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Researcher · ASML (Netherlands) · Netherlands

Vidya Vaenkatesan

Vidya Vaenkatesan publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Atomic and Molecular Physics, and Optics, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.

OpenAlex
World rank
#5,103,542
of 7,710,434 ranked researchers
Rank in Netherlands
#90,111
of 107,149
Works
19
Citations
230
Citations per work
12.1
h-index
7
i10-index 5Top 74% in Electrical and Electronic Engineering
Vidya Vaenkatesan

What does Vidya Vaenkatesan research?

Vidya Vaenkatesan's work is mostly in Engineering (69%), Materials Science (15%), Physics and Astronomy (6%).

Physical Sciences: 17 works · 89.0% of their workEngineering: 13 works · 68.6% of their workElectrical and Electronic Engineering: 10 works · 53.7% of their workMechanical Engineering: 1 works · 5.6% of their workMechanics of Materials: 1 works · 5.6% of their workBiomedical Engineering: 1 works · 3.7% of their workMaterials Science: 3 works · 14.8% of their workSurfaces, Coatings and Films: 3 works · 14.8% of their workPhysics and Astronomy: 1 works · 5.6% of their workAtomic and Molecular Physics, and Optics: 1 works · 5.6% of their workEverything else: 2 works · 11.0% of their workTHEIR WORKVidya Vaenkatesan19works
Physical Sciences89%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering1368.6%
    2. Materials Science314.8%
    3. Physics and Astronomy15.6%
  2. Everything else211.0%
  1. 1Electrical and Electronic Engineering54% of their works
  2. 2Surfaces, Coatings and Films15% of their works
  3. 3Atomic and Molecular Physics, and Optics6% of their works
  4. 4Mechanics of Materials6% of their works
  5. 5Mechanical Engineering6% of their works
  6. 6Biomedical Engineering4% of their works

Research topics

Which keywords describe Vidya Vaenkatesan's research?

The keywords of their largest research topics: Nanofabrication, High-Resolution Patterning, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.

All 19 words, with their numbers
  1. Nanofabrication162 topics
  2. High-Resolution Patterning152 topics
  3. Electron Beam Lithography141 topic
  4. Resolution Limits141 topic
  5. Failure Analysis111 topic
  6. Integrated Circuits111 topic
  7. Scanning Electron Microscopy61 topic
  8. X-ray Photoelectron Spectroscopy61 topic
  9. Biological Applications32 topics
  10. Antireflective Coatings21 topic
  11. Atomic Force Microscopy21 topic
  12. Eddy Current Testing21 topic
  13. Force Spectroscopy21 topic
  14. Nanostructures21 topic
  15. Non-Destructive Evaluation21 topic
  16. Chemical Mechanical Planarization11 topic
  17. Material Removal Mechanism11 topic
  18. Nanolithography11 topic
  19. Soft Lithography11 topic

Where does Vidya Vaenkatesan work?

Vidya Vaenkatesan's main affiliation in the publication record is ASML (Netherlands), Netherlands.

How many publications and citations does Vidya Vaenkatesan have?

OpenAlex counts 19 works and 230 citations for Vidya Vaenkatesan, an h-index of 7, ranking #5,103,542 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

Discussion

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