Advanced MEMS and NEMS Technologies
Advanced MEMS and NEMS Technologies is a research topic within Electrical and Electronic Engineering. Science Explorer counts 38k research works in it since 1950. 9.9% of them reached the world's top 10% most cited for their field and year.
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
- Silicon
- MEMS
- Microfabrication
- Resonators
- Actuators
- Sensors
- Reliability
- RF switches
- Nanomechanical testing
- Thermal behavior
- Research works
- 38k fractional, since 1950
- In the world top 10%
- 3.7k per year above
- Top-10% rate
- 9.9% share of its works in the world top 10%
- Growth, 2018-21 → 2022-25
- +3% the tick is no change
- Largest producer
China
50% of the 10 largest, 2022-now
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