T. Chevolleau
T. Chevolleau publishes mostly in Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials and Mechanics of Materials, on topics such as Semiconductor materials and devices, Copper Interconnects and Reliability and Metal and Thin Film Mechanics.
- World rank
- #1,381,979 of 1,633,909 ranked researchers
- Rank in France
- #83,576 of 96,116
- Works
- 54
- Citations
- 11
- Citations per work
- 0.2
What does T. Chevolleau research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering42% of their works
- 2Electronic, Optical and Magnetic Materials17% of their works
- 3Mechanics of Materials9% of their works
- 4Materials Chemistry8% of their works
- 5Biomedical Engineering6% of their works
- 6Ceramics and Composites5% of their works
Research topics
- Semiconductor materials and devices
- Copper Interconnects and Reliability
- Metal and Thin Film Mechanics
- Plasma Diagnostics and Applications
- Advancements in Semiconductor Devices and Circuit Design
- Advancements in Photolithography Techniques
- Advanced ceramic materials synthesis
- Advanced Surface Polishing Techniques
Which keywords describe T. Chevolleau's research?
The keywords of their largest research topics: Thin Films, Atomic Layer Deposition, High-k Dielectrics, Low-k Dielectrics, Microelectronics, Coatings, Nanoindentation and Nanowire Transistors.
- Chemical Mechanical Planarization
- Nanofabrication
- Ceramic Materials
- Semiconductor Industry
- Nanowire Transistors
- Coatings
- Low-k Dielectrics
- Atomic Layer Deposition
- Thin Films
- High-k Dielectrics
- Microelectronics
- Nanoindentation
- Plasma Etching
- Tunnel Field-Effect Transistors
- Electron Beam Lithography
- Sintering
- Material Removal Mechanism
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- Thin Films252 topics
- Atomic Layer Deposition201 topic
- High-k Dielectrics201 topic
- Low-k Dielectrics171 topic
- Microelectronics171 topic
- Coatings81 topic
- Nanoindentation81 topic
- Nanowire Transistors61 topic
- Plasma Etching61 topic
- Semiconductor Industry61 topic
- Tunnel Field-Effect Transistors61 topic
- Ceramic Materials51 topic
- Electron Beam Lithography51 topic
- Nanofabrication51 topic
- Sintering51 topic
- Chemical Mechanical Planarization31 topic
- Material Removal Mechanism31 topic
Where does T. Chevolleau work?
T. Chevolleau's main affiliation in the publication record is Laboratoire des Technologies de la Microélectronique, France.
How many publications and citations does T. Chevolleau have?
Science Explorer counts 54 works and 11 citations for T. Chevolleau, ranking #1,381,979 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.