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Company · Kawasaki · Japan

ASM (Japan)

Research works
5
▲ 44% vs 2018-21
Citations
30
5.7 per fractional work
Top-10% rate
5.8%
all institutions 10.0%
Open access
41%
world 40%
International
43%
world 18%

Not ranked overall: ASM (Japan) is under the volume floor below which a citation excellence rate is noise. Not ranked is not the same as ranked last.

Which fields of science does ASM (Japan) work in?

In all years, 78% of research at ASM (Japan) is in Physical Sciences, 13% in Social Sciences. Its largest fields are Engineering (49%), Materials Science (22%), Social Sciences (13%). It does 1.4× the world's share of Physical Sciences.

Physical Sciences: 4 fractional works · 77.8% of its workEngineering: 3 fractional works · 49.2% of its workElectrical and Electronic Engineering: 2 fractional works · 35.7% of its workSafety, Risk, Reliability and Quality: 0 fractional works · 6.3% of its workBiomedical Engineering: 0 fractional works · 4.9% of its workMechanics of Materials: 0 fractional works · 2.1% of its workMaterials Science: 1 fractional works · 22.2% of its workElectronic, Optical and Magnetic Materials: 1 fractional works · 12.2% of its workMaterials Chemistry: 0 fractional works · 8.0% of its workSurfaces, Coatings and Films: 0 fractional works · 2.1% of its workEnvironmental Science: 0 fractional works · 6.3% of its workHealth, Toxicology and Mutagenesis: 0 fractional works · 3.2% of its workPollution: 0 fractional works · 3.2% of its workSocial Sciences: 1 fractional works · 12.7% of its workSocial Sciences: 1 fractional works · 12.7% of its workPolitical Science and International Relations: 0 fractional works · 6.3% of its workSociology and Political Science: 0 fractional works · 6.3% of its workSmaller subfields together: 0 fractional works · 0.2% of its workLife Sciences: 0 fractional works · 9.5% of its workAgricultural and Biological Sciences: 0 fractional works · 7.4% of its workPlant Science: 0 fractional works · 5.3% of its workFood Science: 0 fractional works · 2.1% of its workBiochemistry, Genetics and Molecular Biology: 0 fractional works · 2.1% of its workCell Biology: 0 fractional works · 2.1% of its workALL ITS WORKASM (Japan)5fractional works, all years
Life Sciences10%Physical Sciences78%Social Sciences13%

Each ring splits the one inside it: the four domains of science, their fields, their subfields. Size is fractional works in all years. Every slice is a page; the interactive view zooms down to single topics and colours each by how much more of it this institution does than the world.

Its 3 domains and 6 fields, with their numbers
    1. Engineering349.2%
    2. Materials Science122.2%
    3. Environmental Science06.3%
    1. Social Sciences112.7%
    1. Agricultural and Biological Sciences07.4%
    2. Biochemistry, Genetics and Molecular Biology02.1%
All of science, and how each field's share has moved since 1950: the Science domain explorer

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

What are the most cited papers from ASM (Japan)?

The most cited paper from ASM (Japan) is "EUV Lithography Technology for High-volume Production of Semiconductor Devices" (Junji Miyazaki, Anthony Yen, 2019), with 55 citations. Next come "Impacts of UV cure for reliable porous PECVD SiOC integration [IC interconnect applications]" (8) and "Selective Hemispherical Grained Polysilicon Transformation for 256 MB, 1 GB Dynamic Random Access Memory and Beyond" (5).

Most cited papers
#PaperReleasedCitations
1 EUV Lithography Technology for High-volume Production of Semiconductor Devices Junji Miyazaki, Anthony Yen · Journal of Photopolymer Science and Technology Open access 24 Jun 2019 55
2 Impacts of UV cure for reliable porous PECVD SiOC integration [IC interconnect applications] Katsumi Yoneda, Muneharu Kato, Susumu Kondo et al. Conference paper 30 Aug 2005 8
3 Selective Hemispherical Grained Polysilicon Transformation for 256 MB, 1 GB Dynamic Random Access Memory and Beyond Majid Mansoori, Aritra Banerjee, Akito Shimizu et al. · Journal of The Electrochemical Society Oct 1999 5
4 Bottom-ARC optimization methodology for 0.25-μm lithography and beyond Maaike Op de Beeck, Geert Vandenberghe, Patrick Jaenen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Conference paper 29 Jun 1998 3
5 Growing low-temperature, high-quality silicon-dioxide films by neutral-beam enhanced atomic-layer deposition Yi-Ho Chen, Susumu Toko, Daisuke Ohori et al. · Journal of Physics D Applied Physics 26 Sep 2019 2
All 9 most cited papers, with filters and sorting

Which research topics does ASM (Japan) publish most on?

By volume in 2022-now: Technology Assessment and Management, International Science and Diplomacy, Arctic and Russian Policy Studies and Copper Interconnects and Reliability.

  1. 1 Technology Assessment and Management Safety, Risk, Reliability and Quality 0 works
  2. 2 International Science and Diplomacy Political Science and International Relations 0 works
  3. 3 Arctic and Russian Policy Studies Sociology and Political Science 0 works
  4. 4 Copper Interconnects and Reliability Electronic, Optical and Magnetic Materials 0 works
  5. 5 Thallium and Germanium Studies Pollution 0 works
  6. 6 Chromium effects and bioremediation Health, Toxicology and Mutagenesis 0 works
  7. 7 Aluminum toxicity and tolerance in plants and animals Plant Science 0 works
  8. 8 Semiconductor materials and devices Electrical and Electronic Engineering 0 works
  9. 9 Metal and Thin Film Mechanics Mechanics of Materials 0 works
  10. 10 Advancements in Photolithography Techniques Electrical and Electronic Engineering 0 works

How open and international is its research?

Against the world's own shares: the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available41.2%not open58.8%

World: 40% of research is openly available.

with international co-authors43.0%domestic only57.0%

World: 18% is written across borders.

How has ASM (Japan)'s research output changed?

Output in 2022-2025 was 44% higher than in 2018-2021.

still counting200020052010201520202025
grewheldshrank

The same series as a ribbon: one cell per year, darker for more. The line above answers how much; this answers when.

Other research institutions in Kawasaki

All research institutions in Kawasaki

Research measures only: rankings here say nothing about teaching, admissions or student experience. Comparable institutions and collaboration partners have tabs of their own, above.

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