Company · Oyama · Japan

Gigaphoton Inc (Japan)

Research works: 0
Citations: 0

Not ranked overall: Gigaphoton Inc (Japan) is under the volume floor below which an excellence rate is noise. Not ranked is not the same as ranked last.

What are the most cited papers from Gigaphoton Inc (Japan)?

The most cited paper from Gigaphoton Inc (Japan) is "High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution" (Shinji Okazaki, 2014), with 118 citations. Next come "High-Power, Solid-State, Deep Ultraviolet Laser Generation" (63) and "Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources" (54).

Most cited papers
#	Paper	Released	Citations
1	High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution Shinji Okazaki · Microelectronic Engineering	29 Nov 2014	118
2	High-Power, Solid-State, Deep Ultraviolet Laser Generation Hongwen Xuan, Hironori Igarashi, Shinji Ito et al. · Applied Sciences Open access	3 Feb 2018	63
3	Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources Kentaro Tomita, Yuta Sato, Syouichi Tsukiyama et al. · Scientific Reports Open access	20 Sep 2017	54
4	First generation laser-produced plasma source system for HVM EUV lithography Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Conference paper	11 Mar 2010	51
5	Analytical model for CO_2 laser ablation of fused quartz Krzysztof Michał Nowak, Howard J. Baker, Denis R. Hall · Applied Optics	5 Oct 2015	48

All 60 most cited papers, with filters and sorting

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