Osamu Suga
Osamu Suga publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Mechanical Engineering, on topics such as Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques and Integrated Circuits and Semiconductor Failure Analysis.
- World rank
- #1,230,154 of 1,633,909 ranked researchers
- Rank in Japan
- #76,643 of 114,622
- Works
- 21
- Citations
- 39
- Citations per work
- 1.9
What does Osamu Suga research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering60% of their works
- 2Surfaces, Coatings and Films26% of their works
- 3Mechanical Engineering7% of their works
- 4Biomedical Engineering5% of their works
- 5Industrial and Manufacturing Engineering2% of their works
Research topics
- Advancements in Photolithography Techniques
- Electron and X-Ray Spectroscopy Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Advanced Surface Polishing Techniques
- Nanofabrication and Lithography Techniques
- Silicon and Solar Cell Technologies
- 3D IC and TSV technologies
- Industrial Vision Systems and Defect Detection
Which keywords describe Osamu Suga's research?
The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Failure Analysis, Integrated Circuits and Chemical Mechanical Planarization.
- Solar Cells
- Silicon
- Material Removal Mechanism
- Interconnect
- Chemical Mechanical Planarization
- Failure Analysis
- Scanning Electron Microscopy
- Electron Beam Lithography
- High-Resolution Patterning
- Nanofabrication
- X-ray Photoelectron Spectroscopy
- Integrated Circuits
- Fabric Defect Detection
- Machine Vision
- Nanolithography
- Soft Lithography
- Through-Silicon Via
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- High-Resolution Patterning142 topics
- Electron Beam Lithography131 topic
- Nanofabrication131 topic
- Scanning Electron Microscopy111 topic
- X-ray Photoelectron Spectroscopy111 topic
- Failure Analysis101 topic
- Integrated Circuits101 topic
- Chemical Mechanical Planarization11 topic
- Fabric Defect Detection11 topic
- Interconnect11 topic
- Machine Vision11 topic
- Material Removal Mechanism11 topic
- Nanolithography11 topic
- Silicon11 topic
- Soft Lithography11 topic
- Solar Cells11 topic
- Through-Silicon Via11 topic
Where does Osamu Suga work?
Osamu Suga's main affiliation in the publication record is Hoya (Japan), Japan.
How many publications and citations does Osamu Suga have?
Science Explorer counts 21 works and 39 citations for Osamu Suga, ranking #1,230,154 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.