Robert Socha
Robert Socha publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.
- World rank
- #800,146 of 1,633,909 ranked researchers
- Rank in Netherlands
- #14,948 of 23,481
- Works
- 37
- Citations
- 73
- Citations per work
- 2.0
What does Robert Socha research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering62% of their works
- 2Surfaces, Coatings and Films15% of their works
- 3Biomedical Engineering11% of their works
- 4Computational Mechanics3% of their works
- 5Industrial and Manufacturing Engineering3% of their works
- 6Mechanical Engineering3% of their works
Research topics
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Electron and X-Ray Spectroscopy Techniques
- Advanced Surface Polishing Techniques
- Semiconductor materials and devices
- 3D IC and TSV technologies
- Optical Coatings and Gratings
- Surface Roughness and Optical Measurements
Which keywords describe Robert Socha's research?
The keywords of their largest research topics: Nanofabrication, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy and Chemical Mechanical Planarization.
- Roughness Measurement
- Nanostructures
- High-k Dielectrics
- Antireflective Coatings
- Chemical Mechanical Planarization
- Scanning Electron Microscopy
- Failure Analysis
- Electron Beam Lithography
- Nanofabrication
- Resolution Limits
- Integrated Circuits
- X-ray Photoelectron Spectroscopy
- Material Removal Mechanism
- Atomic Layer Deposition
- Interconnect
- Through-Silicon Via
- Surface Characterization
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- Nanofabrication242 topics
- Electron Beam Lithography211 topic
- Resolution Limits211 topic
- Failure Analysis111 topic
- Integrated Circuits111 topic
- Scanning Electron Microscopy71 topic
- X-ray Photoelectron Spectroscopy71 topic
- Chemical Mechanical Planarization41 topic
- Material Removal Mechanism41 topic
- Antireflective Coatings31 topic
- Atomic Layer Deposition31 topic
- High-k Dielectrics31 topic
- Interconnect31 topic
- Nanostructures31 topic
- Through-Silicon Via31 topic
- Roughness Measurement21 topic
- Surface Characterization21 topic
Where does Robert Socha work?
Robert Socha's main affiliation in the publication record is ASML (Netherlands), Netherlands.
How many publications and citations does Robert Socha have?
Science Explorer counts 37 works and 73 citations for Robert Socha, ranking #800,146 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.