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Tokyo Electron (Japan)

In research, Tokyo Electron (Japan) stands highest in Physical Sciences (#10,750 of 12,888 worldwide) and Engineering (#5,677 of 6,636 worldwide), 2022–2025. Relative to its size it is most specialised in Electrical and Electronic Engineering, Materials Science and Engineering — Electrical and Electronic Engineering is 12.2× its share of world research.

tel.co.jpROR OpenAlex
World rank, 2022–2025
#21,860
of 28,054 · #16,123 all time
Rank in Japan
#681
of 1,070
Research works
1.1k
▼ 36% vs 2013–17
Citations
7.7k
7.2 per fractional work
Top-10% rate
5.0%
record average 16.5%
Open access
18%
world 28%

What is Tokyo Electron (Japan) known for in research?

The fields where it stands highest, 2022–2025, ranked among every institution above the floor in each field.

FieldWorld rankWhere that sitsTop-10% rateWorksAll time
Physical SciencesDomain #10,750 of 12,888 5.0%122 #9300
EngineeringField #5,677 of 6,636 5.1%85 #5941

Each strip is that field’s whole ranked pool, with the notch where Tokyo Electron (Japan) sits in it, in the colour of the band that rank falls in. The track under the rate is the rate itself: it carries no world mark, because the world rate differs by field (from about 6% to 21% in this record).

What does Tokyo Electron (Japan) specialise in?

Where its research is concentrated relative to its size: Electrical and Electronic Engineering takes 12.2× the share of its output that it takes of world research.

  1. Electrical and Electronic EngineeringSubfield · 56.0 works12×
  2. Materials ScienceField · 24.6 works5.5×
  3. EngineeringField · 85.0 works4.4×
← less than its size predicts1×more →

Location quotient, a volume reading rather than an impact one. It surfaces small, lopsided specialities.

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

Agricultural and Biological Sciences: 0.04× its world share, 0 worksAgricultural and Bio…Biochemistry, Genetics and Molecular Biology: 0.21× its world share, 1 worksBiochemistry, Geneti…Immunology and Microbiology: 0.02× its world share, 0 worksImmunology and Micro…Neuroscience: 0.02× its world share, 0 worksNeurosciencePharmacology, Toxicology and Pharmaceutics: 0.37× its world share, 0 worksPharmacology, Toxico…Chemical Engineering: 0.62× its world share, 0 worksChemical EngineeringChemistry: 0.17× its world share, 0 worksChemistryComputer Science: 0.34× its world share, 3 worksComputer ScienceEarth and Planetary Sciences: 0.15× its world share, 0 worksEarth and Planetary …Engineering: 4.40× its world share, 85 worksEngineeringEnvironmental Science: 0.30× its world share, 2 worksEnvironmental ScienceMaterials Science: 5.48× its world share, 25 worksMaterials ScienceMathematics: 0.44× its world share, 1 worksMathematicsPhysics and Astronomy: 1.76× its world share, 5 worksPhysics and AstronomyHealth Professions: 0.05× its world share, 0 worksHealth ProfessionsMedicine: 0.07× its world share, 2 worksMedicineBusiness, Management and Accounting: 0.22× its world share, 1 worksBusiness, Management…Decision Sciences: 1.34× its world share, 2 worksDecision SciencesEconomics, Econometrics and Finance: 0.16× its world share, 0 worksEconomics, Econometr…Social Sciences: 0.02× its world share, 0 worksSocial Sciences1×world share
more than its size predictsabout as predictedless

Rings at 0.5×, 1× and 2×. Widest outward: Materials Science, 5.5×. Every wedge is a field page.

Who are the top researchers at Tokyo Electron (Japan)?

Ranked on the composite score, Nobuo Ishii, 真理子 鈴木 and C Baud lead among researchers whose main affiliation is Tokyo Electron (Japan).

  1. 1 Nobuo Ishii Japan · #139,787 worldwide 243 citations · 23 works
  2. 2 真理子 鈴木 Japan · #297,092 worldwide 0 citations · 58 works
  3. 3 C Baud Japan · #392,436 worldwide 29 citations · 19 works
  4. 4 Carlos Fonseca Japan · #543,243 worldwide 63 citations · 15 works
  5. 5 真 和田 Japan · #761,835 worldwide 0 citations · 26 works
  6. 6 Shoichi Yamauchi Japan · #775,740 worldwide 6 citations · 16 works
  7. 7 Tsuyoshi Moriya Japan · #1,028,413 worldwide 54 citations · 28 works
  8. 8 Eiichi Nishimura Japan · #1,060,769 worldwide 24 citations · 22 works
  9. 9 Kazuo Sakamoto Japan · #1,092,610 worldwide 25 citations · 20 works
  10. 10 Takahiro Kitano Japan · #1,139,689 worldwide 32 citations · 29 works
All ranked researchers at Tokyo Electron (Japan)

Which keywords describe research at Tokyo Electron (Japan)?

By fractional works in 2022–2025, weighted toward what it does more of than the world: High-Resolution Patterning, Thin Films, Nanofabrication, Electron Beam Lithography, Resolution Limits, Electromigration, Nanoelectronics and Atomic Layer Deposition.

