Lokesh Subramany
Lokesh Subramany publishes mostly in Electrical and Electronic Engineering, Industrial and Manufacturing Engineering and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Industrial Vision Systems and Defect Detection and Advanced Surface Polishing Techniques.
- World rank
- #7,206,174 of 7,710,434 ranked researchers
- Rank in United States
- #1,591,896 of 1,627,098
- Works
- 24
- Citations
- 96
- Citations per work
- 4.0
What does Lokesh Subramany research?
Lokesh Subramany's work is mostly in Engineering (84%), Computer Science (4%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences2188.7%
- Engineering2084.5%
- Computer Science14.2%
- Everything else311.3%
- 1Electrical and Electronic Engineering48% of their works
- 2Industrial and Manufacturing Engineering20% of their works
- 3Biomedical Engineering8% of their works
- 4Computer Vision and Pattern Recognition4% of their works
- 5Computational Mechanics4% of their works
- 6Mechanical Engineering4% of their works
Research topics
- Advancements in Photolithography Techniques
- Industrial Vision Systems and Defect Detection
- Advanced Surface Polishing Techniques
- 3D IC and TSV technologies
- Integrated Circuits and Semiconductor Failure Analysis
- Manufacturing Process and Optimization
- Advanced Measurement and Metrology Techniques
- Optical Coatings and Gratings
Which keywords describe Lokesh Subramany's research?
The keywords of their largest research topics: Nanofabrication, Electron Beam Lithography, Resolution Limits, Fabric Defect Detection, Machine Vision, Chemical Mechanical Planarization, Material Removal Mechanism and Interconnect.
- Error Compensation
- Design for Manufacture
- Antireflective Coatings
- Failure Analysis
- Interconnect
- Chemical Mechanical Planarization
- Fabric Defect Detection
- Electron Beam Lithography
- Nanofabrication
- Resolution Limits
- Machine Vision
- Material Removal Mechanism
- Through-Silicon Via
- Integrated Circuits
- Assembly Planning
- Dimensional Metrology
- Nanostructures
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- Nanofabrication232 topics
- Electron Beam Lithography201 topic
- Resolution Limits201 topic
- Fabric Defect Detection111 topic
- Machine Vision111 topic
- Chemical Mechanical Planarization61 topic
- Material Removal Mechanism61 topic
- Interconnect51 topic
- Through-Silicon Via51 topic
- Failure Analysis41 topic
- Integrated Circuits41 topic
- Antireflective Coatings31 topic
- Assembly Planning31 topic
- Design for Manufacture31 topic
- Dimensional Metrology31 topic
- Error Compensation31 topic
- Nanostructures31 topic
Where does Lokesh Subramany work?
Lokesh Subramany's main affiliation in the publication record is GlobalFoundries (United States), United States.
How many publications and citations does Lokesh Subramany have?
OpenAlex counts 24 works and 96 citations for Lokesh Subramany, an h-index of 5, ranking #7,206,174 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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