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Tokyo Electron (Japan)

In research, Tokyo Electron (Japan) stands highest in Engineering (#4,362 of 5,901 worldwide) and Physical Sciences (#9,549 of 10,670 worldwide), 2022-now. Relative to its size it is most specialised in Electrical and Electronic Engineering, Materials Science and Engineering (Electrical and Electronic Engineering is 11.9× its share of world research).

tel.co.jpROR OpenAlex
World rank, 2022-now
#21,098
of 22,385 · #23,367 all time
Rank in Japan
#758
of 924
Research works
1.1k
▲ 21% vs 2018-21
Citations
7.7k
7.2 per fractional work
Top-10% rate
5.7%
all institutions 10.0%
vs its own fields
0.85×
1.00× is exactly expected
Open access
18%
world 40%
International
22%
world 18%
Tokyo Electron (Japan)

What is Tokyo Electron (Japan) known for in research?

The fields where it stands highest, 2022-now, ranked among every institution above the floor in each field.

FieldWorld rankWhere that sitsTop-10% rateWorksAll time
EngineeringField #4,362 of 5,901 7.0%85 #5675
Physical SciencesDomain #9,549 of 10,670 6.1%122 #10386

Each strip is that field's whole ranked pool, with the notch where Tokyo Electron (Japan) sits in it, in the colour of the band that rank falls in. The track under the rate is the rate itself: it carries no average mark, because the average differs by field (from about 6% in Dentistry to 21% in Economics).

Which fields of science does Tokyo Electron (Japan) work in?

In 2022-now, 95% of research at Tokyo Electron (Japan) is in Physical Sciences, 3% in Social Sciences. Its largest fields are Engineering (64%), Materials Science (20%), Physics and Astronomy (4%). It does 2.4× the world's share of Physical Sciences.

