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Researcher · Tokyo Electron (Japan) · Japan

Kaoru Maekawa

Kaoru Maekawa publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Mechanics of Materials, on topics such as Semiconductor materials and devices, Advanced Surface Polishing Techniques and Copper Interconnects and Reliability.

OpenAlex
World rank
#1,598,423
of 1,633,909 ranked researchers
Rank in Japan
#111,552
of 114,622
Works
15
Citations
8
Citations per work
0.5

What does Kaoru Maekawa research?

Electrical and Electronic Engineering: 38.1%Biomedical Engineering: 19.0%Mechanics of Materials: 14.3%Electronic, Optical and Magnetic Materials: 14.3%other fields: 14.3%38%top field
Electrical and Electronic Engineering38.1%Biomedical Engineering19.0%Mechanics of Materials14.3%Electronic, Optical and Magnetic Materials14.3%other fields14.3%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering38% of their works
  2. 2Biomedical Engineering19% of their works
  3. 3Mechanics of Materials14% of their works
  4. 4Electronic, Optical and Magnetic Materials14% of their works
  5. 5Materials Chemistry10% of their works
  6. 6Ceramics and Composites5% of their works

Research topics

Which keywords describe Kaoru Maekawa's research?

The keywords of their largest research topics: Thin Films, Atomic Layer Deposition, High-k Dielectrics, Chemical Mechanical Planarization, Low-k Dielectrics, Material Removal Mechanism, Microelectronics and Coatings.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 18 words, with their numbers
  1. Thin Films52 topics
  2. Atomic Layer Deposition41 topic
  3. High-k Dielectrics41 topic
  4. Chemical Mechanical Planarization31 topic
  5. Low-k Dielectrics31 topic
  6. Material Removal Mechanism31 topic
  7. Microelectronics31 topic
  8. Coatings21 topic
  9. Nanoindentation21 topic
  10. Solar Cells22 topics
  11. Atom Probe Tomography11 topic
  12. Efficiency11 topic
  13. Electron Beam Lithography11 topic
  14. Nanofabrication11 topic
  15. Plasmonics11 topic
  16. Silicon11 topic
  17. Thin-Film Transistors11 topic
  18. Three-Dimensional Analysis11 topic

Where does Kaoru Maekawa work?

Kaoru Maekawa's main affiliation in the publication record is Tokyo Electron (Japan), Japan.

How many publications and citations does Kaoru Maekawa have?

Science Explorer counts 15 works and 8 citations for Kaoru Maekawa, ranking #1,598,423 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.