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Most cited papers from Applied Nanotools (Canada)

What are the most cited papers from Applied Nanotools (Canada)?

The most cited paper from Applied Nanotools (Canada) is "A full degree-of-freedom spatiotemporal light modulator" (Christopher Panuski, Ian Christen, Momchil Minkov et al., 2022), with 112 citations. Next come "Silicon Photonic Circuit Design Using Rapid Prototyping Foundry Process Design Kits" (87) and "Silicon photonic dual-gas sensor for H_2 and CO_2 detection" (63).

Showing 39 of 39 papers. Every paper is listed.

Most cited papers, sortable by citations and release date
#Paper
1 A full degree-of-freedom spatiotemporal light modulator Christopher Panuski, Ian Christen, Momchil Minkov et al. · Nature Photonics 28 Nov 2022 112
2 Silicon Photonic Circuit Design Using Rapid Prototyping Foundry Process Design Kits Lukas Chrostowski et al. · IEEE Journal of Selected Topics in Quantum Electronics 25 May 2019 87
3 Silicon photonic dual-gas sensor for H_2 and CO_2 detection Guangcan Mi, Cameron Horvath, Vien Van · Optics Express Open access 29 Jun 2017 63
4 Simulation of the spatial distribution and molecular weight of polymethylmethacrylate fragments in electron beam lithography exposures Mirwais Aktary, Maria Stepanova, S. K. Dew · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Mar 2006 54
5 Fabrication and Characterization of Graphitic Carbon Nanostructures with Controllable Size, Shape, and Position Rongbing Du, Solomon Ssenyange, Mirwais Aktary et al. · Small 20 Feb 2009 46
6 Simulation of electron beam lithography of nanostructures Maria Stepanova, Taras Fito, Z. Szabó et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Nov 2010 40
7 Nanopatterning of PMMA on insulating surfaces with various anticharging schemes using 30 keV electron beam lithography Mustafa Muhammad, Steven Buswell, S. K. Dew et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena 14 Sep 2011 28
8 Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography Mohammad Mohammad, Taras Fito, Jiawei Chen et al. · Microelectronic Engineering 16 Nov 2009 26
9 Subwavelength Grating Metamaterial Waveguides and Ring Resonators on a Silicon Nitride Platform Cameron M. Naraine, Jocelyn N. Westwood‐Bachman, Cameron Horvath et al. · Laser & Photonics Review Open access 19 Dec 2022 25
10 Diagnosis of inborn errors of metabolism using 1H NMR spectroscopic analysis of urine Fiona J. Bamforth, V. Dorian, Hilary D. Vallance et al. · Journal of Inherited Metabolic Disease May 1999 25
11 Determination of the nonlinear thermo-optic coefficient of silicon nitride and oxide using an effective index method Karl A. Johnson, Naif Alshamrani, Dhaifallah Almutairi et al. · Optics Express Open access 21 Nov 2022 23
12 Interdependence of optimum exposure dose regimes and the kinetics of resist dissolution for electron beam nanolithography of polymethylmethacrylate Mohammad Mohammad, Taras Fito, Jiawei Chen et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena 2010 18
13 Nanoscale resist morphologies of dense gratings using electron-beam lithography Mohammad Mohammad, S. K. Dew, Kenneth L. Westra et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena 27 Apr 2007 11
14 The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution Abu Bakar Mohammad, Taras Fito, Jiang Chen et al. · InTech eBooks Book chapterOpen access Feb 2010 9
15 A Moderate Confinement O-, S-, C-, and L-Band Silicon Nitride Platform Enabled by a Rapid Prototyping Integrated Photonics Foundry Process Cameron M. Naraine, Batoul Hashemi, Niloofar Majidian Taleghani et al. · IEEE photonics journal Open access 20 Nov 2024 7
16 Impact of SiO2 Cladding Voids in SiPh Building Blocks Hatef Shiran, Hassan Rahbardar Mojaver, Jocelyn Bachman et al. Conference paper Sep 2020 7
17 Single-Etch Silicon Nitride Grating Couplers for Multiband Applications in Quantum and Fiber Communications William Fraser, Radovan Korček, Daniel Benedikovič et al. · IEEE Journal of Selected Topics in Quantum Electronics 27 May 2025 6
18 Wear comparison of critical dimension-atomic force microscopy tips Ndubuisi G. Orji, Ronald G. Dixson, Ernesto Lopez et al. · Journal of Micro/Nanolithography MEMS and MOEMS Open access 28 Mar 2020 4
