Science Explorer Back to mapMap
Discussion
Company · Beverly · United States

Axcelis Technologies (United States)

In research, Axcelis Technologies (United States) stands highest in Physical Sciences (#15,214 of 17,446 worldwide), Electrical and Electronic Engineering (#3,356 of 3,725 worldwide) and Engineering (#8,925 of 9,532 worldwide), over all time.

axcelis.comROR OpenAlex
World rank, all time
#32,599
of 34,923
Rank in United States
#6,840
of 7,310
Research works
246
▲ 23% vs 2018-21
Citations
1.5k
6.2 per fractional work
Top-10% rate
0.5%
all institutions 10.0%
vs its own fields
0.87×
1.00× is exactly expected
Open access
6%
world 40%
International
18%
world 18%
Axcelis Technologies (United States)

What is Axcelis Technologies (United States) known for in research?

The fields where it stands highest, over all time, ranked among every institution above the floor in each field.

FieldWorld rankWhere that sitsTop-10% rateWorks
Physical SciencesDomain #15,214 of 17,446 0.9%232
Electrical and Electronic EngineeringSubfield #3,356 of 3,725 0.8%149
EngineeringField #8,925 of 9,532 0.7%195

Each strip is that field's whole ranked pool, with the notch where Axcelis Technologies (United States) sits in it, in the colour of the band that rank falls in. The track under the rate is the rate itself: it carries no average mark, because the average differs by field (from about 6% in Dentistry to 21% in Economics).

Which fields of science does Axcelis Technologies (United States) work in?

In all years, 94% of research at Axcelis Technologies (United States) is in Physical Sciences, 3% in Health Sciences. Its largest fields are Engineering (79%), Materials Science (7%), Physics and Astronomy (6%). It does 2.3× the world's share of Physical Sciences.

Physical Sciences: 232 fractional works · 94.2% of its workEngineering: 195 fractional works · 79.1% of its workElectrical and Electronic Engineering: 149 fractional works · 60.5% of its workComputational Mechanics: 14 fractional works · 5.6% of its workBiomedical Engineering: 13 fractional works · 5.1% of its workMechanics of Materials: 10 fractional works · 4.2% of its workAerospace Engineering: 4 fractional works · 1.5% of its workMechanical Engineering: 3 fractional works · 1.2% of its workControl and Systems Engineering: 2 fractional works · 0.8% of its workMaterials Science: 18 fractional works · 7.3% of its workMaterials Chemistry: 9 fractional works · 3.7% of its workElectronic, Optical and Magnetic Materials: 5 fractional works · 1.9% of its workSurfaces, Coatings and Films: 3 fractional works · 1.2% of its workCeramics and Composites: 1 fractional works · 0.4% of its workSmaller subfields together: 0 fractional works · 0.2% of its workPhysics and Astronomy: 15 fractional works · 6.0% of its workAtomic and Molecular Physics, and Optics: 11 fractional works · 4.5% of its workRadiation: 2 fractional works · 0.8% of its workCondensed Matter Physics: 1 fractional works · 0.3% of its workNuclear and High Energy Physics: 1 fractional works · 0.2% of its workAstronomy and Astrophysics: 0 fractional works · 0.2% of its workComputer Science: 2 fractional works · 0.9% of its workComputer Networks and Communications: 1 fractional works · 0.4% of its workHardware and Architecture: 1 fractional works · 0.2% of its workHuman-Computer Interaction: 0 fractional works · 0.2% of its workChemistry: 1 fractional works · 0.3% of its workEnvironmental Science: 1 fractional works · 0.2% of its workEarth and Planetary Sciences: 0 fractional works · 0.2% of its workChemical Engineering: 0 fractional works · 0.2% of its workEnergy: 0 fractional works · 0.1% of its workHealth Sciences: 6 fractional works · 2.6% of its workMedicine: 6 fractional works · 2.3% of its workSurgery: 2 fractional works · 0.9% of its workRadiology, Nuclear Medicine and Imaging: 2 fractional works · 0.7% of its workPulmonary and Respiratory Medicine: 1 fractional works · 0.2% of its workSmaller subfields together: 1 fractional works · 0.5% of its workDentistry: 1 fractional works · 0.3% of its workOral Surgery: 1 fractional works · 0.3% of its workSocial Sciences: 4 fractional works · 1.7% of its workArts and Humanities: 1 fractional works · 0.5% of its workHistory and Philosophy of Science: 0 fractional works · 0.2% of its workLanguage and Linguistics: 0 fractional works · 0.2% of its workSmaller subfields together: 0 fractional works · 0.1% of its workSocial Sciences: 1 fractional works · 0.5% of its workAnthropology: 0 fractional works · 0.2% of its workSmaller subfields together: 1 fractional works · 0.3% of its workEconomics, Econometrics and Finance: 1 fractional works · 0.4% of its workEconomics and Econometrics: 1 fractional works · 0.4% of its workBusiness, Management and Accounting: 0 fractional works · 0.2% of its workManagement of Technology and Innovation: 0 fractional works · 0.2% of its workDecision Sciences: 0 fractional works · 0.1% of its workLife Sciences: 4 fractional works · 1.5% of its workBiochemistry, Genetics and Molecular Biology: 3 fractional works · 1.1% of its workBiophysics: 1 fractional works · 0.5% of its workMolecular Biology: 1 fractional works · 0.5% of its workSmaller subfields together: 0 fractional works · 0.0% of its workAgricultural and Biological Sciences: 1 fractional works · 0.2% of its workNeuroscience: 0 fractional works · 0.1% of its workALL ITS WORKAxcelisTechnologies…246fractional works, all years
Life Sciences1%Physical Sciences94%Health Sciences3%Social Sciences2%

