What are the most cited papers from Nuflare Technology, Inc. (Japan)?

Question

Accepted Answer

The most cited paper from Nuflare Technology, Inc. (Japan) is "RESCAN: an actinic lensless microscope for defect inspection of EUV reticles" (Iacopo Mochi, Patrick Helfenstein, István Mohacsi et al., 2017), with 35 citations. Next come "Multi-beam mask writer MBM-1000 and its application field" (35) and "Development of a 150 mm 4H-SiC epitaxial reactor with high-speed wafer rotation" (33).