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Company · Andover · United States

MKS Instruments (United States)

mksinst.comROR OpenAlex
World rank, all time
#33,926
of 34,923
Rank in United States
#7,131
of 7,310
Research works
141
▲ 58% vs 2018-21
Citations
3.5k
24.7 per fractional work
Top-10% rate
7.1%
all institutions 10.0%
vs its own fields
0.88×
1.00× is exactly expected
Open access
14%
world 40%
International
14%
world 18%
MKS Instruments (United States)

Which fields of science does MKS Instruments (United States) work in?

In 2022-now, 81% of research at MKS Instruments (United States) is in Physical Sciences, 10% in Life Sciences. Its largest fields are Engineering (65%), Biochemistry, Genetics and Molecular Biology (9%), Physics and Astronomy (6%). It does 1.8× the world's share of Physical Sciences.

Physical Sciences: 23 fractional works · 80.6% of its workEngineering: 19 fractional works · 65.0% of its workElectrical and Electronic Engineering: 7 fractional works · 24.6% of its workBiomedical Engineering: 5 fractional works · 16.6% of its workComputational Mechanics: 4 fractional works · 12.1% of its workMechanics of Materials: 1 fractional works · 2.4% of its workAutomotive Engineering: 1 fractional works · 2.3% of its workMechanical Engineering: 1 fractional works · 2.3% of its workCivil and Structural Engineering: 0 fractional works · 1.7% of its workControl and Systems Engineering: 0 fractional works · 1.5% of its workAerospace Engineering: 0 fractional works · 0.8% of its workIndustrial and Manufacturing Engineering: 0 fractional works · 0.6% of its workPhysics and Astronomy: 2 fractional works · 6.0% of its workAtomic and Molecular Physics, and Optics: 1 fractional works · 4.6% of its workCondensed Matter Physics: 0 fractional works · 0.6% of its workInstrumentation: 0 fractional works · 0.6% of its workSmaller subfields together: 0 fractional works · 0.1% of its workMaterials Science: 1 fractional works · 3.6% of its workMaterials Chemistry: 1 fractional works · 2.1% of its workSurfaces, Coatings and Films: 0 fractional works · 1.1% of its workElectronic, Optical and Magnetic Materials: 0 fractional works · 0.4% of its workSmaller subfields together: 0 fractional works · 0.0% of its workEnvironmental Science: 1 fractional works · 2.7% of its workIndustrial and Manufacturing Engineering: 0 fractional works · 1.7% of its workEcology: 0 fractional works · 1.0% of its workChemistry: 0 fractional works · 1.7% of its workPhysical and Theoretical Chemistry: 0 fractional works · 0.6% of its workSpectroscopy: 0 fractional works · 0.6% of its workInorganic Chemistry: 0 fractional works · 0.3% of its workOrganic Chemistry: 0 fractional works · 0.3% of its workComputer Science: 0 fractional works · 1.3% of its workHardware and Architecture: 0 fractional works · 1.1% of its workSmaller subfields together: 0 fractional works · 0.1% of its workChemical Engineering: 0 fractional works · 0.3% of its workCatalysis: 0 fractional works · 0.3% of its workLife Sciences: 3 fractional works · 9.8% of its workBiochemistry, Genetics and Molecular Biology: 3 fractional works · 8.7% of its workBiophysics: 2 fractional works · 6.3% of its workMolecular Biology: 0 fractional works · 1.2% of its workCell Biology: 0 fractional works · 0.6% of its workGenetics: 0 fractional works · 0.6% of its workAgricultural and Biological Sciences: 0 fractional works · 1.1% of its workAquatic Science: 0 fractional works · 0.6% of its workFood Science: 0 fractional works · 0.6% of its workHealth Sciences: 2 fractional works · 6.3% of its workMedicine: 1 fractional works · 5.1% of its workOphthalmology: 0 fractional works · 1.7% of its workEmergency Medicine: 0 fractional works · 1.1% of its workRadiology, Nuclear Medicine and Imaging: 0 fractional works · 1.1% of its workPsychiatry and Mental health: 0 fractional works · 0.8% of its workNeurology: 0 fractional works · 0.2% of its workSmaller subfields together: 0 fractional works · 0.2% of its workVeterinary: 0 fractional works · 1.0% of its workSmall Animals: 0 fractional works · 1.0% of its workHealth Professions: 0 fractional works · 0.2% of its workSocial Sciences: 1 fractional works · 3.3% of its workBusiness, Management and Accounting: 1 fractional works · 2.3% of its workManagement of Technology and Innovation: 0 fractional works · 1.1% of its workStrategy and Management: 0 fractional works · 1.1% of its workSmaller subfields together: 0 fractional works · 0.0% of its workDecision Sciences: 0 fractional works · 0.6% of its workStatistics, Probability and Uncertainty: 0 fractional works · 0.6% of its workPsychology: 0 fractional works · 0.4% of its workClinical Psychology: 0 fractional works · 0.4% of its workALL ITS WORKMKS Instruments(United States)29fractional works, 2022-now
Life Sciences10%Physical Sciences81%Health Sciences6%Social Sciences3%

Each ring splits the one inside it: the four domains of science, their fields, their subfields. Size is fractional works in 2022-now. Every slice is a page; the interactive view zooms down to single topics and colours each by how much more of it this institution does than the world.

