Most cited papers in Advanced MEMS and NEMS Technologies
What are the most cited papers in Advanced MEMS and NEMS Technologies?
The most cited paper in Advanced MEMS and NEMS Technologies is "Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung" (G. Sauerbrey, 1959), with 9,643 citations. Next come "Cavity optomechanics" (5,796) and "Electromechanical Resonators from Graphene Sheets" (2,898).
Showing 50 of 100 papers. Every paper with more than 587 citations is listed.
| # | Paper | ||
|---|---|---|---|
| 1 | Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung G. Sauerbrey · The European Physical Journal A | Apr 1959 | 9,643 |
| 2 | Cavity optomechanics Markus Aspelmeyer, Tobias J. Kippenberg, Florian Marquardt · Reviews of Modern Physics | 30 Dec 2014 | 5,796 |
| 3 | Electromechanical Resonators from Graphene Sheets J. Scott Bunch, Arend M. van der Zande, Scott S. Verbridge et al. · Science | 25 Jan 2007 | 2,898 |
| 4 | Silicon as a mechanical material K. Petersen · Proceedings of the IEEE | May 1982 | 2,889 |
| 5 | Review of Multibody Charm Analyses David M. Asner, J. H. Rademacker · Explore Bristol Research | 4 Oct 2016 | 2,548 |
| 6 | Laser cooling of a nanomechanical oscillator into its quantum ground state Jasper Fuk‐Woo Chan, Thiago P. Mayer Alegre, Amir H. Safavi‐Naeini et al. · Nature | Oct 2011 | 2,329 |
| 7 | What is the Young's Modulus of Silicon? Matthew A. Hopcroft, William D. Nix, Thomas William Kenny · Journal of Microelectromechanical Systems | 16 Mar 2010 | 2,114 |
| 8 | Sideband cooling of micromechanical motion to the quantum ground state John D. Teufel, Tobias Donner, Dale Li et al. · Nature | Jul 2011 | 2,114 |
| 9 | Cavity Optomechanics: Back-Action at the Mesoscale Tobias J. Kippenberg, Kerry J. Vahala · Science | 29 Aug 2008 | 1,914 |
| 10 | Micromachined inertial sensors Navid Yazdi, Farrokh Ayazi, K. Najafi · Proceedings of the IEEE | 1998 | 1,821 |
| 11 | Optomechanically Induced Transparency Stefan Weis, R. Rivière, S. Deléglise et al. · Science | 11 Nov 2010 | 1,671 |
| 12 | A physiologically based criterion of muscle force prediction in locomotion Roy D. Crowninshield, Richard A. Brand · Journal of Biomechanics | 1981 | 1,446 |
| 13 | A gas chromatographic air analyzer fabricated on a silicon wafer Stephen C. Terry, John H. Jerman, James B. Angell · IEEE Transactions on Electron Devices | Dec 1979 | 1,425 |
| 14 | Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane Jeff D. Thompson, Benjamin M. Zwickl, Andrew M. Jayich et al. · Nature | 5 Mar 2008 | 1,410 |
| 15 | Analysis of a micro-electric generator for microsystems C.B. Williams, R.B. Yates · Sensors and Actuators A Physical | Mar 1996 | 1,406 |
| 16 | Nanoelectromechanical systems K. L. Ekinci, Michael Lee Roukes · Review of Scientific Instruments | 25 May 2005 | 1,368 |
| 17 | Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation Ronald E. Pelrine, Roy D. Kornbluh, Jose P. Joseph · Sensors and Actuators A Physical | 1998 | 1,367 |
| 18 | Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium J. J. Wortman, Russell Evans · Journal of Applied Physics | 1965 | 1,323 |
| 19 | The fast Fourier transform Charles M. Rader · IEEE Transactions on Acoustics Speech and Signal Processing | Apr 1975 | 1,166 |
| 20 | Quantum Theory of Cavity-Assisted Sideband Cooling of Mechanical Motion Florian Marquardt, Joe P. Chen, Aashish A. Clerk et al. · Physical Review Letters | 28 Aug 2007 | 1,158 |
| 21 | Cantilever transducers as a platform for chemical and biological sensors Nickolay V. Lavrik, Michael J. Sepaniak, Panos G. Datskos · Review of Scientific Instruments | 18 Jun 2004 | 1,114 |
| 22 | Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer Byung-Ho Jo, L.M. Van Lerberghe, Kathleen M. Motsegood et al. · Journal of Microelectromechanical Systems | Mar 2000 | 1,097 |
| 23 | Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications Mo Li, Hong X. Tang, Michael Lee Roukes · Nature Nanotechnology | 28 Jan 2007 | 1,054 |
| 24 | Anharmonic Decay of Optical Phonons P. G. Klemens · Physical Review | 12 Aug 1966 | 1,044 |
| 25 | Microfluidics-a review Peter Gravesen, J. Branebjerg, O S Jensen · Journal of Micromechanics and Microengineering | Dec 1993 | 1,041 |