Physical Sciences: 138 fractional works · 94.5% of its workEngineering: 94 fractional works · 64.2% of its workElectrical and Electronic Engineering: 62 fractional works · 42.4% of its workBiomedical Engineering: 12 fractional works · 8.3% of its workMechanical Engineering: 5 fractional works · 3.7% of its workMechanics of Materials: 4 fractional works · 2.7% of its workComputational Mechanics: 3 fractional works · 2.2% of its workIndustrial and Manufacturing Engineering: 3 fractional works · 2.0% of its workAutomotive Engineering: 1 fractional works · 0.8% of its workAerospace Engineering: 1 fractional works · 0.7% of its workControl and Systems Engineering: 1 fractional works · 0.5% of its workSafety, Risk, Reliability and Quality: 1 fractional works · 0.5% of its workCivil and Structural Engineering: 0 fractional works · 0.2% of its workMaterials Science: 30 fractional works · 20.2% of its workElectronic, Optical and Magnetic Materials: 10 fractional works · 7.1% of its workMaterials Chemistry: 10 fractional works · 6.8% of its workSurfaces, Coatings and Films: 6 fractional works · 4.1% of its workPolymers and Plastics: 2 fractional works · 1.5% of its workBiomaterials: 0 fractional works · 0.3% of its workCeramics and Composites: 0 fractional works · 0.2% of its workSmaller subfields together: 0 fractional works · 0.1% of its workPhysics and Astronomy: 6 fractional works · 4.3% of its workAtomic and Molecular Physics, and Optics: 4 fractional works · 2.8% of its workRadiation: 1 fractional works · 0.6% of its workStatistical and Nonlinear Physics: 0 fractional works · 0.3% of its workInstrumentation: 0 fractional works · 0.2% of its workSmaller subfields together: 0 fractional works · 0.3% of its workComputer Science: 4 fractional works · 2.8% of its workArtificial Intelligence: 1 fractional works · 0.8% of its workComputer Networks and Communications: 1 fractional works · 0.8% of its workComputer Vision and Pattern Recognition: 1 fractional works · 0.4% of its workInformation Systems: 1 fractional works · 0.4% of its workHardware and Architecture: 0 fractional works · 0.3% of its workEnvironmental Science: 3 fractional works · 1.8% of its workEnvironmental Chemistry: 2 fractional works · 1.2% of its workWater Science and Technology: 0 fractional works · 0.3% of its workSmaller subfields together: 0 fractional works · 0.2% of its workChemistry: 1 fractional works · 0.5% of its workSpectroscopy: 0 fractional works · 0.2% of its workSmaller subfields together: 0 fractional works · 0.2% of its workMathematics: 1 fractional works · 0.5% of its workApplied Mathematics: 0 fractional works · 0.2% of its workModeling and Simulation: 0 fractional works · 0.2% of its workEarth and Planetary Sciences: 0 fractional works · 0.2% of its workChemical Engineering: 0 fractional works · 0.2% of its workEnergy: 0 fractional works · 0.0% of its workSocial Sciences: 4 fractional works · 2.8% of its workDecision Sciences: 2 fractional works · 1.2% of its workStatistics, Probability and Uncertainty: 2 fractional works · 1.1% of its workSmaller subfields together: 0 fractional works · 0.1% of its workBusiness, Management and Accounting: 1 fractional works · 0.6% of its workManagement of Technology and Innovation: 1 fractional works · 0.5% of its workSmaller subfields together: 0 fractional works · 0.2% of its workSocial Sciences: 1 fractional works · 0.4% of its workEconomics, Econometrics and Finance: 0 fractional works · 0.3% of its workEconomics and Econometrics: 0 fractional works · 0.3% of its workArts and Humanities: 0 fractional works · 0.2% of its workMusic: 0 fractional works · 0.2% of its workHealth Sciences: 2 fractional works · 1.3% of its workMedicine: 2 fractional works · 1.2% of its workRadiology, Nuclear Medicine and Imaging: 1 fractional works · 0.4% of its workSmaller subfields together: 1 fractional works · 0.8% of its workHealth Professions: 0 fractional works · 0.1% of its workLife Sciences: 2 fractional works · 1.3% of its workBiochemistry, Genetics and Molecular Biology: 1 fractional works · 1.0% of its workMolecular Biology: 1 fractional works · 0.5% of its workStructural Biology: 0 fractional works · 0.3% of its workSmaller subfields together: 0 fractional works · 0.2% of its workAgricultural and Biological Sciences: 0 fractional works · 0.2% of its workPharmacology, Toxicology and Pharmaceutics: 0 fractional works · 0.1% of its workNeuroscience: 0 fractional works · 0.0% of its workALL ITS WORKTokyo Electron(Japan)147fractional works, 2022-now
Life Sciences1%Physical Sciences95%Health Sciences1%Social Sciences3%

Each ring splits the one inside it: the four domains of science, their fields, their subfields. Size is fractional works in 2022-now. Every slice is a page; the interactive view zooms down to single topics and colours each by how much more of it this institution does than the world.

Its 4 domains and 22 fields, with their numbers
    1. Engineering9464.2%
    2. Materials Science3020.2%
    3. Physics and Astronomy64.3%
    4. Computer Science42.8%
    5. Environmental Science31.8%
    6. Chemistry10.5%
    7. Mathematics10.5%
    8. Earth and Planetary Sciences00.2%
    9. Chemical Engineering00.2%
    10. Energy00.0%
    1. Decision Sciences21.2%
    2. Business, Management and Accounting10.6%
    3. Social Sciences10.4%
    4. Economics, Econometrics and Finance00.3%
    5. Arts and Humanities00.2%
    1. Medicine21.2%
    2. Health Professions00.1%
    1. Biochemistry, Genetics and Molecular Biology11.0%
    2. Agricultural and Biological Sciences00.2%
    3. Pharmacology, Toxicology and Pharmaceutics00.1%
    4. Neuroscience00.0%
    5. Immunology and Microbiology00.0%
All of science, and how each field's share has moved since 1950: the Science domain explorer

What does Tokyo Electron (Japan) specialise in?

Where its research is concentrated relative to its size: Electrical and Electronic Engineering takes 11.9× the share of its output that it takes of world research.

  1. Electrical and Electronic EngineeringSubfield · 62.1 works12×
  2. Materials ScienceField · 29.6 works5.8×
  3. EngineeringField · 94.1 works4.3×
← less than its size predicts1×more →

Location quotient, a volume reading rather than an impact one. It surfaces small, lopsided specialities.

