Kenichi Oyama
Kenichi Oyama publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques and Optical Coatings and Gratings.
- World rank
- #1,308,403 of 1,633,909 ranked researchers
- Rank in Japan
- #84,060 of 114,622
- Works
- 16
- Citations
- 23
- Citations per work
- 1.4
What does Kenichi Oyama research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering52% of their works
- 2Biomedical Engineering22% of their works
- 3Surfaces, Coatings and Films18% of their works
- 4Computer Networks and Communications4% of their works
- 5Electronic, Optical and Magnetic Materials4% of their works
Research topics
Which keywords describe Kenichi Oyama's research?
The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Antireflective Coatings, Nanolithography, Nanostructures and Soft Lithography.
- Network Coding
- Freeform Optics
- Compound Eyes
- Through-Silicon Via
- Integrated Circuits
- Soft Lithography
- Nanolithography
- Resolution Limits
- Nanofabrication
- High-Resolution Patterning
- Electron Beam Lithography
- Antireflective Coatings
- Nanostructures
- Failure Analysis
- Interconnect
- Chemical Mechanical Planarization
- Distributed Storage
- Material Removal Mechanism
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 18 words, with their numbers
- High-Resolution Patterning122 topics
- Nanofabrication122 topics
- Electron Beam Lithography81 topic
- Resolution Limits81 topic
- Antireflective Coatings41 topic
- Nanolithography41 topic
- Nanostructures41 topic
- Soft Lithography41 topic
- Failure Analysis21 topic
- Integrated Circuits21 topic
- Interconnect21 topic
- Through-Silicon Via21 topic
- Chemical Mechanical Planarization11 topic
- Compound Eyes11 topic
- Distributed Storage11 topic
- Freeform Optics11 topic
- Material Removal Mechanism11 topic
- Network Coding11 topic
Where does Kenichi Oyama work?
Kenichi Oyama's main affiliation in the publication record is Tokyo Electron (Japan), Japan.
How many publications and citations does Kenichi Oyama have?
Science Explorer counts 16 works and 23 citations for Kenichi Oyama, ranking #1,308,403 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Other researchers named Kenichi Oyama
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