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Company · Beverly · United States

Axcelis Technologies (United States)

In research, Axcelis Technologies (United States) stands highest in Engineering (#9,658 of 11,412 worldwide), Physical Sciences (#18,296 of 21,541 worldwide) and Electrical and Electronic Engineering (#4,162 of 4,248 worldwide), over all time.

axcelis.comROR OpenAlex
World rank, all time
#29,060
of 42,892
Rank in United States
#6,222
of 8,685
Research works
246
▲ 3% vs 2013–17
Citations
1.5k
6.2 per fractional work
Top-10% rate
0.8%
record average 16.5%
Open access
6%
world 28%

What is Axcelis Technologies (United States) known for in research?

The fields where it stands highest, over all time, ranked among every institution above the floor in each field.

FieldWorld rankWhere that sitsTop-10% rateWorks
EngineeringField #9,658 of 11,412 4.0%195
Physical SciencesDomain #18,296 of 21,541 4.1%232
Electrical and Electronic EngineeringSubfield #4,162 of 4,248 2.6%149

Each strip is that field’s whole ranked pool, with the notch where Axcelis Technologies (United States) sits in it, in the colour of the band that rank falls in. The track under the rate is the rate itself: it carries no world mark, because the world rate differs by field (from about 6% to 21% in this record).

Field profile

Location quotient across every field it publishes in: outside the ring is more than an institution of this size would be expected to publish, inside it is less.

Biochemistry, Genetics and Molecular Biology: 0.25× its world share, 0 worksBiochemistry, Geneti…Chemical Engineering: 7.71× its world share, 0 worksChemical EngineeringComputer Science: 0.52× its world share, 0 worksComputer ScienceEngineering: 4.42× its world share, 8 worksEngineeringEnvironmental Science: 0.06× its world share, 0 worksEnvironmental ScienceMaterials Science: 2.32× its world share, 1 worksMaterials SciencePhysics and Astronomy: 2.69× its world share, 1 worksPhysics and AstronomyMedicine: 0.46× its world share, 1 worksMedicineDecision Sciences: 2.09× its world share, 0 worksDecision SciencesSocial Sciences: 0.03× its world share, 0 worksSocial Sciences1×world share
more than its size predictsabout as predictedless

Rings at 0.5×, 1× and 2×. Widest outward: Chemical Engineering, 7.7×. Every wedge is a field page.

Who are the top researchers at Axcelis Technologies (United States)?

Ranked on the composite score, Aditya Agarwal, Ivan L. Berry and Amitabh Jain lead among researchers whose main affiliation is Axcelis Technologies (United States).

  1. 1 Aditya Agarwal United States · #944,017 worldwide 71 citations · 34 works
  2. 2 Ivan L. Berry United States · #1,042,854 worldwide 31 citations · 26 works
  3. 3 Amitabh Jain United States · #1,242,228 worldwide 35 citations · 49 works
  4. 4 Yevgeniy V. Kondratenko United States · #1,326,574 worldwide 27 citations · 40 works
  5. 5 L. Rubin United States · #1,338,043 worldwide 17 citations · 24 works
All ranked researchers at Axcelis Technologies (United States)

Which keywords describe research at Axcelis Technologies (United States)?

By fractional works in all years, weighted toward what it does more of than the world: Solar Cells, Photovoltaics, Nanoelectronics, Semiconductor Devices, Atomic Layer Deposition, High-k Dielectrics, Efficiency and Silicon.

▲ more of its work than of the world’s◆ about the world’s share▼ less than the world’s

Size is fractional works in all years in the topics tagged with each word; colour is the word's share of this institution's work against its share of the world's. The 40 words are chosen for being large and distinctive. Each links to the topic it comes from most.

