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Researcher · Tokyo Electron (Japan) · Japan

Seiji Nagahara

Seiji Nagahara publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Industrial and Manufacturing Engineering, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Advanced Surface Polishing Techniques.

World rank
#1,374,942
of 1,633,909 ranked researchers
Rank in Japan
#90,343
of 114,622
Works
23
Citations
25
Citations per work
1.1

What does Seiji Nagahara research?

Electrical and Electronic Engineering: 46.3%Biomedical Engineering: 14.6%Industrial and Manufacturing Engineering: 7.3%Surfaces, Coatings and Films: 7.3%other fields: 24.5%46%top field
Electrical and Electronic Engineering46.3%Biomedical Engineering14.6%Industrial and Manufacturing Engineering7.3%Surfaces, Coatings and Films7.3%other fields24.5%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering46% of their works
  2. 2Biomedical Engineering15% of their works
  3. 3Industrial and Manufacturing Engineering7% of their works
  4. 4Surfaces, Coatings and Films7% of their works
  5. 5Aerospace Engineering2% of their works
  6. 6Hardware and Architecture2% of their works

Research topics

Which keywords describe Seiji Nagahara's research?

The keywords of their largest research topics: Electron Beam Lithography, Nanofabrication, Failure Analysis, Integrated Circuits, Chemical Mechanical Planarization, Material Removal Mechanism, Atomic Layer Deposition and Fabric Defect Detection.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 16 words, with their numbers
  1. Electron Beam Lithography101 topic
  2. Nanofabrication101 topic
  3. Failure Analysis51 topic
  4. Integrated Circuits51 topic
  5. Chemical Mechanical Planarization41 topic
  6. Material Removal Mechanism41 topic
  7. Atomic Layer Deposition31 topic
  8. Fabric Defect Detection31 topic
  9. High-k Dielectrics31 topic
  10. Machine Vision31 topic
  11. Scanning Electron Microscopy31 topic
  12. X-ray Photoelectron Spectroscopy31 topic
  13. Air Force11 topic
  14. Embedded Cores11 topic
  15. Modernization11 topic
  16. Test Data Compression11 topic

Where does Seiji Nagahara work?

Seiji Nagahara's main affiliation in the publication record is Tokyo Electron (Japan), Japan.

How many publications and citations does Seiji Nagahara have?

Science Explorer counts 23 works and 25 citations for Seiji Nagahara, ranking #1,374,942 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.