Bo H. Vanderberg
Bo H. Vanderberg publishes mostly in Electrical and Electronic Engineering, Mechanical Engineering and Atomic and Molecular Physics, and Optics, on topics such as Plasma Diagnostics and Applications, Semiconductor materials and devices and Electrostatic Discharge in Electronics.
- World rank
- #5,956,258 of 7,710,434 ranked researchers
- Rank in United States
- #1,455,665 of 1,627,098
- Works
- 16
- Citations
- 40
- Citations per work
- 2.5
What does Bo H. Vanderberg research?
Bo H. Vanderberg's work is mostly in Engineering (77%), Physics and Astronomy (9%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences1486.3%
- Engineering1277.2%
- Physics and Astronomy19.1%
- Everything else213.7%
- 1Electrical and Electronic Engineering55% of their works
- 2Mechanical Engineering9% of their works
- 3Atomic and Molecular Physics, and Optics9% of their works
- 4Mechanics of Materials7% of their works
- 5Control and Systems Engineering4% of their works
- 6Biomedical Engineering2% of their works
Research topics
- Plasma Diagnostics and Applications
- Semiconductor materials and devices
- Electrostatic Discharge in Electronics
- Integrated Circuits and Semiconductor Failure Analysis
- Metal and Thin Film Mechanics
- Gyrotron and Vacuum Electronics Research
- Pulsed Power Technology Applications
- Advancements in Photolithography Techniques
Which keywords describe Bo H. Vanderberg's research?
The keywords of their largest research topics: Atomic Layer Deposition, High-k Dielectrics, Plasma Etching, Semiconductor Industry, CMOS Technology, ESD Protection, Failure Analysis and High Power Terahertz Sources.
- Pulsed Power
- Electron Beam Lithography
- Vacuum Electronics
- Nanoindentation
- High Power Terahertz Sources
- ESD Protection
- Semiconductor Industry
- High-k Dielectrics
- Atomic Layer Deposition
- Plasma Etching
- CMOS Technology
- Failure Analysis
- Integrated Circuits
- Thin Films
- Electron Beam
- Nanofabrication
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.
All 16 words, with their numbers
- Atomic Layer Deposition51 topic
- High-k Dielectrics51 topic
- Plasma Etching51 topic
- Semiconductor Industry51 topic
- CMOS Technology41 topic
- ESD Protection41 topic
- Failure Analysis31 topic
- High Power Terahertz Sources31 topic
- Integrated Circuits31 topic
- Nanoindentation31 topic
- Thin Films31 topic
- Vacuum Electronics31 topic
- Electron Beam21 topic
- Electron Beam Lithography21 topic
- Nanofabrication21 topic
- Pulsed Power21 topic
Where does Bo H. Vanderberg work?
Bo H. Vanderberg's main affiliation in the publication record is Axcelis Technologies (United States), United States.
How many publications and citations does Bo H. Vanderberg have?
OpenAlex counts 16 works and 40 citations for Bo H. Vanderberg, an h-index of 5, ranking #5,956,258 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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