Maurits van der Schaar
Maurits van der Schaar publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Mechanical Engineering, on topics such as Advancements in Photolithography Techniques, Optical Coatings and Gratings and Advanced Surface Polishing Techniques.
- World rank
- #5,710,360 of 7,710,434 ranked researchers
- Rank in Netherlands
- #96,063 of 107,149
- Works
- 18
- Citations
- 215
- Citations per work
- 11.9
What does Maurits van der Schaar research?
Maurits van der Schaar's work is mostly in Engineering (70%), Materials Science (26%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences1796.4%
- Engineering1370.4%
- Materials Science526.0%
- Everything else13.6%
- 1Electrical and Electronic Engineering41% of their works
- 2Surfaces, Coatings and Films20% of their works
- 3Mechanical Engineering13% of their works
- 4Biomedical Engineering11% of their works
- 5Electronic, Optical and Magnetic Materials6% of their works
- 6Computational Mechanics6% of their works
Research topics
- Advancements in Photolithography Techniques
- Optical Coatings and Gratings
- Advanced Surface Polishing Techniques
- Advanced Measurement and Metrology Techniques
- Surface Roughness and Optical Measurements
- Integrated Circuits and Semiconductor Failure Analysis
- Copper Interconnects and Reliability
- Optical measurement and interference techniques
Which keywords describe Maurits van der Schaar's research?
The keywords of their largest research topics: Nanofabrication, Electron Beam Lithography, Resolution Limits, Antireflective Coatings, Nanostructures, Chemical Mechanical Planarization, Material Removal Mechanism and Dimensional Metrology.
- Camera Calibration
- Roughness Measurement
- Low-k Dielectrics
- Failure Analysis
- Dimensional Metrology
- Chemical Mechanical Planarization
- Antireflective Coatings
- Electron Beam Lithography
- Nanofabrication
- Resolution Limits
- Nanostructures
- Material Removal Mechanism
- Error Compensation
- Integrated Circuits
- Microelectronics
- Surface Characterization
- Structured Light
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.
All 17 words, with their numbers
- Nanofabrication242 topics
- Electron Beam Lithography141 topic
- Resolution Limits141 topic
- Antireflective Coatings101 topic
- Nanostructures101 topic
- Chemical Mechanical Planarization61 topic
- Material Removal Mechanism61 topic
- Dimensional Metrology41 topic
- Error Compensation41 topic
- Failure Analysis31 topic
- Integrated Circuits31 topic
- Low-k Dielectrics31 topic
- Microelectronics31 topic
- Roughness Measurement31 topic
- Surface Characterization31 topic
- Camera Calibration21 topic
- Structured Light21 topic
Where does Maurits van der Schaar work?
Maurits van der Schaar's main affiliation in the publication record is ASML (Netherlands), Netherlands.
How many publications and citations does Maurits van der Schaar have?
OpenAlex counts 18 works and 215 citations for Maurits van der Schaar, an h-index of 7, ranking #5,710,360 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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