Mark D. Smith
Mark D. Smith publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques and Integrated Circuits and Semiconductor Failure Analysis.
- World rank
- #350,370 of 1,633,909 ranked researchers
- Rank in United States
- #127,683 of 358,040
- Works
- 31
- Citations
- 85
- Citations per work
- 2.7
What does Mark D. Smith research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering52% of their works
- 2Surfaces, Coatings and Films20% of their works
- 3Biomedical Engineering8% of their works
- 4Industrial and Manufacturing Engineering5% of their works
- 5Computational Mechanics5% of their works
- 6Mechanical Engineering2% of their works
Research topics
- Advancements in Photolithography Techniques
- Electron and X-Ray Spectroscopy Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Nanofabrication and Lithography Techniques
- 3D IC and TSV technologies
- Optical Coatings and Gratings
- Laser Material Processing Techniques
- Surface Roughness and Optical Measurements
Which keywords describe Mark D. Smith's research?
The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Failure Analysis and Integrated Circuits.
- Surface Characterization
- Micromachining
- Through-Silicon Via
- Interconnect
- Soft Lithography
- Integrated Circuits
- X-ray Photoelectron Spectroscopy
- Resolution Limits
- Nanofabrication
- High-Resolution Patterning
- Electron Beam Lithography
- Scanning Electron Microscopy
- Failure Analysis
- Nanolithography
- Antireflective Coatings
- Nanostructures
- Femtosecond Laser
- Roughness Measurement
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 18 words, with their numbers
- High-Resolution Patterning152 topics
- Nanofabrication142 topics
- Electron Beam Lithography121 topic
- Resolution Limits121 topic
- Scanning Electron Microscopy61 topic
- X-ray Photoelectron Spectroscopy61 topic
- Failure Analysis41 topic
- Integrated Circuits41 topic
- Nanolithography31 topic
- Soft Lithography31 topic
- Antireflective Coatings21 topic
- Interconnect21 topic
- Nanostructures21 topic
- Through-Silicon Via21 topic
- Femtosecond Laser11 topic
- Micromachining11 topic
- Roughness Measurement11 topic
- Surface Characterization11 topic
Where does Mark D. Smith work?
Mark D. Smith's main affiliation in the publication record is KLA (United States), United States.
How many publications and citations does Mark D. Smith have?
Science Explorer counts 31 works and 85 citations for Mark D. Smith, ranking #350,370 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Other researchers named Mark D. Smith
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