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Researcher · Canon (United States) · United States

Takeaki Ebihara

Takeaki Ebihara publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Nanofabrication and Lithography Techniques.

OpenAlex
World rank
#5,449,718
of 7,710,434 ranked researchers
Rank in United States
#1,377,771
of 1,627,098
Works
20
Citations
169
Citations per work
8.5
h-index
6
i10-index 5Top 82% in Electrical and Electronic Engineering
Takeaki Ebihara

What does Takeaki Ebihara research?

Takeaki Ebihara's work is mostly in Engineering (75%), Materials Science (16%).

Physical Sciences: 18 works · 91.2% of their workEngineering: 15 works · 75.4% of their workElectrical and Electronic Engineering: 10 works · 49.1% of their workBiomedical Engineering: 3 works · 14.0% of their workComputational Mechanics: 1 works · 7.0% of their workIndustrial and Manufacturing Engineering: 1 works · 3.5% of their workMechanical Engineering: 0 works · 1.8% of their workMaterials Science: 3 works · 15.8% of their workSurfaces, Coatings and Films: 3 works · 15.8% of their workEverything else: 2 works · 8.8% of their workTHEIR WORKTakeaki Ebihara20works
Physical Sciences91%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering1575.4%
    2. Materials Science315.8%
  2. Everything else28.8%
  1. 1Electrical and Electronic Engineering49% of their works
  2. 2Surfaces, Coatings and Films16% of their works
  3. 3Biomedical Engineering14% of their works
  4. 4Computational Mechanics7% of their works
  5. 5Industrial and Manufacturing Engineering4% of their works
  6. 6Mechanical Engineering2% of their works

Research topics

Which keywords describe Takeaki Ebihara's research?

The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Antireflective Coatings and Nanolithography.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 18 words, with their numbers
  1. High-Resolution Patterning192 topics
  2. Nanofabrication192 topics
  3. Electron Beam Lithography151 topic
  4. Resolution Limits151 topic
  5. Failure Analysis81 topic
  6. Integrated Circuits81 topic
  7. Antireflective Coatings41 topic
  8. Nanolithography41 topic
  9. Nanostructures41 topic
  10. Scanning Electron Microscopy41 topic
  11. Soft Lithography41 topic
  12. X-ray Photoelectron Spectroscopy41 topic
  13. Chemical Mechanical Planarization21 topic
  14. Fabric Defect Detection21 topic
  15. Machine Vision21 topic
  16. Material Removal Mechanism21 topic
  17. Turbulent Flows21 topic
  18. Vortex Dynamics21 topic

Where does Takeaki Ebihara work?

Takeaki Ebihara's main affiliation in the publication record is Canon (United States), United States.

How many publications and citations does Takeaki Ebihara have?

OpenAlex counts 20 works and 169 citations for Takeaki Ebihara, an h-index of 6, ranking #5,449,718 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

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