▲ more of its work than of the world’s◆ about the world’s share▼ less than the world’s

Size is fractional works in 2022–2025 in the topics tagged with each word; colour is the word's share of this institution's work against its share of the world's. The 40 words are chosen for being large and distinctive. Each links to the topic it comes from most.

All 40 words, with their numbers
  1. High-Resolution Patterning16▲ 599×2 topics
  2. Thin Films12▲ 50×6 topics
  3. Nanofabrication12▲ 151×2 topics
  4. Electron Beam Lithography12▲ 933×1 topic
  5. Resolution Limits12▲ 933×1 topic
  6. Electromigration12▲ 326×2 topics
  7. Nanoelectronics10▲ 85×2 topics
  8. Atomic Layer Deposition9▲ 103×1 topic
  9. High-k Dielectrics9▲ 103×1 topic
  10. X-ray Photoelectron Spectroscopy8▲ 78×2 topics
  11. Nanoparticles8▲ 4.6×7 topics
  12. Failure Analysis7▲ 56×2 topics
  13. Integrated Circuits7▲ 35×3 topics
  14. Nanowires7▲ 38×3 topics
  15. Low-k Dielectrics7▲ 599×1 topic
  16. Microelectronics7▲ 507×1 topic
  17. Laser Voltage Probing7▲ 177×1 topic
  18. Photon Emission Microscopy7▲ 177×1 topic
  19. Thermal Management6▲ 13×3 topics
  20. Nanoscale Patterning6▲ 165×2 topics
  21. Interconnect5▲ 249×1 topic
  22. Through-Silicon Via5▲ 249×1 topic
  23. Thermal Behavior5▲ 95×2 topics
  24. Electron Inelastic Mean Free Paths5▲ 198×1 topic
  25. Scanning Electron Microscopy5▲ 167×1 topic
  26. High-Temperature Electronics5▲ 63×2 topics
  27. Nanocomposites5▲ 4.7×8 topics
  28. Solar Cells5▲ 19×5 topics
  29. Biological Applications5▲ 55×2 topics
  30. Interfacial Reactions5▲ 198×1 topic
  31. Lead-free Solders5▲ 198×1 topic
  32. Nanolithography4▲ 311×1 topic
  33. Soft Lithography4▲ 311×1 topic
  34. Flexible Electronics4▲ 17×3 topics
  35. Molecular Dynamics Simulation3▲ 23×3 topics
  36. Neuromorphic Computing3▲ 22×2 topics
  37. Plasma Etching3▲ 107×1 topic
  38. Semiconductor Industry3▲ 107×1 topic
  39. Coatings3▲ 37×1 topic
  40. Nanoindentation3▲ 38×1 topic

Which research topics does Tokyo Electron (Japan) publish most on?

By volume in 2022–2025: Advancements in Photolithography Techniques, Semiconductor materials and devices, Copper Interconnects and Reliability and Integrated Circuits and Semiconductor Failure Analysis.

Advancements in Photolithography Techniques: 12 fractional worksSemiconductor materials and devices: 9 fractional worksCopper Interconnects and…7Copper Interconnects and Reliability: 7 fractional worksIntegrated Circuits and …7Integrated Circuits and Semiconductor Failure Analysis: 7 fractional works3D IC and TSV technologies: 5 fractional worksElectron and X-Ray Spectroscopy Techniques: 5 fractional worksElectronic Packaging and…5Electronic Packaging and Soldering Technologies: 5 fractional worksNanofabrication and Lithography Techniques: 4 fractional worksPlasma Diagnostics and Applications: 3 fractional worksMetal and Thin Film Mechanics: 3 fractional works
Electrical and Electronic EngineeringElectronic, Optical and Magnetic MaterialsSurfaces, Coatings and FilmsBiomedical Engineering1 others

Area is fractional works; colour is the subfield each topic belongs to.

  1. 1 Advancements in Photolithography Techniques Electrical and Electronic Engineering 12 works
  2. 2 Semiconductor materials and devices Electrical and Electronic Engineering 9 works
  3. 3 Copper Interconnects and Reliability Electronic, Optical and Magnetic Materials 7 works
  4. 4 Integrated Circuits and Semiconductor Failure Analysis Electrical and Electronic Engineering 7 works
  5. 5 3D IC and TSV technologies Electrical and Electronic Engineering 5 works
  6. 6 Electron and X-Ray Spectroscopy Techniques Surfaces, Coatings and Films 5 works
  7. 7 Electronic Packaging and Soldering Technologies Electrical and Electronic Engineering 5 works
  8. 8 Nanofabrication and Lithography Techniques Biomedical Engineering 4 works
  9. 9 Plasma Diagnostics and Applications Electrical and Electronic Engineering 3 works
  10. 10 Metal and Thin Film Mechanics Mechanics of Materials 3 works

How open and international is its research?

Against the world’s own shares — the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available18.0%not open82.0%

World: 28% of research is openly available.

with international co-authors22.3%domestic only77.7%

World: 19% is written across borders.

How has Tokyo Electron (Japan)'s research output changed?

Output in 2018–2022 was 36% lower than in 2013–2017.

1990200020102020
grewheldshrank

The same series as a ribbon — one cell per year, darker for more. The line above answers how much; this answers when.

Other research institutions in Tokyo

All research institutions in Tokyo

Research measures only: rankings here say nothing about teaching, admissions or student experience. Comparable institutions and collaboration partners are in the interactive view on the map.