Katsuhiko Tokushige
Katsuhiko Tokushige publishes mostly in Biomedical Engineering, Electrical and Electronic Engineering and Electronic, Optical and Magnetic Materials, on topics such as Advanced Surface Polishing Techniques, Copper Interconnects and Reliability and Surface Roughness and Optical Measurements.
- World rank
- #7,178,108 of 7,710,434 ranked researchers
- Rank in Japan
- #323,894 of 383,136
- Works
- 22
- Citations
- 56
- Citations per work
- 2.5
What does Katsuhiko Tokushige research?
Katsuhiko Tokushige's work is mostly in Engineering (70%), Materials Science (10%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences1879.7%
- Engineering1569.5%
- Materials Science210.2%
- Everything else420.3%
- 1Biomedical Engineering22% of their works
- 2Electrical and Electronic Engineering22% of their works
- 3Electronic, Optical and Magnetic Materials10% of their works
- 4Computational Mechanics8% of their works
- 5Mechanical Engineering8% of their works
- 6Mechanics of Materials8% of their works
Research topics
Which keywords describe Katsuhiko Tokushige's research?
The keywords of their largest research topics: Tool Wear, Chemical Mechanical Planarization, Material Removal Mechanism, Low-k Dielectrics, Microelectronics, Interconnect, Roughness Measurement and Surface Characterization.
- Machining
- High-k Dielectrics
- Dynamic Recrystallization
- Atomic Layer Deposition
- Surface Characterization
- Interconnect
- Low-k Dielectrics
- Chemical Mechanical Planarization
- Tool Wear
- Material Removal Mechanism
- Microelectronics
- Roughness Measurement
- Through-Silicon Via
- Composite Coatings
- Electrodeposition
- Hot Deformation
- Surface Integrity
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.
All 17 words, with their numbers
- Tool Wear152 topics
- Chemical Mechanical Planarization131 topic
- Material Removal Mechanism131 topic
- Low-k Dielectrics61 topic
- Microelectronics61 topic
- Interconnect31 topic
- Roughness Measurement31 topic
- Surface Characterization31 topic
- Through-Silicon Via31 topic
- Atomic Layer Deposition21 topic
- Composite Coatings21 topic
- Dynamic Recrystallization21 topic
- Electrodeposition21 topic
- High-k Dielectrics21 topic
- Hot Deformation21 topic
- Machining21 topic
- Surface Integrity21 topic
Where does Katsuhiko Tokushige work?
Katsuhiko Tokushige's main affiliation in the publication record is Ebara (Japan), Japan.
How many publications and citations does Katsuhiko Tokushige have?
OpenAlex counts 22 works and 56 citations for Katsuhiko Tokushige, an h-index of 5, ranking #7,178,108 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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