Each ring splits the one inside it: the four domains of science, their fields, their subfields. Size is fractional works in all years. Every slice is a page; the interactive view zooms down to single topics and colours each by how much more of it this institution does than the world.

Its 4 domains and 20 fields, with their numbers
    1. Engineering19579.1%
    2. Materials Science187.3%
    3. Physics and Astronomy156.0%
    4. Computer Science20.9%
    5. Chemistry10.3%
    6. Environmental Science10.2%
    7. Earth and Planetary Sciences00.2%
    8. Chemical Engineering00.2%
    9. Energy00.1%
    1. Medicine62.3%
    2. Dentistry10.3%
    1. Arts and Humanities10.5%
    2. Social Sciences10.5%
    3. Economics, Econometrics and Finance10.4%
    4. Business, Management and Accounting00.2%
    5. Decision Sciences00.1%
    1. Biochemistry, Genetics and Molecular Biology31.1%
    2. Agricultural and Biological Sciences10.2%
    3. Neuroscience00.1%
    4. Immunology and Microbiology00.0%
All of science, and how each field's share has moved since 1950: the Science domain explorer

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

Agricultural and Biological Sciences: 0.20× its world share, 0 worksAgricultural and Bio…Biochemistry, Genetics and Molecular Biology: 0.18× its world share, 0 worksBiochemistry, Geneti…Immunology and Microbiology: 0.27× its world share, 0 worksImmunology and Micro…Chemical Engineering: 5.45× its world share, 0 worksChemical EngineeringComputer Science: 0.37× its world share, 0 worksComputer ScienceEngineering: 4.71× its world share, 12 worksEngineeringEnvironmental Science: 0.04× its world share, 0 worksEnvironmental ScienceMaterials Science: 2.18× its world share, 1 worksMaterials SciencePhysics and Astronomy: 2.33× its world share, 1 worksPhysics and AstronomyMedicine: 0.40× its world share, 1 worksMedicineDecision Sciences: 1.48× its world share, 0 worksDecision SciencesSocial Sciences: 0.02× its world share, 0 worksSocial Sciences1×world share
more than its size predictsabout as predictedless

Rings at 0.5×, 1× and 2×. Widest outward: Chemical Engineering, 5.5×. Every wedge is a field page.

All 12 fields, with their numbers
  1. Chemical Engineering5.45×0 works
  2. Engineering4.71×12 works
  3. Physics and Astronomy2.33×1 works
  4. Materials Science2.18×1 works
  5. Decision Sciences1.48×0 works
  6. Medicine0.40×1 works
  7. Computer Science0.37×0 works
  8. Immunology and Microbiology0.27×0 works
  9. Agricultural and Biological Sciences0.20×0 works
  10. Biochemistry, Genetics and Molecular Biology0.18×0 works
  11. Environmental Science0.04×0 works
  12. Social Sciences0.02×0 works

Who are the top researchers at Axcelis Technologies (United States)?

Ranked on the quality score, Aditya Agarwal, Mike S. Ameen and Michael Ameen lead among researchers whose main affiliation is Axcelis Technologies (United States).

