Science Explorer Back to mapMap
Discussion
Topic · Electrical and Electronic Engineering

Advanced MEMS and NEMS Technologies

Advanced MEMS and NEMS Technologies is a research topic within Electrical and Electronic Engineering. Science Explorer counts 38k research works in it since 1950. 9.9% of them reached the world's top 10% most cited for their field and year.

This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.

  • Silicon
  • MEMS
  • Microfabrication
  • Resonators
  • Actuators
  • Sensors
  • Reliability
  • RF switches
  • Nanomechanical testing
  • Thermal behavior
Research works
38k
fractional, since 1950
In the world top 10%
3.7k
per year above
Top-10% rate
9.9%
share of its works in the world top 10%
Growth, 2018-21 → 2022-25
+3%
the tick is no change
Largest producer
China
50% of the 10 largest, 2022-now
Advanced MEMS and NEMS Technologies

Which countries lead Advanced MEMS and NEMS Technologies research?

By volume, China and the United States publish the most (1.8k and 478 works in 2022-now).

By volume, 2022-now

  1. 1 China 1.8k works
  2. 2 United States 478 works
  3. 3 India 309 works
  4. 4 Japan 193 works
  5. 5 Germany 189 works
  6. 6 Italy 151 works
  7. 7 Russia 122 works
  8. 8 France 120 works
  9. 9 South Korea 91 works
  10. 10 United Kingdom 91 works

How concentrated that is

The same countries as shares of everything the list above accounts for. A node where two countries do two thirds of the work and one spread evenly across twelve read alike as a ranking and not at all alike here.

China: 50.2%United States: 13.6%India: 8.8%Japan: 5.5%6 others listed: 21.8%50%largest
China1,761 · 50.2%United States478 · 13.6%India309 · 8.8%Japan193 · 5.5%6 others listed765 · 21.8%

Shares of the rows listed above, not of the whole node.

Which institutions lead Advanced MEMS and NEMS Technologies research?

By volume in 2022-now, Chinese Academy of Sciences publishes the most Advanced MEMS and NEMS Technologies research, followed by Centre National de la Recherche Scientifique and Harbin Institute of Technology.

By volume, 2022-now

  1. 1 Chinese Academy of SciencesChina 141 works
  2. 2 Centre National de la Recherche ScientifiqueFrance 51 works
  3. 3 Harbin Institute of TechnologyChina 48 works
  4. 4 Nanjing University of Science and TechnologyChina 43 works
  5. 5 Southeast UniversityChina 42 works
  6. 6 National University of Defense TechnologyChina 41 works
  7. 7 Xi'an Jiaotong UniversityChina 40 works
  8. 8 University of Electronic Science and Technology of ChinaChina 38 works
  9. 9 North University of ChinaChina 38 works
  10. 10 Zhejiang UniversityChina 37 works

Who are the leading researchers in Advanced MEMS and NEMS Technologies?

The most-cited researchers publishing on Advanced MEMS and NEMS Technologies include Zhong Lin Wang, George M. Whitesides and Wei Huang.

  1. 1 Zhong Lin Wang United States 491k citations
  2. 2 George M. Whitesides United States 267k citations
  3. 3 Wei Huang China 267k citations
  4. 4 Kenji Watanabe Japan 237k citations
  5. 5 Rodney S. Ruoff United States 231k citations
  6. 6 Takashi Taniguchi Japan 227k citations
  7. 7 Kai You Wang China 224k citations
  8. 8 G. Mitselmakher France 223k citations
  9. 9 Lei Jiang China 214k citations
  10. 10 Younan Xia United States 207k citations

Ranked by citations received across their whole record, among researchers with at least three works on this topic.

What are the most cited papers in Advanced MEMS and NEMS Technologies?

The most cited paper in Advanced MEMS and NEMS Technologies is "Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung" (G. Sauerbrey, 1959), with 9,643 citations. Next come "Cavity optomechanics" (5,796) and "Electromechanical Resonators from Graphene Sheets" (2,898).

Most cited papers
#PaperReleasedCitations
1 Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung G. Sauerbrey · The European Physical Journal A Apr 1959 9,643
2 Cavity optomechanics Markus Aspelmeyer, Tobias J. Kippenberg, Florian Marquardt · Reviews of Modern Physics Open access 30 Dec 2014 5,796
3 Electromechanical Resonators from Graphene Sheets J. Scott Bunch, Arend M. van der Zande, Scott S. Verbridge et al. · Science 25 Jan 2007 2,898
4 Silicon as a mechanical material K. Petersen · Proceedings of the IEEE May 1982 2,889
5 Review of Multibody Charm Analyses David M. Asner, J. H. Rademacker · Explore Bristol Research Open access 4 Oct 2016 2,548
All 100 most cited papers, with filters and sorting

Where is Advanced MEMS and NEMS Technologies research done?