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

Agricultural and Biological Sciences: 0.03× its world share, 0 worksAgricultural and Bio…Biochemistry, Genetics and Molecular Biology: 0.19× its world share, 2 worksBiochemistry, Geneti…Immunology and Microbiology: 0.02× its world share, 0 worksImmunology and Micro…Neuroscience: 0.02× its world share, 0 worksNeurosciencePharmacology, Toxicology and Pharmaceutics: 0.32× its world share, 0 worksPharmacology, Toxico…Chemical Engineering: 0.54× its world share, 0 worksChemical EngineeringChemistry: 0.29× its world share, 1 worksChemistryComputer Science: 0.35× its world share, 4 worksComputer ScienceEarth and Planetary Sciences: 0.13× its world share, 0 worksEarth and Planetary …Energy: 0.05× its world share, 0 worksEnergyEngineering: 4.28× its world share, 94 worksEngineeringEnvironmental Science: 0.35× its world share, 3 worksEnvironmental ScienceMaterials Science: 5.78× its world share, 30 worksMaterials ScienceMathematics: 0.39× its world share, 1 worksMathematicsPhysics and Astronomy: 1.91× its world share, 6 worksPhysics and AstronomyHealth Professions: 0.04× its world share, 0 worksHealth ProfessionsMedicine: 0.06× its world share, 2 worksMedicineArts and Humanities: 0.08× its world share, 0 worksArts and HumanitiesBusiness, Management and Accounting: 0.20× its world share, 1 worksBusiness, Management…Decision Sciences: 1.29× its world share, 2 worksDecision SciencesEconomics, Econometrics and Finance: 0.14× its world share, 0 worksEconomics, Econometr…Social Sciences: 0.03× its world share, 1 worksSocial Sciences1×world share
more than its size predictsabout as predictedless

Rings at 0.5×, 1× and 2×. Widest outward: Materials Science, 5.8×. Every wedge is a field page.

All 22 fields, with their numbers
  1. Materials Science5.78×30 works
  2. Engineering4.28×94 works
  3. Physics and Astronomy1.91×6 works
  4. Decision Sciences1.29×2 works
  5. Chemical Engineering0.54×0 works
  6. Mathematics0.39×1 works
  7. Computer Science0.35×4 works
  8. Environmental Science0.35×3 works
  9. Pharmacology, Toxicology and Pharmaceutics0.32×0 works
  10. Chemistry0.29×1 works
  11. Business, Management and Accounting0.20×1 works
  12. Biochemistry, Genetics and Molecular Biology0.19×2 works
  13. Economics, Econometrics and Finance0.14×0 works
  14. Earth and Planetary Sciences0.13×0 works
  15. Arts and Humanities0.08×0 works
  16. Medicine0.06×2 works
  17. Energy0.05×0 works
  18. Health Professions0.04×0 works
  19. Agricultural and Biological Sciences0.03×0 works
  20. Social Sciences0.03×1 works
  21. Immunology and Microbiology0.02×0 works
  22. Neuroscience0.02×0 works

Who are the top researchers at Tokyo Electron (Japan)?

Ranked on the quality score, Yoshihide Kihara, Nathan Ip and Haruo Yotsumoto lead among researchers whose main affiliation is Tokyo Electron (Japan).

  1. 1 Yoshihide Kihara Japan · #2,476,265 worldwide 332 citations · 27 works
  2. 2 Nathan Ip Japan · #3,606,731 worldwide 163 citations · 20 works
  3. 3 Haruo Yotsumoto Japan · #3,711,119 worldwide 324 citations · 23 works
  4. 4 Yusaku Kashiwagi Japan · #3,929,921 worldwide 420 citations · 21 works
  5. 5 Kojitsu Goto Japan · #3,944,493 worldwide 324 citations · 18 works
  6. 6 Sonam D. Sherpa Japan · #3,984,600 worldwide 381 citations · 20 works
  7. 7 Yoshiro Kabe Japan · #4,360,791 worldwide 59 citations · 16 works
  8. 8 Sanjeev Kaushal Japan · #4,361,216 worldwide 281 citations · 35 works
  9. 9 Genji Nakamura Japan · #4,408,078 worldwide 192 citations · 27 works
  10. 10 Melbs C. LeMieux Japan · #4,450,568 worldwide 253 citations · 29 works
All ranked researchers at Tokyo Electron (Japan)

What are the most cited papers from Tokyo Electron (Japan)?

