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Researcher · Tokyo Electron (Japan) · Japan

Hidetami Yaegashi

Hidetami Yaegashi publishes mostly in Electrical and Electronic Engineering, Biomedical Engineering and Surfaces, Coatings and Films, on topics such as Advancements in Photolithography Techniques, Nanofabrication and Lithography Techniques and Integrated Circuits and Semiconductor Failure Analysis.

World rank
#1,304,040
of 1,633,909 ranked researchers
Rank in Japan
#83,676
of 114,622
Works
21
Citations
24
Citations per work
1.1

What does Hidetami Yaegashi research?

Electrical and Electronic Engineering: 47.2%Biomedical Engineering: 16.7%Surfaces, Coatings and Films: 16.7%Industrial and Manufacturing Engineering: 5.6%other fields: 13.8%47%top field
Electrical and Electronic Engineering47.2%Biomedical Engineering16.7%Surfaces, Coatings and Films16.7%Industrial and Manufacturing Engineering5.6%other fields13.8%

Shares of their own output, by the field each of their topics belongs to. The grey slice is everything not listed.

  1. 1Electrical and Electronic Engineering47% of their works
  2. 2Biomedical Engineering17% of their works
  3. 3Surfaces, Coatings and Films17% of their works
  4. 4Industrial and Manufacturing Engineering6% of their works
  5. 5Hardware and Architecture3% of their works
  6. 6Computer Networks and Communications3% of their works

Research topics

Which keywords describe Hidetami Yaegashi's research?

The keywords of their largest research topics: High-Resolution Patterning, Nanofabrication, Electron Beam Lithography, Resolution Limits, Failure Analysis, Integrated Circuits, Nanolithography and Soft Lithography.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most.

All 18 words, with their numbers
  1. High-Resolution Patterning142 topics
  2. Nanofabrication132 topics
  3. Electron Beam Lithography101 topic
  4. Resolution Limits101 topic
  5. Failure Analysis41 topic
  6. Integrated Circuits41 topic
  7. Nanolithography41 topic
  8. Soft Lithography41 topic
  9. Antireflective Coatings31 topic
  10. Nanostructures31 topic
  11. Scanning Electron Microscopy31 topic
  12. X-ray Photoelectron Spectroscopy31 topic
  13. Interconnect21 topic
  14. Through-Silicon Via21 topic
  15. Distributed Storage11 topic
  16. Embedded Cores11 topic
  17. Network Coding11 topic
  18. Test Data Compression11 topic

Where does Hidetami Yaegashi work?

Hidetami Yaegashi's main affiliation in the publication record is Tokyo Electron (Japan), Japan.

How many publications and citations does Hidetami Yaegashi have?

Science Explorer counts 21 works and 24 citations for Hidetami Yaegashi, ranking #1,304,040 of 1,633,909 researchers worldwide on the composite score.

Ranked on field-normalised excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics are in the interactive view on the map. Is this your page? Request a correction or removal.