The largest centres of Advanced MEMS and NEMS Technologies research in 2022-now are Beijing (China), Shanghai (China), Nanjing (China) and Xi'an (China). Among places with at least 20 works in it, it is an unusually large share of all research in Hsinchu.

Largest cities, 2022-now

  1. 1 BeijingChina 341 works
  2. 2 ShanghaiChina 142 works
  3. 3 NanjingChina 135 works
  4. 4 Xi'anChina 125 works
  5. 5 WuhanChina 81 works
  6. 6 HangzhouChina 75 works
  7. 7 HarbinChina 71 works
  8. 8 TokyoJapan 68 works
  9. 9 ChengduChina 64 works
  10. 10 ChangshaChina 57 works

Where it is the local speciality

  1. HsinchuTW · 45.5 works12×
← less than its size predicts1×more →

Location quotient: how much more of its research is in Advanced MEMS and NEMS Technologies than the world average.

See Advanced MEMS and NEMS Technologies on the map

Where is the best place to study Advanced MEMS and NEMS Technologies?

Among universities, judged by research, Harbin Institute of Technology, National University of Defense Technology and University of Macau score highest, combining excellence, specialisation, size, growth and international reach. Research strength is one signal when choosing where to study; it does not measure teaching.

0%20%40%mean 19.2%fractional works in this field (log) →share of work in the world top 10% →Harbin Institute of …National University …University of MacauXi'an Jiaotong Unive…
above the meannear itbelow it

One dot per university in the first ten of the table below, at the default weights. The upper left is the interesting corner: small places doing unusually strong work.

Excellenceshare of its work in the world top 10%, 2022-now and all time averaged
40%
Specialisationhow much of its work is in this field, counted up to 10× the world share
10%
Sizeits output in this field, on a log scale
30%
Growthoutput growth, counted from -20% to +20%
10%
Internationalshare of its work with a co-author abroad
10%
Each slider sets a weight; the share it gets of the score is beside it.
#UniversityScoreTop 10%SpecialisationWorksGrowth
1Harbin Institute of TechnologyChina 83.531.0%7.6×48 +2.8%
2National University of Defense TechnologyChina 74.923.4%13.9×41 +14.2%
3University of MacauChina 74.718.4%12.3×15 +51.8%
4Xi'an Jiaotong UniversityChina 69.617.7%6.0×40 +12.7%
5Wuhan University of TechnologyChina 68.028.3%4.9×15 +64.8%
6Northwestern Polytechnical UniversityChina 66.123.2%6.1×27 +12.0%
7Zhejiang UniversityChina 65.317.7%3.6×37 +45.1%
8North University of ChinaChina 65.013.3%40.0×38 +55.8%
9Nanjing University of Science and TechnologyChina 61.88.9%13.8×43 +100.9%
10University of Electronic Science and Technology of ChinaChina 61.010.1%8.9×38 +81.7%

Universities only. The score blends excellence (40%), size (30%), specialisation (10%), growth (10%), international reach (10%), 2022-now; growth compares 2018-21 with 2022-25 and counts up to +20%, since a jump from a small base is mostly noise.

Every institution in Advanced MEMS and NEMS Technologies, country by country

Is Advanced MEMS and NEMS Technologies research growing?

Output in 2022-2025 was 3% higher than in 2018-2021, peaking in 2002. The fastest-growing topics are Advanced MEMS and NEMS Technologies.

still counting19801990200020102020
grewheldshrank

The same series as a ribbon: one cell per year, darker for more. The line above answers how much; this answers when.

Its share of all research

Growing output can still be a shrinking share: all of science grows. This is Advanced MEMS and NEMS Technologies as a percentage of every work published that year, 0.022% in 2024.

still counting0.050%0.10%Advanced MEMS and NEMS Technologies0.020% in 202519801990200020102020

Fractional works of Advanced MEMS and NEMS Technologies over all fractional works that year. How the balance of science has shifted.

How much of it reaches the world top 10%

Year by year.

still counting5%10%15%Advanced MEMS and NEMS Technologies9.9% in 2025200020102020

Of each year's works in it, the share that reached the world's 10% most cited for their field and year. A field is the world for its own topics, so there is no other line to hold it against.

Which topics inside it are moving

Growth and decline on one axis around a shared zero. Two lists side by side hide the thing that matters: whether the growth dwarfs the decline, or the other way round.

Discussion

Ask a question or share a note about Advanced MEMS and NEMS Technologies. Posts are plain text and can be reported.