Akiteru C. Ko
Akiteru C. Ko publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Integrated Circuits and Semiconductor Failure Analysis and Electron and X-Ray Spectroscopy Techniques.
- World rank
- #6,751,918 of 7,710,434 ranked researchers
- Rank in United States
- #1,552,201 of 1,627,098
- Works
- 49
- Citations
- 448
- Citations per work
- 9.1
What does Akiteru C. Ko research?
Akiteru C. Ko's work is mostly in Engineering (71%), Materials Science (21%).
Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.
The fields and subfields, with their numbers
- Physical Sciences4592.4%
- Engineering3571.1%
- Materials Science1021.3%
- Everything else47.6%
- 1Electrical and Electronic Engineering55% of their works
- 2Biomedical Engineering14% of their works
- 3Surfaces, Coatings and Films10% of their works
- 4Electronic, Optical and Magnetic Materials8% of their works
- 5Materials Chemistry3% of their works
- 6Mechanics of Materials2% of their works
Research topics
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Electron and X-Ray Spectroscopy Techniques
- Advanced Surface Polishing Techniques
- Copper Interconnects and Reliability
- Nanofabrication and Lithography Techniques
- Semiconductor materials and devices
- 3D IC and TSV technologies
Which keywords describe Akiteru C. Ko's research?
The keywords of their largest research topics: High-Resolution Patterning, Electron Beam Lithography, Nanofabrication, Failure Analysis, Integrated Circuits, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy and Chemical Mechanical Planarization.
- Interconnect
- Atomic Layer Deposition
- Nanolithography
- Material Removal Mechanism
- Chemical Mechanical Planarization
- Scanning Electron Microscopy
- Failure Analysis
- Electron Beam Lithography
- High-Resolution Patterning
- Nanofabrication
- Integrated Circuits
- X-ray Photoelectron Spectroscopy
- Low-k Dielectrics
- Microelectronics
- Soft Lithography
- High-k Dielectrics
- Through-Silicon Via
Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.
All 17 words, with their numbers
- High-Resolution Patterning482 topics
- Electron Beam Lithography391 topic
- Nanofabrication391 topic
- Failure Analysis171 topic
- Integrated Circuits171 topic
- Scanning Electron Microscopy121 topic
- X-ray Photoelectron Spectroscopy121 topic
- Chemical Mechanical Planarization111 topic
- Low-k Dielectrics111 topic
- Material Removal Mechanism111 topic
- Microelectronics111 topic
- Nanolithography91 topic
- Soft Lithography91 topic
- Atomic Layer Deposition81 topic
- High-k Dielectrics81 topic
- Interconnect61 topic
- Through-Silicon Via61 topic
Where does Akiteru C. Ko work?
Akiteru C. Ko's main affiliation in the publication record is In-Q-Tel, United States.
How many publications and citations does Akiteru C. Ko have?
OpenAlex counts 49 works and 448 citations for Akiteru C. Ko, an h-index of 10, ranking #6,751,918 of 7,710,434 researchers worldwide on the quality score.
Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.
Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.
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