  1. 1 Aditya Agarwal United States · #1,721,630 worldwide 2.2k citations · 140 works
  2. 2 Mike S. Ameen United States · #2,518,687 worldwide 254 citations · 15 works
  3. 3 Michael Ameen United States · #3,094,462 worldwide 265 citations · 25 works
  4. 4 E. Eisner United States · #3,733,692 worldwide 434 citations · 40 works
  5. 5 A. L. Nelson United States · #3,771,686 worldwide 7.2k citations · 23 works
  6. 6 M. S. Ameen United States · #4,060,346 worldwide 415 citations · 39 works
  7. 7 Orlando Escorcia United States · #4,136,269 worldwide 243 citations · 22 works
  8. 8 Bo H. Vanderberg United States · #4,360,781 worldwide 40 citations · 16 works
  9. 9 Jonathan David United States · #4,597,250 worldwide 26 citations · 66 works
  10. 10 Shu Satoh United States · #4,625,823 worldwide 266 citations · 49 works
All ranked researchers at Axcelis Technologies (United States)

What are the most cited papers from Axcelis Technologies (United States)?

The most cited paper from Axcelis Technologies (United States) is "Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation" (Francesca Iacopi, Youssef Travaly, B. Eyckens et al., 2006), with 133 citations. Next come "FinFET process refinements for improved mobility and gate work function engineering" (105) and "Effect of annealing environment on the memory properties of thin oxides with embedded Si nanocrystals obtained by low-energy ion-beam synthesis" (104).

Most cited papers
#PaperReleasedCitations
1 Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation Francesca Iacopi, Youssef Travaly, B. Eyckens et al. · Journal of Applied Physics Mar 2006 133
2 FinFET process refinements for improved mobility and gate work function engineering Yang‐Kyu Choi, Leland Chang, P. Ranade et al. Conference paper 25 Jun 2003 105
3 Effect of annealing environment on the memory properties of thin oxides with embedded Si nanocrystals obtained by low-energy ion-beam synthesis P. Normand, Eleftherios Kapetanakis, Panagiotis Dimitrakis et al. · Applied Physics Letters 3 Jul 2003 104
4 Silicon nanocrystal memory devices obtained by ultra-low-energy ion-beam synthesis Panagiotis Dimitrakis, Eleftherios Kapetanakis, D. Tsoukalas et al. · Solid-State Electronics 29 Apr 2004 67
5 Raman scattering properties of GaN thin films grown on sapphire under visible and ultraviolet excitation Zhe Chuan Feng, Wenyang Wang, S. J. Chua et al. · Journal of Raman Spectroscopy Oct 2001 57
All 60 most cited papers, with filters and sorting

Which keywords describe research at Axcelis Technologies (United States)?

By fractional works in all years, weighted toward what it does more of than the world: Solar Cells, Photovoltaics, Nanoelectronics, Semiconductor Devices, Atomic Layer Deposition, High-k Dielectrics, Efficiency and Silicon.

▲ more of its work than of the world's◆ about the world's share▼ less than the world's

Size is fractional works in all years in the topics tagged with each word; colour is the word's share of this institution's work against its share of the world's. The 40 words are chosen for being large and distinctive. Each links to the topic it comes from most.

All 40 words, with their numbers
  1. Solar Cells44▲ 58×3 topics
  2. Photovoltaics38▲ 62×3 topics
  3. Nanoelectronics36▲ 94×2 topics
  4. Semiconductor Devices35▲ 107×2 topics
  5. Atomic Layer Deposition35▲ 107×1 topic
  6. High-k Dielectrics35▲ 107×1 topic
  7. Efficiency34▲ 52×2 topics
  8. Silicon34▲ 184×2 topics
  9. Heterojunction33▲ 336×1 topic
  10. Passivation33▲ 336×1 topic
  11. Integrated Circuits33▲ 58×2 topics
  12. Failure Analysis30▲ 91×1 topic
  13. Photon Emission Microscopy30▲ 242×1 topic
  14. Nanostructures16▲ 14×6 topics
  15. Surface Engineering14▲ 50×2 topics
  16. Nanoscale Patterning14▲ 87×2 topics
  17. Thin Films14▲ 21×5 topics
  18. Ion Beam13▲ 117×1 topic
  19. Surface Analysis13▲ 117×1 topic
  20. X-ray Photoelectron Spectroscopy11▲ 33×2 topics
  21. Mechanical Properties10▲ 4.3×7 topics
  22. Nanocomposites10▲ 5.1×6 topics
  23. Nanowires9▲ 16×4 topics
  24. Coatings9▲ 41×1 topic
  25. Nanoindentation9▲ 43×1 topic
  26. Nanowire Transistors8▲ 52×1 topic
  27. Tunnel Field-Effect Transistors8▲ 52×1 topic
  28. Plasma Etching8▲ 68×1 topic
  29. Semiconductor Industry8▲ 68×1 topic
  30. Molecular Dynamics Simulation7▲ 19×3 topics
  31. Tool Wear7▲ 20×2 topics
  32. Chemical Mechanical Planarization7▲ 47×1 topic
  33. Material Removal Mechanism7▲ 47×1 topic
  34. Epitaxial Growth6▲ 32×2 topics
  35. Electrical Properties6▲ 15×4 topics
  36. Dielectric Properties6▲ 16×3 topics
  37. High-Resolution Patterning6▲ 59×2 topics
  38. Semiconductor6▲ 7.0×4 topics
  39. Metal-Semiconductor Contacts6▲ 43×1 topic
  40. Schottky Barrier6▲ 43×1 topic

