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Researcher · SCREEN (Japan) · Japan

Masahiko Harumoto

Masahiko Harumoto publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques and Semiconductor materials and devices.

World rank
#1,162,239
of 1,633,909 ranked researchers
Rank in Japan
#70,176
of 114,622
Works
19
Citations
10
Citations per work
0.5

What does Masahiko Harumoto research?

Electrical and Electronic Engineering: 55.6%Biomedical Engineering: 16.7%Surfaces, Coatings and Films: 11.1%Atomic and Molecular Physics, and Optics: 5.6%other fields: 11.0%56%top field
Electrical and Electronic Engineering55.6%Biomedical Engineering16.7%Surfaces, Coatings and Films11.1%Atomic and Molecular Physics, and Optics5.6%other fields11.0%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering56% of their works
  2. 2Biomedical Engineering17% of their works
  3. 3Surfaces, Coatings and Films11% of their works
  4. 4Atomic and Molecular Physics, and Optics6% of their works
  5. 5Electronic, Optical and Magnetic Materials6% of their works
  6. 6Media Technology6% of their works

Research topics

Which keywords describe Masahiko Harumoto's research?

The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Atomic Layer Deposition, High-k Dielectrics, Nanolithography, Silicon and Soft Lithography.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 17 words, with their numbers
  1. High-Resolution Patterning72 topics
  2. Electron Beam Lithography51 topic
  3. Nanofabrication51 topic
  4. Atomic Layer Deposition21 topic
  5. High-k Dielectrics21 topic
  6. Nanolithography21 topic
  7. Silicon21 topic
  8. Soft Lithography21 topic
  9. Solar Cells21 topic
  10. Autofocusing11 topic
  11. Chemical Mechanical Planarization11 topic
  12. Depth Estimation11 topic
  13. Failure Analysis11 topic
  14. Integrated Circuits11 topic
  15. Low-k Dielectrics11 topic
  16. Material Removal Mechanism11 topic
  17. Microelectronics11 topic

Where does Masahiko Harumoto work?

Masahiko Harumoto's main affiliation in the publication record is SCREEN (Japan), Japan.

How many publications and citations does Masahiko Harumoto have?

Science Explorer counts 19 works and 10 citations for Masahiko Harumoto, ranking #1,162,239 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.