Advanced MEMS and NEMS Technologies
Advanced MEMS and NEMS Technologies is a research topic within Electrical and Electronic Engineering. Science Explorer counts 38k research works in it since 1950. 11.2% of them reached the world's top 10% most cited for their field and year.
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
- Silicon
- MEMS
- Microfabrication
- Resonators
- Actuators
- Sensors
- Reliability
- RF switches
- Nanomechanical testing
- Thermal behavior
- Research works
- 38k fractional, since 1950
- In the world top 10%
- 4.2k per year above
- Top-10% rate
- 11.2% share of its works in the world top 10%
- Growth, 2013–17 → 2018–22
- -20% the tick is no change
Which countries lead Advanced MEMS and NEMS Technologies research?
By volume, China and the United States publish the most (1.6k and 448 works in 2022–2025).
By volume, 2022–2025
- 1 China 1.6k works
- 2 United States 448 works
- 3 India 292 works
- 4 Japan 179 works
- 5 Germany 173 works
- 6 Italy 141 works
- 7 Russia 116 works
- 8 France 114 works
- 9 United Kingdom 86 works
- 10 South Korea 84 works
How concentrated that is
The same countries as shares of everything the list above accounts for. A node where two countries do two thirds of the work and one spread evenly across twelve read alike as a ranking and not at all alike here.
Shares of the rows listed above, not of the whole node.
Which institutions lead Advanced MEMS and NEMS Technologies research?
By volume in 2022–2025, Harbin Institute of Technology publishes the most Advanced MEMS and NEMS Technologies research, followed by Nanjing University of Science and Technology and Southeast University.
By volume, 2022–2025
- 1 Harbin Institute of TechnologyChina 43 works
- 2 Nanjing University of Science and TechnologyChina 39 works
- 3 Southeast UniversityChina 38 works
- 4 Xi'an Jiaotong UniversityChina 36 works
- 5 Chinese Academy of SciencesChina 36 works
- 6 National University of Defense TechnologyChina 36 works
- 7 University of Electronic Science and Technology of ChinaChina 35 works
- 8 North University of ChinaChina 33 works
- 9 Zhejiang UniversityChina 32 works
- 10 National Tsing Hua UniversityTaiwan 30 works
Who are the leading researchers in Advanced MEMS and NEMS Technologies?
The most-cited researchers publishing on Advanced MEMS and NEMS Technologies include Zhong Lin Wang, Kenji Watanabe and George M. Whitesides.
- 1 Zhong Lin Wang United States 11k citations
- 2 Kenji Watanabe Japan 6.4k citations
- 3 George M. Whitesides United States 4.8k citations
- 4 Luca Benini Italy 4.6k citations
Ranked by citations received across their whole record, among researchers with at least three works on this topic.
Where is Advanced MEMS and NEMS Technologies research done?
The largest centres of Advanced MEMS and NEMS Technologies research in 2022–2025 are Beijing (China), Shanghai (China), Nanjing (China) and Xi'an (China). Among places with at least 20 works in it, it is an unusually large share of all research in Hsinchu and Albuquerque.
Largest cities, 2022–2025
Where it is the local speciality
- HsinchuTW · 41.0 works12×
- AlbuquerqueUS · 24.0 works8.5×
Location quotient: how much more of its research is in Advanced MEMS and NEMS Technologies than the world average.
Where is the best place to study Advanced MEMS and NEMS Technologies?
Among universities, judged by research, Harbin Institute of Technology, National University of Defense Technology and Indian Institute of Technology Hyderabad score highest, combining excellence, specialisation, size, growth and international reach. Research strength is one signal when choosing where to study; it does not measure teaching.
One dot per university in the table below. The upper left is the interesting corner: small places doing unusually strong work.
| # | University | Score | Top 10% | Specialisation | Works | Growth |
|---|---|---|---|---|---|---|
| 1 | Harbin Institute of TechnologyChina | 66.1 | 26.8% | 6.5× | 43 | +23.0% |
| 2 | National University of Defense TechnologyChina | 63.6 | 16.0% | 11.5× | 36 | +34.1% |
| 3 | Indian Institute of Technology HyderabadIndia | 55.2 | 11.1% | 10.5× | 10 | +352.6% |
| 4 | Nanjing University of Science and TechnologyChina | 54.4 | 3.9% | 11.8× | 39 | +39.0% |
| 5 | National Tsing Hua UniversityTaiwan | 51.8 | 6.2% | 30.9× | 30 | -20.6% |
| 6 | University of MacauMacau | 51.8 | 15.4% | 8.1× | 10 | +36.9% |
| 7 | École Polytechnique Fédérale de LausanneSwitzerland | 51.5 | 31.5% | 5.8× | 10 | -38.8% |
| 8 | Northwestern Polytechnical UniversityChina | 51.4 | 25.0% | 5.1× | 23 | +4.8% |
| 9 | Delft University of TechnologyNetherlands | 50.3 | 20.1% | 6.7× | 18 | -32.8% |
| 10 | North University of ChinaChina | 49.4 | 5.9% | 33.5× | 33 | -31.0% |
Universities only. Score blends excellence (30%), specialisation (25%), size (20%), growth (15%) and international reach (10%), 2015–2022; growth compares 2010–14 with 2015–19.
Is Advanced MEMS and NEMS Technologies research growing?
Output in 2018–2022 was 20% lower than in 2013–2017, peaking in 2002.
The same series as a ribbon — one cell per year, darker for more. The line above answers how much; this answers when.
Which topics inside it are moving
Growth and decline on one axis around a shared zero. Two lists side by side hide the thing that matters: whether the growth dwarfs the decline, or the other way round.