryatkov, Chris Forgey et al. · Vacuum Open access 10 Nov 2017 14
12 High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms Yun-Ju Lai, Wei‐Chang Li, Chih‐Ming Lin et al. Conference paper Jun 2013 14
13 Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature Chih‐Ming Lin, Ting-Ta Yen, Valery V. Felmetsger et al. Conference paper Jun 2010 12
14 SIC/ALN PIEZOELECTRIC ENERGY HARVESTERS FOR PULSED PRESSURE SOURCES IN HARSH ENVIRONMENT APPLICATIONS Yun-Ju Lai, W.-C. Li, Chih‐Ming Lin et al. Conference paperOpen access 23 May 2012 10
15 Deposition of smooth and highly (111) textured Al bottom electrodes for AlN-based electroacoustic devices Valeriy V. Felmetsger, M. K. Mikhov Conference paper May 2012 7
16 Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators Jose E. Capilla, Jimena Olivares, Marta Clement et al. Conference paperOpen access Oct 2011 7
17 Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements Marta Clement, Valeriy V. Felmetsger, Jimena Olivares et al. Conference paperOpen access Oct 2019 6
18 Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers Marta Clement, Valeriy Felmetsger Jimena Olivares, Teona Mirea et al. Conference paperOpen access Oct 2018 6
19 Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers Marta Clement, Valeriy V. Felmetsger, Teona Mirea et al. Conference paperOpen access Apr 2018 6
20 Sputter technique for deposition of AlN, ScAlN, and Bragg reflector thin films in mass production Valeriy V. Felmetsger · 2017 IEEE International Ultrasonics Symposium (IUS) Conference paper Sep 2017 6
21 Reactive sputtering of highly c-axis textured Ti-doped AlN thin films Valeriy V. Felmetsger, M. K. Mikhov Conference paper Oct 2012 6
22 Effect of pre-deposition RF plasma etching on wafer surface morphology and crystal orientation of piezoelectric AlN thin films Valeriy V. Felmetsger, M. K. Mikhov, Pavel N. Laptev · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 29 Jan 2015 6
23 Intrinsic characteristics of thermally stable AlN Lamb wave resonators at high temperatures Chih‐Ming Lin, Ting-Ta Yen, Valery V. Felmetsger et al. Conference paper Oct 2011 5
24 Sputtered Al(1−x)ScxN thin films with high areal uniformity for mass production Valeriy V. Felmetsger, M. K. Mikhov, Mario DeMiguel-Ramos et al. Conference paper Apr 2015 4
25 Hafnium Nitride as High Acoustic Impedance Material for Fully Insulating Acoustic Reflectors Mario DeMiguel-Ramos, Marta Clement, Teona Mirea et al. Conference paper Oct 2018 2
26 Hydrogen-Free Epitaxy of Colored LEDs Based on InGaN/GaN MQWs Huseyin Ekinci, Vladimir V. Kuryatkov, Chris Forgey et al. · Acta Physica Polonica A Open access Apr 2019 1
27 Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C-SiC plate Chih‐Ming Lin, Yung-Yu Chen, Valery V. Felmetsger et al. Conference paper Jul 2013 1
28 10 letters to the Commission regarding Air Force Research Laboratory Mesa F. Rockne Arnett · University of North Texas Digital Library (University of North Texas) Open access Aug 2005 0

Citations are OpenAlex's own counts, from its 2026-09-23 snapshot, so the ranking can differ from Google Scholar or Web of Science. A paper is listed for an institution when any of its authors gave it as an affiliation; retracted papers and papers whose citation count cannot be traced to citing works are left out, and a preprint and the article it became are shown once. Release dates are OpenAlex's: where a source gave only a month or a year, that is what is shown. How the lists are chosen.