Which research topics does Axcelis Technologies (United States) publish most on?

By volume in 2022-now: Silicon and Solar Cell Technologies, Ion-surface interactions and analysis, CCD and CMOS Imaging Sensors and Advancements in Semiconductor Devices and Circuit Design.

Silicon and Solar Cell T…3Silicon and Solar Cell Technologies: 3 fractional worksIon-surface interactions…1Ion-surface interactions and analysis: 1 fractional worksCCD and CMOS Imaging Sen…1CCD and CMOS Imaging Sensors: 1 fractional worksAdvancements in Semiconductor Devices and Circuit Design: 1 fractional worksIntegrated Circuits and Semiconductor Failure Analysis: 1 fractional worksSemiconductor materials …1Semiconductor materials and devices: 1 fractional worksSilicon Carbide Semiconductor Technologies: 0 fractional worksParticle accelerators and beam dynamics: 0 fractional worksNuclear Materials and Properties: 0 fractional worksNuclear Physics and Applications: 0 fractional works
Electrical and Electronic EngineeringComputational MechanicsAerospace EngineeringMaterials Chemistry1 others

Area is fractional works; colour is the subfield each topic belongs to.

  1. 1 Silicon and Solar Cell Technologies Electrical and Electronic Engineering 3 works
  2. 2 Ion-surface interactions and analysis Computational Mechanics 1 works
  3. 3 CCD and CMOS Imaging Sensors Electrical and Electronic Engineering 1 works
  4. 4 Advancements in Semiconductor Devices and Circuit Design Electrical and Electronic Engineering 1 works
  5. 5 Integrated Circuits and Semiconductor Failure Analysis Electrical and Electronic Engineering 1 works
  6. 6 Semiconductor materials and devices Electrical and Electronic Engineering 1 works
  7. 7 Silicon Carbide Semiconductor Technologies Electrical and Electronic Engineering 0 works
  8. 8 Particle accelerators and beam dynamics Aerospace Engineering 0 works
  9. 9 Nuclear Materials and Properties Materials Chemistry 0 works
  10. 10 Nuclear Physics and Applications Radiation 0 works

How open and international is its research?

Against the world's own shares: the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available6.4%not open93.6%

World: 40% of research is openly available.

with international co-authors17.8%domestic only82.2%

World: 18% is written across borders.

How has Axcelis Technologies (United States)'s research output changed?

Output in 2022-2025 was 23% higher than in 2018-2021.

still counting200020102020
grewheldshrank

The same series as a ribbon: one cell per year, darker for more. The line above answers how much; this answers when.

Its share of all research

Growing output can still be a shrinking share: all of science grows. This is Axcelis Technologies (United States) as a percentage of every work published that year, 0.0000031% in 2024.

still counting0.0010%0.0020%0.0030%Axcelis Technologies (United States)0.000080% in 2025200020102020

Fractional works of Axcelis Technologies (United States) over all fractional works that year. How the balance of science has shifted.

Other research institutions in Beverly

All research institutions in Beverly

Share Axcelis Technologies (United States)'s ranking

Axcelis Technologies (United States) on Science Explorer

A card with Axcelis Technologies (United States)'s standing and the fields it leads in, for a post or a slide. A link to this page previews as the same card.

Download the card

1200 × 630 PNG, sized for social posts, drawn from the latest snapshot.

Badges for a website1Each links back here and updates with every snapshot

Research measures only: rankings here say nothing about teaching, admissions or student experience. Comparable institutions and collaboration partners have tabs of their own, above.

Discussion

Ask a question or share a note about Axcelis Technologies (United States). Keep it to the research: no personal attacks, advertising or links. Any reader can report a post, which collapses it for everyone until it is opened.