Franz X. Zach
Franz X. Zach publishes mostly in Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Semiconductor materials and devices and Integrated Circuits and Semiconductor Failure Analysis.
- World rank
- #6,618,866 of 7,710,434 ranked researchers
- Rank in United States
- #1,538,529 of 1,627,098
- Works
- 48
- Citations
- 350
- Citations per work
- 7.3
What does Franz X. Zach research?
Franz X. Zach's work is mostly in Engineering (53%), Physics and Astronomy (18%), Materials Science (8%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences3879.1%
- Engineering2553.0%
- Physics and Astronomy918.3%
- Materials Science47.8%
- Everything else1020.9%
- 1Electrical and Electronic Engineering42% of their works
- 2Atomic and Molecular Physics, and Optics16% of their works
- 3Biomedical Engineering9% of their works
- 4Surfaces, Coatings and Films8% of their works
- 5Condensed Matter Physics3% of their works
- 6Industrial and Manufacturing Engineering3% of their works
Research topics
- Advancements in Photolithography Techniques
- Semiconductor materials and devices
- Integrated Circuits and Semiconductor Failure Analysis
- Semiconductor Quantum Structures and Devices
- Advanced Surface Polishing Techniques
- Electron and X-Ray Spectroscopy Techniques
- Optical Coatings and Gratings
- Photonic and Optical Devices
Which keywords describe Franz X. Zach's research?
The keywords of their largest research topics: Nanofabrication, Electron Beam Lithography, Resolution Limits, Integrated Circuits, Atomic Layer Deposition, Failure Analysis, High-k Dielectrics and Photon Emission Microscopy.
- Silicon Photonics
- Nanostructures
- X-ray Photoelectron Spectroscopy
- Material Removal Mechanism
- Semiconductor
- Photon Emission Microscopy
- Failure Analysis
- Integrated Circuits
- Electron Beam Lithography
- Nanofabrication
- Resolution Limits
- Atomic Layer Deposition
- High-k Dielectrics
- Quantum Dots
- Chemical Mechanical Planarization
- Scanning Electron Microscopy
- Antireflective Coatings
- Optical Modulators
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 18 words, with their numbers
- Nanofabrication202 topics
- Electron Beam Lithography161 topic
- Resolution Limits161 topic
- Integrated Circuits102 topics
- Atomic Layer Deposition71 topic
- Failure Analysis71 topic
- High-k Dielectrics71 topic
- Photon Emission Microscopy71 topic
- Quantum Dots61 topic
- Semiconductor61 topic
- Chemical Mechanical Planarization51 topic
- Material Removal Mechanism51 topic
- Scanning Electron Microscopy51 topic
- X-ray Photoelectron Spectroscopy51 topic
- Antireflective Coatings41 topic
- Nanostructures41 topic
- Optical Modulators31 topic
- Silicon Photonics31 topic
Where does Franz X. Zach work?
Franz X. Zach's main affiliation in the publication record is Lawrence Berkeley National Laboratory, United States.
How many publications and citations does Franz X. Zach have?
OpenAlex counts 48 works and 350 citations for Franz X. Zach, an h-index of 10, ranking #6,618,866 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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