The most cited paper from Tokyo Electron (Japan) is "Cysteine-106 of DJ-1 is the most sensitive cysteine residue to hydrogen peroxide-mediated oxidation in vivo in human umbilical vein endothelial cells" (Tomoya Kinumi, Junko Kimata, Takahiro Taira et al., 2004), with 373 citations. Next come "Design principles for maximizing photovoltage in metal-oxide-protected water-splitting photoanodes" (272) and "Turning point in apoptosis/necrosis induced by hydrogen peroxide" (186).

Most cited papers
#PaperReleasedCitations
1 Cysteine-106 of DJ-1 is the most sensitive cysteine residue to hydrogen peroxide-mediated oxidation in vivo in human umbilical vein endothelial cells Tomoya Kinumi, Junko Kimata, Takahiro Taira et al. · Biochemical and Biophysical Research Communications 9 Apr 2004 373
2 Design principles for maximizing photovoltage in metal-oxide-protected water-splitting photoanodes Andrew G. Scheuermann, John Lawrence, Kyle W. Kemp et al. · Nature Materials Open access 19 Oct 2015 272
3 Turning point in apoptosis/necrosis induced by hydrogen peroxide Yoshiro Saito, Keiko Nishio, Yoko Ogawa et al. · Free Radical Research 2006 186
4 Future of plasma etching for microelectronics: Challenges and opportunities Gottlieb S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Open access 7 Jun 2024 179
5 A ring-like accretion structure in M87 connecting its black hole and jet Rusen S. Lu et al. · Nature Open access121 authors 26 Apr 2023 156
All 60 most cited papers, with filters and sorting

Which keywords describe research at Tokyo Electron (Japan)?

By fractional works in 2022-now, weighted toward what it does more of than the world: High-Resolution Patterning, Thin Films, Electromigration, Nanofabrication, Electron Beam Lithography, Resolution Limits, Nanoelectronics and Atomic Layer Deposition.

▲ more of its work than of the world's◆ about the world's share▼ less than the world's

Size is fractional works in 2022-now in the topics tagged with each word; colour is the word's share of this institution's work against its share of the world's. The 40 words are chosen for being large and distinctive. Each links to the topic it comes from most.

All 40 words, with their numbers
  1. High-Resolution Patterning17▲ 565×2 topics
  2. Thin Films16▲ 56×8 topics
  3. Electromigration14▲ 342×2 topics
  4. Nanofabrication14▲ 150×2 topics
  5. Electron Beam Lithography13▲ 942×1 topic
  6. Resolution Limits13▲ 942×1 topic
  7. Nanoelectronics11▲ 91×2 topics
  8. Atomic Layer Deposition11▲ 113×1 topic
  9. High-k Dielectrics11▲ 113×1 topic
  10. Nanowires10▲ 46×4 topics
  11. Electrical Resistivity9▲ 439×2 topics
  12. Low-k Dielectrics9▲ 619×1 topic
  13. Microelectronics9▲ 503×1 topic
  14. Nanoparticles8▲ 4.5×9 topics
  15. X-ray Photoelectron Spectroscopy8▲ 72×2 topics
  16. Failure Analysis7▲ 54×2 topics
  17. Integrated Circuits7▲ 34×3 topics
  18. Laser Voltage Probing7▲ 177×1 topic
  19. Photon Emission Microscopy7▲ 177×1 topic
  20. Solar Cells7▲ 23×5 topics
  21. Thermal Management6▲ 13×3 topics
  22. Interconnect6▲ 240×1 topic
  23. Nanoscale Patterning6▲ 153×2 topics
  24. Through-Silicon Via6▲ 240×1 topic
  25. Thermal Behavior6▲ 92×2 topics
  26. High-Temperature Electronics5▲ 61×2 topics
  27. Interfacial Reactions5▲ 193×1 topic
  28. Lead-free Solders5▲ 193×1 topic
  29. Nanocomposites5▲ 4.4×8 topics
  30. Biological Applications5▲ 50×2 topics
  31. Electron Inelastic Mean Free Paths5▲ 184×1 topic
  32. Scanning Electron Microscopy5▲ 149×1 topic
  33. Nanolithography5▲ 272×1 topic
  34. Soft Lithography5▲ 272×1 topic
  35. Flexible Electronics4▲ 17×3 topics
  36. Plasma Etching4▲ 120×1 topic
  37. Semiconductor Industry4▲ 120×1 topic
  38. Molecular Dynamics Simulation4▲ 22×3 topics
  39. Photovoltaics4▲ 15×3 topics
  40. Silicon4▲ 68×2 topics

