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Researcher · Hitachi (Japan) · Japan

Shinji Okazaki

Shinji Okazaki publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques and Integrated Circuits and Semiconductor Failure Analysis.

ORCID 0000-0003-0840-7449 OpenAlex
World rank
#741,204
of 1,633,909 ranked researchers
Rank in Japan
#33,908
of 114,622
Works
47
Citations
85
Citations per work
1.8

What does Shinji Okazaki research?

Electrical and Electronic Engineering: 58.3%Surfaces, Coatings and Films: 9.7%Biomedical Engineering: 8.3%Mechanical Engineering: 5.6%other fields: 18.1%58%top field
Electrical and Electronic Engineering58.3%Surfaces, Coatings and Films9.7%Biomedical Engineering8.3%Mechanical Engineering5.6%other fields18.1%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering58% of their works
  2. 2Surfaces, Coatings and Films10% of their works
  3. 3Biomedical Engineering8% of their works
  4. 4Mechanical Engineering6% of their works
  5. 5Electronic, Optical and Magnetic Materials4% of their works
  6. 6Atomic and Molecular Physics, and Optics4% of their works

Research topics

Which keywords describe Shinji Okazaki's research?

The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Failure Analysis, Integrated Circuits and Atomic Layer Deposition.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 17 words, with their numbers
  1. High-Resolution Patterning252 topics
  2. Electron Beam Lithography231 topic
  3. Nanofabrication231 topic
  4. Scanning Electron Microscopy71 topic
  5. X-ray Photoelectron Spectroscopy71 topic
  6. Failure Analysis61 topic
  7. Integrated Circuits61 topic
  8. Atomic Layer Deposition51 topic
  9. High-k Dielectrics51 topic
  10. Chemical Mechanical Planarization41 topic
  11. Material Removal Mechanism41 topic
  12. Interconnect31 topic
  13. Low-k Dielectrics31 topic
  14. Microelectronics31 topic
  15. Through-Silicon Via31 topic
  16. Nanolithography21 topic
  17. Soft Lithography21 topic

Where does Shinji Okazaki work?

Shinji Okazaki's main affiliation in the publication record is Hitachi (Japan), Japan.

How many publications and citations does Shinji Okazaki have?

Science Explorer counts 47 works and 85 citations for Shinji Okazaki, ranking #741,204 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Other researchers named Shinji Okazaki

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