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Researcher · KLA (United States) · United States

Michael T. Reilly

Michael T. Reilly publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, 3D IC and TSV technologies and Nanofabrication and Lithography Techniques.

OpenAlex
World rank
#1,426,816
of 1,633,909 ranked researchers
Rank in United States
#329,408
of 358,040
Works
18
Citations
24
Citations per work
1.3

What does Michael T. Reilly research?

Electrical and Electronic Engineering: 53.1%Biomedical Engineering: 9.4%Surfaces, Coatings and Films: 9.4%Ocean Engineering: 6.3%other fields: 21.8%53%top field
Electrical and Electronic Engineering53.1%Biomedical Engineering9.4%Surfaces, Coatings and Films9.4%Ocean Engineering6.3%other fields21.8%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering53% of their works
  2. 2Biomedical Engineering9% of their works
  3. 3Surfaces, Coatings and Films9% of their works
  4. 4Ocean Engineering6% of their works
  5. 5Computational Mechanics6% of their works
  6. 6Fuel Technology3% of their works

Research topics

Which keywords describe Michael T. Reilly's research?

The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Interconnect, Through-Silicon Via, Antireflective Coatings and Failure Analysis.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 18 words, with their numbers
  1. High-Resolution Patterning102 topics
  2. Nanofabrication102 topics
  3. Electron Beam Lithography81 topic
  4. Resolution Limits81 topic
  5. Interconnect31 topic
  6. Through-Silicon Via31 topic
  7. Antireflective Coatings21 topic
  8. Failure Analysis21 topic
  9. Integrated Circuits21 topic
  10. Interfacial Reactions21 topic
  11. Lead-free Solders21 topic
  12. Nanolithography21 topic
  13. Nanostructures21 topic
  14. Soft Lithography21 topic
  15. Biomass11 topic
  16. Coal Industry11 topic
  17. Oxidative Desulphurisation11 topic
  18. Pyrolysis11 topic

Where does Michael T. Reilly work?

Michael T. Reilly's main affiliation in the publication record is KLA (United States), United States.

How many publications and citations does Michael T. Reilly have?

Science Explorer counts 18 works and 24 citations for Michael T. Reilly, ranking #1,426,816 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.