Masahiko Harumoto
Masahiko Harumoto publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques and Semiconductor materials and devices.
- World rank
- #1,162,239 of 1,633,909 ranked researchers
- Rank in Japan
- #70,176 of 114,622
- Works
- 19
- Citations
- 10
- Citations per work
- 0.5
What does Masahiko Harumoto research?
Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.
- 1Electrical and Electronic Engineering56% of their works
- 2Biomedical Engineering17% of their works
- 3Surfaces, Coatings and Films11% of their works
- 4Atomic and Molecular Physics, and Optics6% of their works
- 5Electronic, Optical and Magnetic Materials6% of their works
- 6Media Technology6% of their works
Research topics
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
- Semiconductor materials and devices
- Silicon and Solar Cell Technologies
- Advanced Surface Polishing Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Image Processing Techniques and Applications
- Copper Interconnects and Reliability
Which keywords describe Masahiko Harumoto's research?
The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Atomic Layer Deposition, High-k Dielectrics, Nanolithography, Silicon and Soft Lithography.
- Material Removal Mechanism
- Integrated Circuits
- Depth Estimation
- Autofocusing
- Soft Lithography
- Nanolithography
- Atomic Layer Deposition
- Electron Beam Lithography
- High-Resolution Patterning
- Nanofabrication
- High-k Dielectrics
- Silicon
- Solar Cells
- Chemical Mechanical Planarization
- Failure Analysis
- Low-k Dielectrics
- Microelectronics
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.
All 17 words, with their numbers
- High-Resolution Patterning72 topics
- Electron Beam Lithography51 topic
- Nanofabrication51 topic
- Atomic Layer Deposition21 topic
- High-k Dielectrics21 topic
- Nanolithography21 topic
- Silicon21 topic
- Soft Lithography21 topic
- Solar Cells21 topic
- Autofocusing11 topic
- Chemical Mechanical Planarization11 topic
- Depth Estimation11 topic
- Failure Analysis11 topic
- Integrated Circuits11 topic
- Low-k Dielectrics11 topic
- Material Removal Mechanism11 topic
- Microelectronics11 topic
Where does Masahiko Harumoto work?
Masahiko Harumoto's main affiliation in the publication record is SCREEN (Japan), Japan.
How many publications and citations does Masahiko Harumoto have?
Science Explorer counts 19 works and 10 citations for Masahiko Harumoto, ranking #1,162,239 of 1,633,909 researchers worldwide on the composite score.
Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.