Plasma Diagnostics and Applications
Plasma Diagnostics and Applications is a research topic within Electrical and Electronic Engineering. Science Explorer counts 50k research works in it since 1950. 10.1% of them reached the world's top 10% most cited for their field and year.
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
- Plasma Etching
- Semiconductor Industry
- Atomic Layer Etching
- Hall Thrusters
- Electric Propulsion
- Low Temperature Plasmas
- Electron Energy Distribution Function
- Spacecraft Propulsion
- Ion-Molecule Collisions
- Langmuir Probe
- Research works
- 50k fractional, since 1950
- In the world top 10%
- 5.1k per year above
- Top-10% rate
- 10.1% share of its works in the world top 10%
- Growth, 2018-21 → 2022-25
- -1% the tick is no change
- Largest producer
China
33% of the 10 largest, 2022-now
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