Its 4 domains and 15 fields, with their numbers
    1. Engineering1965.0%
    2. Physics and Astronomy26.0%
    3. Materials Science13.6%
    4. Environmental Science12.7%
    5. Chemistry01.7%
    6. Computer Science01.3%
    7. Chemical Engineering00.3%
    1. Biochemistry, Genetics and Molecular Biology38.7%
    2. Agricultural and Biological Sciences01.1%
    1. Medicine15.1%
    2. Veterinary01.0%
    3. Health Professions00.2%
    1. Business, Management and Accounting12.3%
    2. Decision Sciences00.6%
    3. Psychology00.4%
All of science, and how each field's share has moved since 1950: the Science domain explorer

What does MKS Instruments (United States) specialise in?

Where its research is concentrated relative to its size: Physical Sciences takes 2.1× the share of its output that it takes of world research.

  1. Physical SciencesDomain · 23.4 works2.1×
← less than its size predicts1×more →

Location quotient, a volume reading rather than an impact one. It surfaces small, lopsided specialities.

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

Agricultural and Biological Sciences: 0.24× its world share, 0 worksAgricultural and Bio…Biochemistry, Genetics and Molecular Biology: 1.63× its world share, 2 worksBiochemistry, Geneti…Chemical Engineering: 0.82× its world share, 0 worksChemical EngineeringChemistry: 1.10× its world share, 0 worksChemistryComputer Science: 0.16× its world share, 0 worksComputer ScienceEngineering: 4.33× its world share, 19 worksEngineeringEnvironmental Science: 0.54× its world share, 1 worksEnvironmental ScienceMaterials Science: 1.04× its world share, 1 worksMaterials SciencePhysics and Astronomy: 2.68× its world share, 2 worksPhysics and AstronomyHealth Professions: 0.09× its world share, 0 worksHealth ProfessionsMedicine: 0.27× its world share, 2 worksMedicineVeterinary: 7.04× its world share, 0 worksVeterinaryBusiness, Management and Accounting: 0.71× its world share, 1 worksBusiness, Management…Decision Sciences: 0.59× its world share, 0 worksDecision SciencesPsychology: 0.13× its world share, 0 worksPsychology1×world share
more than its size predictsabout as predictedless

Rings at 0.5×, 1× and 2×. Widest outward: Veterinary, 7.0×. Every wedge is a field page.

All 15 fields, with their numbers
  1. Veterinary7.04×0 works
  2. Engineering4.33×19 works
  3. Physics and Astronomy2.68×2 works
  4. Biochemistry, Genetics and Molecular Biology1.63×2 works
  5. Chemistry1.10×0 works
  6. Materials Science1.04×1 works
  7. Chemical Engineering0.82×0 works
  8. Business, Management and Accounting0.71×1 works
  9. Decision Sciences0.59×0 works
  10. Environmental Science0.54×1 works
  11. Medicine0.27×2 works
  12. Agricultural and Biological Sciences0.24×0 works
  13. Computer Science0.16×0 works
  14. Psychology0.13×0 works
  15. Health Professions0.09×0 works

Who are the top researchers at MKS Instruments (United States)?

Ranked on the quality score, David J. Coumou, Aaron Radomski and Darryl Wayne Peters lead among researchers whose main affiliation is MKS Instruments (United States).

  1. 1 David J. Coumou United States · #3,413,653 worldwide 625 citations · 45 works
  2. 2 Aaron Radomski United States · #3,464,578 worldwide 218 citations · 18 works
  3. 3 Darryl Wayne Peters United States · #4,887,476 worldwide 200 citations · 36 works
All ranked researchers at MKS Instruments (United States)

What are the most cited papers from MKS Instruments (United States)?

The most cited paper from MKS Instruments (United States) is "On Asymptotic Stabilizability of Linear Systems With Delayed Input" (Zongli Lin, Haijun Fang, 2007), with 217 citations. Next come "Model‐Informed Drug Discovery and Development: Current Industry Good Practice and Regulatory Expectations and Future Perspectives" (138) and "Investigation of 1.2 kV SiC MOSFET for high frequency high power applications" (93).

Most cited papers
#PaperReleasedCitations
1 On Asymptotic Stabilizability of Linear Systems With Delayed Input Zongli Lin, Haijun Fang · IEEE Transactions on Automatic Control Jun 2007 217
2 Model‐Informed Drug Discovery and Development: Current Industry Good Practice and Regulatory Expectations and Future Perspectives Scott F. Marshall, Rajanikanth Madabushi, Efthymios Manolis et al. · CPT Pharmacometrics & Systems Pharmacology Open access 9 Nov 2018 138
3 Investigation of 1.2 kV SiC MOSFET for high frequency high power applications Honggang Sheng, Zheng Chen, Fred Wang et al. Conference paperOpen access Feb 2010 93
4 Tantalum Nitride Films Grown by Inorganic Low Temperature Thermal Chemical Vapor Deposition Diffusion Barrier Properties in Copper Metallization Alain E. Kaloyeros, Xiaomeng Charlene Chen, Tanja Stark et al. · Journal of The Electrochemical Society Open access 1999 75
5 Tunable Matching Networks Based on Phase-Switched Impedance Modulation1 Alexander S. Jurkov, Aaron Radomski, David John Perreault · IEEE Transactions on Power Electronics Open access 12 Mar 2020 58
All 60 most cited papers, with filters and sorting

Which keywords describe research at MKS Instruments (United States)?