19 Fabrication of nanoelectromechanical resonators using a cryogenic etching technique Nathan Nelson-Fitzpatrick, Kenneth L. Westra, Peiyang Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Nov 2006 3
20 Fabrication and Characterization of Edge-Conformed Graphene-Silicon Waveguides Cameron Horvath, Daniel Bachman, Guangcan Mi et al. · IEEE Photonics Technology Letters 6 Jan 2015 3
21 Reversible nanostructuration of microfluidic electrode devices by CNT magnetic co-entrapment Zorione Herrasti, Fernando Martínez, Eva Baldrich · Lab on a Chip 2015 3
22 The Effects of Plasma Cleaning on Carbon and Hydrocarbon-contaminated Samples and Quantification of Decontamination in the Scanning Electron Microscope Bárbara Armbruster, Paul A. Anzalone, Ewa Kosmowska et al. · Microscopy and Microanalysis Jul 2025 2
23 Silicon Nitride Ring Resonators Based on Subwavelength Grating Metamaterials Cameron M. Naraine, Jocelyn N. Westwood‐Bachman, Cameron Horvath et al. · Conference on Lasers and Electro-Optics Conference paper 2022 2
24 In-line metrology for atomic resolution local height variation Tae‐Gon Kim, Soon-Wook Kim, Tom Vanderwayer et al. Conference paper May 2017 2
25 Using OSCAR to Win the Cluster Challenge Paul Greidanus, Gordon Willem Klok · Proceedings/Proceedings (International Symposium on High Performance Computing Systems and Applications) Conference paper Jun 2008 2
26 Poly(ether sulfone) as a negative resist for electron beam lithography Robert Mark Bryce, M. R. Freeman, Mirwais Aktary · Applied Physics Letters 14 May 2007 2
27 Double-Illumination All-Optical Nanoalignment for Stacking X-Ray Fresnel Zone Plates Siqi Wang, Cheng D. Jiang, Robert Mattson Peters et al. · Advanced Devices & Instrumentation Open access 2025 1
28 Edge-conformed silicon-graphene waveguides: Fabrication and measurements Cameron Horvath, Daniel Bachman, Vien Van Conference paper Aug 2014 1
29 Silicon photonic microring components for on-chip WDM networks Vien Van, Daniel Bachman, Ashok Prabhu Masilamani Conference paper Jul 2013 1
30 Efficient Optical Chip Interfacing in Silicon Nitride Photonics Daniel Benedikovič et al. Conference paper Jun 2026 0
31 O-band-operated fiber-chip surface gratings for silicon nitride photonic integrated circuits Daniel Benedikovič, William Donald Fraser, Radovan Korček et al. Conference paper 9 Sep 2025 0
32 Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits Batoul Hashemi, Cameron M. Naraine, Niloofar Majidian Taleghani et al. Conference paper 23 Jun 2025 0
33 Experimental Demonstration of High-Efficiency Silicon Nitride Grating Couplers for O-Band Applications William Donald Fraser, Radovan Korček, Daniel Benedikovič et al. Conference paper 20 May 2025 0
34 Fabrication and characterization of zone plates for EUV applications Remko van den Hurk, Robert Mattson Peters, Mirwais Aktary Conference paperOpen access 3 Oct 2023 0
35 Prototyping of Silicon Nitride Photonic Integrated Circuits using Electron Beam Lithography Cameron Horvath, Jocelyn N. Westwood‐Bachman, Kevin Setzer et al. · 2022 Photonics North (PN) Conference paper 24 May 2022 0
36 Single exposure for double-sided zone plate optics for soft and hard x-ray imaging (Conference Presentation) Robert Mattson Peters, Christian Fella, Dominik Müller et al. Conference paper 9 Sep 2019 0
37 A new cryo scanning transmission x-ray microscope at the Canadian Light Source (Conference Presentation) Jan Geilhufe, Adam F. G. Leontowich, Russ Berg et al. Conference paper 19 Sep 2017 0
38 Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler Tae‐Gon Kim, Heon-Yul Ryu, Karine Kenis et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena 5 Sep 2016 0
39 Compact silicon photonic refractometric sensor for atmospheric CO2 gas monitoring Guangcan Mi, Cameron Horvath, Mirwais Aktary et al. Conference paper Oct 2015 0

Citations are OpenAlex's own counts, from its 2026-09-23 snapshot, so the ranking can differ from Google Scholar or Web of Science. A paper is listed for an institution when any of its authors gave it as an affiliation; retracted papers and papers whose citation count cannot be traced to citing works are left out, and a preprint and the article it became are shown once. Release dates are OpenAlex's: where a source gave only a month or a year, that is what is shown. How the lists are chosen.