Tsutomu Shimokawa
Tsutomu Shimokawa publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Organic Chemistry, on topics such as Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques and 3D IC and TSV technologies.
- World rank
- #528,771 of 1,633,909 ranked researchers
- Rank in Japan
- #20,372 of 114,622
- Works
- 24
- Citations
- 69
- Citations per work
- 2.9
What does Tsutomu Shimokawa research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering46% of their works
- 2Biomedical Engineering24% of their works
- 3Organic Chemistry15% of their works
- 4Electronic, Optical and Magnetic Materials6% of their works
- 5Surfaces, Coatings and Films3% of their works
- 6Polymers and Plastics3% of their works
Research topics
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
- 3D IC and TSV technologies
- Photopolymerization techniques and applications
- Copper Interconnects and Reliability
- Radical Photochemical Reactions
- Free Radicals and Antioxidants
- Microwave-Assisted Synthesis and Applications
Which keywords describe Tsutomu Shimokawa's research?
The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Nanolithography, Soft Lithography, Interconnect, Through-Silicon Via and Low-k Dielectrics.
- Visible Light Photoredox Catalysis
- Nonthermal Effects
- Electrochemical Methods
- Polymerization
- Organic Synthesis
- Low-k Dielectrics
- Interconnect
- Nanolithography
- Electron Beam Lithography
- High-Resolution Patterning
- Nanofabrication
- Soft Lithography
- Through-Silicon Via
- Microelectronics
- Photoinitiation
- Antioxidant
- Microwave Chemistry
- Phenolic Compounds
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 18 words, with their numbers
- High-Resolution Patterning152 topics
- Electron Beam Lithography91 topic
- Nanofabrication91 topic
- Nanolithography61 topic
- Soft Lithography61 topic
- Interconnect41 topic
- Through-Silicon Via41 topic
- Low-k Dielectrics21 topic
- Microelectronics21 topic
- Organic Synthesis22 topics
- Photoinitiation21 topic
- Polymerization21 topic
- Antioxidant11 topic
- Electrochemical Methods11 topic
- Microwave Chemistry11 topic
- Nonthermal Effects11 topic
- Phenolic Compounds11 topic
- Visible Light Photoredox Catalysis11 topic
Where does Tsutomu Shimokawa work?
Tsutomu Shimokawa's main affiliation in the publication record is JSR (Japan), Japan.
How many publications and citations does Tsutomu Shimokawa have?
Science Explorer counts 24 works and 69 citations for Tsutomu Shimokawa, ranking #528,771 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.