Satoru Shimura
Satoru Shimura publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques and Advanced Surface Polishing Techniques.
- World rank
- #1,567,884 of 1,633,909 ranked researchers
- Rank in Japan
- #108,781 of 114,622
- Works
- 20
- Citations
- 2
- Citations per work
- 0.1
What does Satoru Shimura research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering43% of their works
- 2Surfaces, Coatings and Films13% of their works
- 3Biomedical Engineering13% of their works
- 4Industrial and Manufacturing Engineering7% of their works
- 5Music3% of their works
- 6Mechanical Engineering3% of their works
Research topics
- Advancements in Photolithography Techniques
- Electron and X-Ray Spectroscopy Techniques
- Advanced Surface Polishing Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Semiconductor materials and devices
- Nanofabrication and Lithography Techniques
- Silicon and Solar Cell Technologies
- Manufacturing Process and Optimization
Which keywords describe Satoru Shimura's research?
The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Chemical Mechanical Planarization, Failure Analysis and Integrated Circuits.
- Soft Lithography
- Nanolithography
- Assembly Planning
- Atomic Layer Deposition
- Integrated Circuits
- Chemical Mechanical Planarization
- Scanning Electron Microscopy
- Electron Beam Lithography
- High-Resolution Patterning
- Nanofabrication
- X-ray Photoelectron Spectroscopy
- Failure Analysis
- Material Removal Mechanism
- High-k Dielectrics
- Design for Manufacture
- Silicon
- Solar Cells
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- High-Resolution Patterning82 topics
- Electron Beam Lithography71 topic
- Nanofabrication71 topic
- Scanning Electron Microscopy41 topic
- X-ray Photoelectron Spectroscopy41 topic
- Chemical Mechanical Planarization31 topic
- Failure Analysis31 topic
- Integrated Circuits31 topic
- Material Removal Mechanism31 topic
- Atomic Layer Deposition21 topic
- High-k Dielectrics21 topic
- Assembly Planning11 topic
- Design for Manufacture11 topic
- Nanolithography11 topic
- Silicon11 topic
- Soft Lithography11 topic
- Solar Cells11 topic
Where does Satoru Shimura work?
Satoru Shimura's main affiliation in the publication record is Tokyo Electron (Japan), Japan.
How many publications and citations does Satoru Shimura have?
Science Explorer counts 20 works and 2 citations for Satoru Shimura, ranking #1,567,884 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.