| 26 | Zeptogram-Scale Nanomechanical Mass Sensing Ya‐Tang Yang, Carlo Callegari, Philip X.‐L. Feng et al. · Nano Letters | 15 Mar 2006 | 1,040 |
| 27 | Planar chips technology for miniaturization and integration of separation techniques into monitoring systems A. Manz, David J. Harrison, Elisabeth M. J. Verpoorte et al. · Journal of Chromatography A | Feb 1992 | 1,038 |
| 28 | DIRECT PIEZOELECTRIC COUPLING TO SURFACE ELASTIC WAVES Richard M. White, Fred W. Voltmer · Applied Physics Letters | 15 Dec 1965 | 1,036 |
| 29 | A nanomechanical mass sensor with yoctogram resolution Julien Chaste, Alexander Eichler, Joel Moser et al. · Nature Nanotechnology | Apr 2012 | 1,035 |
| 30 | Etch rates for micromachining processing-part II K.R. Williams, Kapil Gupta, Matthew Wasilik · Journal of Microelectromechanical Systems | Dec 2003 | 1,030 |
| 31 | Thin Film Piezoelectrics for MEMS Susan E. Trolier-McKinstry, Paul Muralt · Journal of Electroceramics | 2004 | 1,025 |
| 32 | SU-8: a low-cost negative resist for MEMS H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering | Sep 1997 | 982 |
| 33 | Theory of ferroelectrics A. F. Devonshire · Advances In Physics | Apr 1954 | 972 |
| 34 | RF MEMS switches and switch circuits Gabriel M. Rebeiz, Jeremy Muldavin · IEEE Microwave Magazine | 2001 | 970 |
| 35 | Comparative advantages of mechanical biosensors Jessica Arlett, E. B. Myers, Michael Lee Roukes · Nature Nanotechnology | 27 Mar 2011 | 962 |
| 36 | Review: Semiconductor Piezoresistance for Microsystems A.A. Barlian, Woo‐Tae Park, Joseph R. Mallon et al. · Proceedings of the IEEE | Mar 2009 | 957 |
| 37 | Radiation-pressure cooling and optomechanical instability of a micromirror O. Arcizet, P.-F. Cohadon, T. Briant et al. · Nature | Nov 2006 | 939 |
| 38 | Ferroelectric thin films for micro-sensors and actuators: a review Paul Muralt · Journal of Micromechanics and Microengineering | 23 May 2000 | 937 |
| 39 | A graphical representation of the piezoresistance coefficients in silicon Yozo Kanda · IEEE Transactions on Electron Devices | 1982 | 911 |
| 40 | A CMOS bandgap reference circuit with sub-1-V operation Hironori Banba, Hidehiro Shiga, Akira Umezawa et al. · IEEE Journal of Solid-State Circuits | May 1999 | 896 |
| 41 | Projection micro-stereolithography using digital micro-mirror dynamic mask Cheng Sun, Nicholas X. Fang, Dong Wu et al. · Sensors and Actuators A Physical | 17 Mar 2005 | 882 |
| 42 | A Curved-Beam Bistable Mechanism J. Qiu, J.H. Lang, Alex Slocum · Journal of Microelectromechanical Systems | Apr 2004 | 864 |
| 43 | Circuit cavity electromechanics in the strong-coupling regime John D. Teufel, Dale Li, Michael S. Allman et al. · Nature | Mar 2011 | 848 |
| 44 | Silicon-on-Insulator microring resonator for sensitive and label-free biosensing Katrien De Vos, Irene Bartolozzi, Etienne H. Schacht et al. · Optics Express | 2007 | 844 |
| 45 | MEMS technology for timing and frequency control Clark T.‐C. Nguyen · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control | 2007 | 839 |
| 46 | Critical Review: Adhesion in surface micromechanical structures Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | 1997 | 838 |
| 47 | Role of material microstructure in plate stiffness with relevance to microcantilever sensors Andrew W. McFarland, Jonathan S. Colton · Journal of Micromechanics and Microengineering | 8 Apr 2005 | 830 |
| 48 | Microelectromechanical systems (MEMS): fabrication, design and applications Jack William Judy · Smart Materials and Structures | 28 Nov 2001 | 827 |
| 49 | Cavity Opto-Mechanics Tobias J. Kippenberg, Kerry J. Vahala · Optics Express | 2007 | 811 |
| 50 | New equivalent circuits for elementary piezoelectric transducers R.S. Krimholtz, D.A. Leedom, George L. Matthaei · Electronics Letters | 25 Jun 1970 | 810 |
Citations are OpenAlex's own counts, from its 2026-09-23 snapshot, so the ranking can differ from Google Scholar or Web of Science. A paper is listed for a field when OpenAlex files it under one of the field's topics; retracted papers and papers whose citation count cannot be traced to citing works are left out, and a preprint and the article it became are shown once. Release dates are OpenAlex's: where a source gave only a month or a year, that is what is shown. How the lists are chosen.