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Researcher · ASML (Netherlands) · Netherlands

Alek Chen

Alek Chen publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.

OpenAlex
World rank
#7,012,585
of 7,710,434 ranked researchers
Rank in Netherlands
#104,592
of 107,149
Works
20
Citations
59
Citations per work
3.0
h-index
3
i10-index 1Top 97% in Electrical and Electronic Engineering
Alek Chen

What does Alek Chen research?

Alek Chen's work is mostly in Engineering (67%), Materials Science (23%), Computer Science (4%).

Physical Sciences: 19 works · 93.0% of their workEngineering: 13 works · 66.7% of their workElectrical and Electronic Engineering: 11 works · 56.1% of their workBiomedical Engineering: 2 works · 8.8% of their workMedia Technology: 0 works · 1.8% of their workMaterials Science: 5 works · 22.8% of their workSurfaces, Coatings and Films: 4 works · 19.3% of their workElectronic, Optical and Magnetic Materials: 1 works · 3.5% of their workComputer Science: 1 works · 3.5% of their workHardware and Architecture: 1 works · 3.5% of their workEverything else: 1 works · 7.0% of their workTHEIR WORKAlek Chen20works
Physical Sciences93%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering1366.7%
    2. Materials Science522.8%
    3. Computer Science13.5%
  2. Everything else17.0%
  1. 1Electrical and Electronic Engineering56% of their works
  2. 2Surfaces, Coatings and Films19% of their works
  3. 3Biomedical Engineering9% of their works
  4. 4Electronic, Optical and Magnetic Materials4% of their works
  5. 5Hardware and Architecture4% of their works
  6. 6Media Technology2% of their works

Research topics

Which keywords describe Alek Chen's research?

The keywords of their largest research topics: Nanofabrication, High-Resolution Patterning, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.

All 18 words, with their numbers
  1. Nanofabrication222 topics
  2. High-Resolution Patterning192 topics
  3. Electron Beam Lithography171 topic
  4. Resolution Limits171 topic
  5. Failure Analysis101 topic
  6. Integrated Circuits101 topic
  7. Scanning Electron Microscopy61 topic
  8. X-ray Photoelectron Spectroscopy61 topic
  9. Antireflective Coatings51 topic
  10. Nanostructures51 topic
  11. Interconnect31 topic
  12. Through-Silicon Via31 topic
  13. Chemical Mechanical Planarization21 topic
  14. Embedded Cores21 topic
  15. Material Removal Mechanism21 topic
  16. Nanolithography21 topic
  17. Soft Lithography21 topic
  18. Test Data Compression21 topic

Where does Alek Chen work?

Alek Chen's main affiliation in the publication record is ASML (Netherlands), Netherlands.

How many publications and citations does Alek Chen have?

OpenAlex counts 20 works and 59 citations for Alek Chen, an h-index of 3, ranking #7,012,585 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

Discussion

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