Which research topics does Tokyo Electron (Japan) publish most on?

By volume in 2022-now: Advancements in Photolithography Techniques, Semiconductor materials and devices, Copper Interconnects and Reliability and Integrated Circuits and Semiconductor Failure Analysis.

Advancements in Photolithography Techniques: 13 fractional worksSemiconductor materials and devices: 11 fractional worksCopper Interconnects and…9Copper Interconnects and Reliability: 9 fractional worksIntegrated Circuits and …7Integrated Circuits and Semiconductor Failure Analysis: 7 fractional works3D IC and TSV technologies: 6 fractional worksElectronic Packaging and Soldering Technologies: 5 fractional worksElectron and X-Ray Spect…5Electron and X-Ray Spectroscopy Techniques: 5 fractional worksNanofabrication and Lithography Techniques: 5 fractional worksPlasma Diagnostics and Applications: 4 fractional worksSilicon and Solar Cell Technologies: 3 fractional works
Electrical and Electronic EngineeringElectronic, Optical and Magnetic MaterialsSurfaces, Coatings and FilmsBiomedical Engineering

Area is fractional works; colour is the subfield each topic belongs to.

  1. 1 Advancements in Photolithography Techniques Electrical and Electronic Engineering 13 works
  2. 2 Semiconductor materials and devices Electrical and Electronic Engineering 11 works
  3. 3 Copper Interconnects and Reliability Electronic, Optical and Magnetic Materials 9 works
  4. 4 Integrated Circuits and Semiconductor Failure Analysis Electrical and Electronic Engineering 7 works
  5. 5 3D IC and TSV technologies Electrical and Electronic Engineering 6 works
  6. 6 Electronic Packaging and Soldering Technologies Electrical and Electronic Engineering 5 works
  7. 7 Electron and X-Ray Spectroscopy Techniques Surfaces, Coatings and Films 5 works
  8. 8 Nanofabrication and Lithography Techniques Biomedical Engineering 5 works
  9. 9 Plasma Diagnostics and Applications Electrical and Electronic Engineering 4 works
  10. 10 Silicon and Solar Cell Technologies Electrical and Electronic Engineering 3 works

How open and international is its research?

Against the world's own shares: the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available18.0%not open82.0%

World: 40% of research is openly available.

with international co-authors22.3%domestic only77.7%

World: 18% is written across borders.

How has Tokyo Electron (Japan)'s research output changed?

Output in 2022-2025 was 21% higher than in 2018-2021.

still counting1990200020102020
grewheldshrank

The same series as a ribbon: one cell per year, darker for more. The line above answers how much; this answers when.

Its share of all research

Growing output can still be a shrinking share: all of science grows. This is Tokyo Electron (Japan) as a percentage of every work published that year, 0.00048% in 2024.

still counting0.0020%0.0040%0.0060%Tokyo Electron (Japan)0.00067% in 202519801990200020102020

Fractional works of Tokyo Electron (Japan) over all fractional works that year. How the balance of science has shifted.

How much of it reaches the world top 10%

Year by year, against all institutions in the same year.

still counting5%10%15%all institutions10.0% in 2025Tokyo Electron (Japan)2.1% in 202520102020

Of each year's output, the share that reached the world's 10% most cited for its field and year. Peak 12.6% in 2023.

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Tokyo Electron (Japan) on Science Explorer

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