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Researcher · Entegris (United States) · United States

Tetsu Kohyama

Tetsu Kohyama publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Semiconductor materials and devices.

OpenAlex
World rank
#6,688,684
of 7,710,434 ranked researchers
Rank in United States
#1,545,855
of 1,627,098
Works
15
Citations
21
Citations per work
1.4
h-index
3
i10-index 0Top 97% in Electrical and Electronic Engineering
Tetsu Kohyama

What does Tetsu Kohyama research?

Tetsu Kohyama's work is mostly in Engineering (71%), Materials Science (9%), Chemistry (4%).

Physical Sciences: 13 works · 84.4% of their workEngineering: 11 works · 71.1% of their workElectrical and Electronic Engineering: 9 works · 60.0% of their workBiomedical Engineering: 1 works · 6.7% of their workControl and Systems Engineering: 0 works · 2.2% of their workMechanical Engineering: 0 works · 2.2% of their workMaterials Science: 1 works · 8.9% of their workSurfaces, Coatings and Films: 1 works · 8.9% of their workChemistry: 1 works · 4.4% of their workOrganic Chemistry: 1 works · 4.4% of their workEverything else: 2 works · 15.6% of their workTHEIR WORKTetsu Kohyama15works
Physical Sciences84%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering1171.1%
    2. Materials Science18.9%
    3. Chemistry14.4%
  2. Everything else215.6%
  1. 1Electrical and Electronic Engineering60% of their works
  2. 2Surfaces, Coatings and Films9% of their works
  3. 3Biomedical Engineering7% of their works
  4. 4Organic Chemistry4% of their works
  5. 5Control and Systems Engineering2% of their works
  6. 6Mechanical Engineering2% of their works

Research topics

Which keywords describe Tetsu Kohyama's research?

The keywords of their largest research topics: Electron Beam Lithography, Nanofabrication, Failure Analysis, Integrated Circuits, Atomic Layer Deposition, High-k Dielectrics, Scanning Electron Microscopy and Silicon.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 16 words, with their numbers
  1. Electron Beam Lithography131 topic
  2. Nanofabrication131 topic
  3. Failure Analysis61 topic
  4. Integrated Circuits61 topic
  5. Atomic Layer Deposition31 topic
  6. High-k Dielectrics31 topic
  7. Scanning Electron Microscopy31 topic
  8. Silicon31 topic
  9. Solar Cells31 topic
  10. X-ray Photoelectron Spectroscopy31 topic
  11. Chemical Mechanical Planarization21 topic
  12. Material Removal Mechanism21 topic
  13. Catalysis11 topic
  14. Molecular Machines11 topic
  15. Organic Synthesis11 topic
  16. Supramolecular Chemistry11 topic

Where does Tetsu Kohyama work?

Tetsu Kohyama's main affiliation in the publication record is Entegris (United States), United States.

How many publications and citations does Tetsu Kohyama have?

OpenAlex counts 15 works and 21 citations for Tetsu Kohyama, an h-index of 3, ranking #6,688,684 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

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