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Researcher · ASML (Netherlands) · Netherlands

Robert J. Socha

Robert J. Socha publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.

ORCID 0000-0003-2388-1819 OpenAlex
World rank
#6,448,332
of 7,710,434 ranked researchers
Rank in Netherlands
#101,730
of 107,149
Works
134
Citations
984
Citations per work
7.3
h-index
15
i10-index 31Top 30% in Electrical and Electronic Engineering
Robert J. Socha

What does Robert J. Socha research?

Robert J. Socha's work is mostly in Engineering (68%), Materials Science (10%), Social Sciences (7%).

Physical Sciences: 105 works · 78.3% of their workEngineering: 92 works · 68.4% of their workElectrical and Electronic Engineering: 66 works · 49.1% of their workBiomedical Engineering: 16 works · 11.7% of their workIndustrial and Manufacturing Engineering: 7 works · 5.0% of their workComputational Mechanics: 3 works · 2.6% of their workMaterials Science: 13 works · 9.9% of their workSurfaces, Coatings and Films: 13 works · 9.9% of their workEverything else: 20 works · 15.2% of their workSocial Sciences: 9 works · 6.5% of their workSocial Sciences: 9 works · 6.5% of their workPolitical Science and International Relations: 9 works · 6.5% of their workTHEIR WORKRobert J. Socha134works
Physical Sciences78%Social Sciences7%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering9268.4%
    2. Materials Science139.9%
  2. Everything else2015.2%
    1. Social Sciences96.5%
  1. 1Electrical and Electronic Engineering49% of their works
  2. 2Biomedical Engineering12% of their works
  3. 3Surfaces, Coatings and Films10% of their works
  4. 4Political Science and International Relations6% of their works
  5. 5Industrial and Manufacturing Engineering5% of their works
  6. 6Computational Mechanics3% of their works

Research topics

Which keywords describe Robert J. Socha's research?

The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.

All 18 words, with their numbers
  1. High-Resolution Patterning1172 topics
  2. Nanofabrication1162 topics
  3. Electron Beam Lithography1021 topic
  4. Resolution Limits1021 topic
  5. Failure Analysis501 topic
  6. Integrated Circuits501 topic
  7. Scanning Electron Microscopy241 topic
  8. X-ray Photoelectron Spectroscopy241 topic
  9. Chemical Mechanical Planarization191 topic
  10. Material Removal Mechanism191 topic
  11. Interconnect181 topic
  12. Through-Silicon Via181 topic
  13. Fabric Defect Detection161 topic
  14. Machine Vision161 topic
  15. Nanolithography151 topic
  16. Soft Lithography151 topic
  17. Antireflective Coatings141 topic
  18. Nanostructures141 topic

Where does Robert J. Socha work?

Robert J. Socha's main affiliation in the publication record is ASML (Netherlands), Netherlands.

How many publications and citations does Robert J. Socha have?

OpenAlex counts 134 works and 984 citations for Robert J. Socha, an h-index of 15, ranking #6,448,332 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

Discussion

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