Institution · MKS Instruments (United States)
Most cited papers from MKS Instruments (United States)
What are the most cited papers from MKS Instruments (United States)?
The most cited paper from MKS Instruments (United States) is "On Asymptotic Stabilizability of Linear Systems With Delayed Input" (Zongli Lin, Haijun Fang, 2007), with 217 citations. Next come "Model‐Informed Drug Discovery and Development: Current Industry Good Practice and Regulatory Expectations and Future Perspectives" (138) and "Investigation of 1.2 kV SiC MOSFET for high frequency high power applications" (93).
Showing 50 of 60 papers. Every paper with more than 11 citations is listed.
| # | Paper | ||
|---|---|---|---|
| 1 | On Asymptotic Stabilizability of Linear Systems With Delayed Input Zongli Lin, Haijun Fang · IEEE Transactions on Automatic Control | Jun 2007 | 217 |
| 2 | Model‐Informed Drug Discovery and Development: Current Industry Good Practice and Regulatory Expectations and Future Perspectives Scott F. Marshall, Rajanikanth Madabushi, Efthymios Manolis et al. · CPT Pharmacometrics & Systems Pharmacology | 9 Nov 2018 | 138 |
| 3 | Investigation of 1.2 kV SiC MOSFET for high frequency high power applications Honggang Sheng, Zheng Chen, Fred Wang et al. | Feb 2010 | 93 |
| 4 | Tantalum Nitride Films Grown by Inorganic Low Temperature Thermal Chemical Vapor Deposition Diffusion Barrier Properties in Copper Metallization Alain E. Kaloyeros, Xiaomeng Charlene Chen, Tanja Stark et al. · Journal of The Electrochemical Society | 1999 | 75 |
| 5 | Tunable Matching Networks Based on Phase-Switched Impedance Modulation1 Alexander S. Jurkov, Aaron Radomski, David John Perreault · IEEE Transactions on Power Electronics | 12 Mar 2020 | 58 |
| 6 | The Effects of Processing Parameters in the Chemical Vapor Deposition of Cobalt from Cobalt Tricarbonyl Nitrosyl Ana Rangelova Ivanova, Guillermo M. Nuesca, Xiaomeng Charlene Chen et al. · Journal of The Electrochemical Society | Jun 1999 | 56 |
| 7 | Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas Yiting Zhang, Abdullah Zafar, David J. Coumou et al. · Journal of Applied Physics | 17 Jun 2015 | 55 |
| 8 | A 1.5 kW Radio-Frequency Tunable Matching Network Based on Phase-Switched Impedance Modulation Anas Al Bastami, Alexander S. Jurkov, David M. Otten et al. · IEEE Open Journal of Power Electronics | 2020 | 53 |
| 9 | Comparison of hot cathode and cold cathode ionization gauges R. N. Peacock, Neil T. Peacock, D. S. Hauschulz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | May 1991 | 50 |
| 10 | Insertion, Deletion Codes With Feature-Based Embedding: A New Paradigm for Watermark Synchronization With Applications to Speech Watermarking David J. Coumou, Gaurav Sharma · IEEE Transactions on Information Forensics and Security | 22 May 2008 | 45 |
| 11 | Development of variable capacitance pressure transducers for vacuum applications John J. Sullivan · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | May 1985 | 44 |
| 12 | Interlayer Mediated Epitaxy of Cobalt Silicide on Silicon (100) from Low Temperature Chemical Vapor Deposition of Cobalt Formation Mechanisms and Associated Properties Ana R. Londergan, Guillermo M. Nuesca, Cindy Goldberg et al. · Journal of The Electrochemical Society | 2001 | 42 |
| 13 | Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications Kanchana Vydianathan, Guillermo M. Nuesca, Gregory Mark Peterson et al. · Journal of materials research/Pratt's guide to venture capital sources | Jun 2001 | 41 |
| 14 | Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller L. D. Hinkle, Chiara Mariano · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | May 1991 | 37 |
| 15 | Ion Energy Distribution Skew Control Using Phase-Locked Harmonic RF Bias Drive David J. Coumou, David Hamilton Clark, Theresa Kummerer et al. · IEEE Transactions on Plasma Science | 20 Jun 2014 | 36 |
