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Researcher · ASML (Netherlands) · Netherlands

Koen van Ingen Schenau

Koen van Ingen Schenau publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.

OpenAlex
World rank
#4,892,915
of 7,710,434 ranked researchers
Rank in Netherlands
#87,718
of 107,149
Works
32
Citations
422
Citations per work
13.2
h-index
11
i10-index 12Top 47% in Electrical and Electronic Engineering
Koen van Ingen Schenau

What does Koen van Ingen Schenau research?

Koen van Ingen Schenau's work is mostly in Engineering (73%), Materials Science (24%), Medicine (2%).

Physical Sciences: 31 works · 97.9% of their workEngineering: 23 works · 72.9% of their workElectrical and Electronic Engineering: 19 works · 60.4% of their workBiomedical Engineering: 4 works · 11.5% of their workMechanical Engineering: 0 works · 1.0% of their workMaterials Science: 8 works · 24.0% of their workSurfaces, Coatings and Films: 8 works · 24.0% of their workPhysics and Astronomy: 0 works · 1.0% of their workRadiation: 0 works · 1.0% of their workHealth Sciences: 1 works · 2.1% of their workMedicine: 1 works · 2.1% of their workRadiology, Nuclear Medicine and Imaging: 1 works · 2.1% of their workTHEIR WORKKoen van IngenSchenau32works
Physical Sciences98%Health Sciences2%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering2372.9%
    2. Materials Science824.0%
    3. Physics and Astronomy01.0%
    1. Medicine12.1%
  1. 1Electrical and Electronic Engineering60% of their works
  2. 2Surfaces, Coatings and Films24% of their works
  3. 3Biomedical Engineering12% of their works
  4. 4Radiology, Nuclear Medicine and Imaging2% of their works
  5. 5Radiation1% of their works
  6. 6Mechanical Engineering1% of their works

Research topics

Which keywords describe Koen van Ingen Schenau's research?

The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.

All 18 words, with their numbers
  1. High-Resolution Patterning352 topics
  2. Nanofabrication352 topics
  3. Electron Beam Lithography311 topic
  4. Resolution Limits311 topic
  5. Failure Analysis231 topic
  6. Integrated Circuits231 topic
  7. Scanning Electron Microscopy191 topic
  8. X-ray Photoelectron Spectroscopy191 topic
  9. Antireflective Coatings41 topic
  10. Chemical Mechanical Planarization41 topic
  11. Material Removal Mechanism41 topic
  12. Nanolithography41 topic
  13. Nanostructures41 topic
  14. Soft Lithography41 topic
  15. Compound Eyes21 topic
  16. Freeform Optics21 topic
  17. Interconnect21 topic
  18. Through-Silicon Via21 topic

Where does Koen van Ingen Schenau work?

Koen van Ingen Schenau's main affiliation in the publication record is ASML (Netherlands), Netherlands.

How many publications and citations does Koen van Ingen Schenau have?

OpenAlex counts 32 works and 422 citations for Koen van Ingen Schenau, an h-index of 11, ranking #4,892,915 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

Discussion

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