All 40 words, with their numbers
  1. Solar Cells44▲ 58×3 topics
  2. Photovoltaics38▲ 62×3 topics
  3. Nanoelectronics36▲ 94×2 topics
  4. Semiconductor Devices35▲ 107×2 topics
  5. Atomic Layer Deposition35▲ 107×1 topic
  6. High-k Dielectrics35▲ 107×1 topic
  7. Efficiency34▲ 52×2 topics
  8. Silicon34▲ 184×2 topics
  9. Heterojunction33▲ 336×1 topic
  10. Passivation33▲ 336×1 topic
  11. Integrated Circuits33▲ 58×2 topics
  12. Failure Analysis30▲ 91×1 topic
  13. Photon Emission Microscopy30▲ 242×1 topic
  14. Nanostructures16▲ 14×6 topics
  15. Surface Engineering14▲ 50×2 topics
  16. Nanoscale Patterning14▲ 87×2 topics
  17. Thin Films14▲ 21×5 topics
  18. Ion Beam13▲ 117×1 topic
  19. Surface Analysis13▲ 117×1 topic
  20. X-ray Photoelectron Spectroscopy11▲ 33×2 topics
  21. Mechanical Properties10▲ 4.3×7 topics
  22. Nanocomposites10▲ 5.1×6 topics
  23. Nanowires9▲ 16×4 topics
  24. Coatings9▲ 41×1 topic
  25. Nanoindentation9▲ 43×1 topic
  26. Nanowire Transistors8▲ 52×1 topic
  27. Tunnel Field-Effect Transistors8▲ 52×1 topic
  28. Plasma Etching8▲ 68×1 topic
  29. Semiconductor Industry8▲ 68×1 topic
  30. Molecular Dynamics Simulation7▲ 19×3 topics
  31. Tool Wear7▲ 20×2 topics
  32. Chemical Mechanical Planarization7▲ 47×1 topic
  33. Material Removal Mechanism7▲ 47×1 topic
  34. Epitaxial Growth6▲ 32×2 topics
  35. Electrical Properties6▲ 15×4 topics
  36. Dielectric Properties6▲ 16×3 topics
  37. High-Resolution Patterning6▲ 59×2 topics
  38. Semiconductor6▲ 7.0×4 topics
  39. Metal-Semiconductor Contacts6▲ 43×1 topic
  40. Schottky Barrier6▲ 43×1 topic

Which research topics does Axcelis Technologies (United States) publish most on?

By volume in 2022–2025: Silicon and Solar Cell Technologies, Ion-surface interactions and analysis, Integrated Circuits and Semiconductor Failure Analysis and CCD and CMOS Imaging Sensors.

Silicon and Solar Cell T…1Silicon and Solar Cell Technologies: 1 fractional worksIon-surface interactions and analysis: 1 fractional worksIntegrated Circuits and …1Integrated Circuits and Semiconductor Failure Analysis: 1 fractional worksCCD and CMOS Imaging Sen…1CCD and CMOS Imaging Sensors: 1 fractional worksNuclear Materials and Properties: 0 fractional worksParticle accelerators and beam dynamics: 0 fractional worksNuclear Physics and Appl…0Nuclear Physics and Applications: 0 fractional worksAdvanced Machining and Optimization Techniques: 0 fractional worksAnalytical Chemistry and Sensors: 0 fractional worksAdvancements in Photolithography Techniques: 0 fractional works
Electrical and Electronic EngineeringComputational MechanicsMaterials ChemistryAerospace Engineering2 others

Area is fractional works; colour is the subfield each topic belongs to.

  1. 1 Silicon and Solar Cell Technologies Electrical and Electronic Engineering 1 works
  2. 2 Ion-surface interactions and analysis Computational Mechanics 1 works
  3. 3 Integrated Circuits and Semiconductor Failure Analysis Electrical and Electronic Engineering 1 works
  4. 4 CCD and CMOS Imaging Sensors Electrical and Electronic Engineering 1 works
  5. 5 Nuclear Materials and Properties Materials Chemistry 0 works
  6. 6 Particle accelerators and beam dynamics Aerospace Engineering 0 works
  7. 7 Nuclear Physics and Applications Radiation 0 works
  8. 8 Advanced Machining and Optimization Techniques Electrical and Electronic Engineering 0 works
  9. 9 Analytical Chemistry and Sensors Bioengineering 0 works
  10. 10 Advancements in Photolithography Techniques Electrical and Electronic Engineering 0 works

How open and international is its research?

Against the world’s own shares — the tick on each track. Both are shares of its output, so they sit on one scale and can be read against each other as well as against the world.

openly available6.4%not open93.6%

World: 28% of research is openly available.

with international co-authors17.8%domestic only82.2%

World: 19% is written across borders.

How has Axcelis Technologies (United States)'s research output changed?

Output in 2018–2022 was 3% higher than in 2013–2017.

199520002005201020152020
grewheldshrank

The same series as a ribbon — one cell per year, darker for more. The line above answers how much; this answers when.

Other research institutions in Beverly

All research institutions in Beverly

Research measures only: rankings here say nothing about teaching, admissions or student experience. Comparable institutions and collaboration partners are in the interactive view on the map.