| 16 | Process control based on quadrupole mass spectrometry D. W. Greve, Thomas J. Knight, Xu Cheng et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | 1996 | 36 |
| 17 | Multielemental analyses of tree rings by inductively coupled plasma mass spectrometry Gene S. Hall, David K. Yamaguchi, Thomas M. Rettberg · Journal of Radioanalytical and Nuclear Chemistry | Nov 1990 | 32 |
| 18 | Recommended practice for process sampling for partial pressure analysis James E. Blessing, Robert E. Ellefson, Bruce Alan Raby et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | 2007 | 32 |
| 19 | Acoustic reflectometry: spectral gradient analysis for improved detection of middle ear effusion in children SANDRA KIMBALL · The Pediatric Infectious Disease Journal | Jun 1998 | 31 |
| 20 | Electrets in miniature microphones Freeman W. Fraim, Preston V. Murphy, Robert J. Ferran · The Journal of the Acoustical Society of America | Jun 1973 | 31 |
| 21 | Low temperature plasma-assisted chemical vapor deposition of tantalum nitride from tantalum pentabromide for copper metallization Xiaomeng Charlene Chen, H. L. Frisch, Alain E. Kaloyeros et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | 1999 | 31 |
| 22 | Plasma-assisted synthesis of MoS 2 Philip M. Campbell, Christopher J. Perini, Johannes S. Chiu et al. · 2D Materials | 14 Sep 2017 | 30 |
| 23 | Far field radiation from an arbitrarily oriented Hertzian dipole in the presence of a layered anisotropic medium Abdullah Eroglu, Jay K. Lee · IEEE Transactions on Antennas and Propagation | Dec 2005 | 30 |
| 24 | Chemical vapor deposition of copper from CuI hexafluoroacetylacetonate trimethylvinylsilane for ultralarge scale integration applications Gregory Braeckelmann, D. Manger, Aaron R. Burke et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | May 1996 | 30 |
| 25 | A Comparison of Statistical Process Control (SPC) and On-Line Multivariate Analyses (MVA) for Injection Molding David Owen Kazmer, Sarah Westerdale, Daniel Hazen · International Polymer Processing | Nov 2008 | 30 |
| 26 | Effect of the spot size on ionization and degree of plasma shielding in plumes induced by irradiation of a copper target by multiple short laser pulses Omid A. Ranjbar, Zhibin Lin, Alexey N. Volkov · Applied Physics A | 21 Apr 2020 | 28 |
| 27 | Monitor lyophilization with mass spectrometer gas analysis. John Connelly, Jenny Welch · PubMed | 22 Jul 1993 | 27 |
| 28 | I n s i t u stress monitoring and deposition of zero-stress W for x-ray masks Y.-C. Ku, Lee-Peng Ng, R. Carpenter et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | Nov 1991 | 27 |
| 29 | Profile simulation of conformality of chemical vapor deposited copper in subquarter-micron trench and via structures Aaron R. Burke, Gregory Braeckelmann, D. Manger et al. · Journal of Applied Physics | Nov 1997 | 27 |
| 30 | Thin-disk multipass amplifier delivering sub-400 fs pulses with excellent beam quality at an average power of 1 kW André Loescher, Florian Bienert, Christoph Röcker et al. · Optics Continuum | 10 Feb 2022 | 25 |
| 31 | Analysis of Class-E Based RF Power Amplifiers Using Harmonic Modeling S. Sivakumar, Abdullah Eroglu · IEEE Transactions on Circuits and Systems I Regular Papers | 26 Feb 2009 | 22 |
| 32 | Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach Hisashi Matsumoto, Zhibin Lin, Joel N. Schrauben et al. · Applied Physics A | 8 Mar 2022 | 21 |
| 33 | Low-temperature chemical vapor deposition of tantalum nitride from tantalum pentabromide for integrated circuitry copper metallization applications Xiaomeng Charlene Chen, Gregory G. Peterson, Cindy Goldberg et al. · Journal of materials research/Pratt's guide to venture capital sources | May 1999 | 21 |