By fractional works in 2022-now, weighted toward what it does more of than the world: Femtosecond Laser, Micromachining, Biomedical Applications, Integrated Circuits, Tool Wear, Cancer Detection, In Vivo Imaging and Chemical Mechanical Planarization.

▲ more of its work than of the world's◆ about the world's share▼ less than the world's

Size is fractional works in 2022-now in the topics tagged with each word; colour is the word's share of this institution's work against its share of the world's. The 18 words are chosen for being large and distinctive. Each links to the topic it comes from most.

All 18 words, with their numbers
  1. Femtosecond Laser4▲ 229×1 topic
  2. Micromachining4▲ 257×1 topic
  3. Biomedical Applications2▲ 6.1×4 topics
  4. Integrated Circuits2▲ 43×3 topics
  5. Cancer Detection2▲ 85×2 topics
  6. In Vivo Imaging2▲ 68×2 topics
  7. Tool Wear2▲ 45×2 topics
  8. Chemical Mechanical Planarization2▲ 116×1 topic
  9. Material Removal Mechanism2▲ 116×1 topic
  10. Thermal Management1▲ 15×2 topics
  11. Fluorescent Proteins1▲ 201×1 topic
  12. Interconnect1▲ 262×1 topic
  13. Photoacoustic Imaging1▲ 136×1 topic
  14. Super-Resolution Imaging1▲ 146×1 topic
  15. Through-Silicon Via1▲ 262×1 topic
  16. Tomography1▲ 26×1 topic
  17. Biomedical Engineering1▲ 24×2 topics
  18. Sustainability1▲ 1.41×2 topics

Which research topics does MKS Instruments (United States) publish most on?

By volume in 2022-now: Laser Material Processing Techniques, Advanced Surface Polishing Techniques, 3D IC and TSV technologies and Advanced Fluorescence Microscopy Techniques.

Laser Material Processin…4Laser Material Processing Techniques: 4 fractional worksAdvanced Surface Polishi…2Advanced Surface Polishing Techniques: 2 fractional works3D IC and TSV technologies13D IC and TSV technologies: 1 fractional worksAdvanced Fluorescence Microscopy Techniques: 1 fractional worksPhotoacoustic and Ultrasonic Imaging: 1 fractional worksPhotonic and Optical Dev…1Photonic and Optical Devices: 1 fractional worksIntegrated Circuits and Semiconductor Failure Analysis: 1 fractional worksSemiconductor Lasers and Optical Devices: 1 fractional worksAdditive Manufacturing and 3D Printing Technologies: 1 fractional worksRecycling and Waste Management Techniques: 0 fractional works
Computational MechanicsBiomedical EngineeringElectrical and Electronic EngineeringBiophysics2 others

Area is fractional works; colour is the subfield each topic belongs to.

  1. 1 Laser Material Processing Techniques Computational Mechanics 4 works
  2. 2 Advanced Surface Polishing Techniques Biomedical Engineering 2 works
  3. 3 3D IC and TSV technologies Electrical and Electronic Engineering 1 works
  4. 4 Advanced Fluorescence Microscopy Techniques Biophysics 1 works
  5. 5 Photoacoustic and Ultrasonic Imaging Biomedical Engineering 1 works
  6. 6 Photonic and Optical Devices Electrical and Electronic Engineering 1 works
  7. 7 Integrated Circuits and Semiconductor Failure Analysis Electrical and Electronic Engineering 1 works
  8. 8 Semiconductor Lasers and Optical Devices Electrical and Electronic Engineering 1 works
  9. 9 Additive Manufacturing and 3D Printing Technologies Automotive Engineering 1 works
  10. 10 Recycling and Waste Management Techniques Industrial and Manufacturing Engineering 0 works

How open and international is its research?

Against the world's own shares: the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available14.2%not open85.8%

World: 40% of research is openly available.

with international co-authors14.5%domestic only85.5%

World: 18% is written across borders.

How has MKS Instruments (United States)'s research output changed?

Output in 2022-2025 was 58% higher than in 2018-2021.

still counting1990200020102020
grewheldshrank

The same series as a ribbon: one cell per year, darker for more. The line above answers how much; this answers when.

Its share of all research

Growing output can still be a shrinking share: all of science grows. This is MKS Instruments (United States) as a percentage of every work published that year, 0.00012% in 2024.

still counting0.00050%0.0010%0.0015%MKS Instruments (United States)0.00012% in 202519801990200020102020

Fractional works of MKS Instruments (United States) over all fractional works that year. How the balance of science has shifted.

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MKS Instruments (United States) on Science Explorer

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