| 34 | Some characteristics of an inverted magnetron cold cathode ionization gauge with dual feedthroughs N. T. Peacock, R. N. Peacock · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | May 1988 | 21 |
| 35 | Plume accumulation effect and interaction of plumes induced by irradiation of a copper target with a burst of nanosecond laser pulses near the ionization threshold Omid A. Ranjbar, Zhibin Lin, Alexey N. Volkov · Journal of Applied Physics | 12 Jun 2020 | 20 |
| 36 | Low temperature inorganic chemical vapor deposition of Ti–Si–N diffusion barrier liners for gigascale copper interconnect applications Eric T. Eisenbraun, A. Upham, Raj Kishora Dash et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | Jul 2000 | 20 |
| 37 | Active control of instabilities for plasma processing with electronegative gases Daniel L. Goodman, Neil M. P. Benjamin · Journal of Physics D Applied Physics | 30 Oct 2003 | 20 |
| 38 | Comparison of Radio-Frequency Power Architectures for Plasma Generation Anas Al Bastami, Haoquan Zhang, Alexander S. Jurkov et al. | 9 Nov 2020 | 19 |
| 39 | Advances in lower hybrid current drive technology on Alcator C-Mod Gregory M. Wallace et al. · Nuclear Fusion | 4 Jun 2013 | 19 |
| 40 | Reporting guidelines for population pharmacokinetic analyses Kevin H. Dykstra, Nitin Mehrotra, Christoffer Wenzel Tornøe et al. · The Journal of Clinical Pharmacology | 6 Jul 2015 | 19 |
| 41 | Anomalously strong effects of plume contraction and material redeposition in nanosecond pulsed laser vaporization Alexey N. Volkov, Zhibin Lin · International Journal of Heat and Mass Transfer | 3 Aug 2023 | 18 |
| 42 | Driving frequency fluctuations in pulsed capacitively coupled plasmas John Poulose, Matthew Goeckner, Steven Shannon et al. · The European Physical Journal D | Sep 2017 | 18 |
| 43 | Fabrication and characterization of high-flatness mesa-etched silicon nitride x-ray masks A. Moel, W. Chu, K. Early et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | Nov 1991 | 18 |
| 44 | The influence of the magnetic field strength upon the characteristic curve of a cold cathode ionization gauge N. T. Peacock, R. N. Peacock · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | May 1990 | 17 |
| 45 | Expansion dynamics and radiation absorption in plumes induced by irradiation of a copper target by single and multiple nanosecond laser pulses in the doughnut beam mode Michael Stokes, Omid A. Ranjbar, Zhibin Lin et al. · Spectrochimica Acta Part B Atomic Spectroscopy | 4 Dec 2020 | 16 |
| 46 | Review Article: Recommended practice for calibrating vacuum gauges of the ionization type James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | 27 Apr 2018 | 16 |
| 47 | On‐line multivariate optimization of injection molding Stephen P. Johnston, Christopher McCready, Daniel Hazen et al. · Polymer Engineering and Science | 10 Sep 2015 | 16 |
| 48 | Tunable impedance matching networks based on phase-switched impedance modulation Alexander S. Jurkov, Aaron Radomski, David John Perreault | Oct 2017 | 15 |
| 49 | Ultrafast laser ablation of silicon with ∼GHz bursts Hisashi Matsumoto, Zhibin Lin, Joel N. Schrauben et al. · Journal of Laser Applications | 8 Jul 2021 | 14 |
| 50 | Multi-Inverter Discrete Backoff: A High-Efficiency, Wide-Range RF Power Generation Architecture Haoquan Zhang, Anas Al Bastami, Alexander S. Jurkov et al. | 9 Nov 2020 | 14 |
Citations are OpenAlex's own counts, from its 2026-09-23 snapshot, so the ranking can differ from Google Scholar or Web of Science. A paper is listed for an institution when any of its authors gave it as an affiliation; retracted papers and papers whose citation count cannot be traced to citing works are left out, and a preprint and the article it became are shown once. Release dates are OpenAlex's: where a source gave only a month or a year, that is what is shown. How the lists are chosen.