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Researcher · Vistec Electron Beam (Germany) · Germany

Monika Boettcher

Monika Boettcher publishes mostly in Electrical and Electronic Engineering, Surfaces, Coatings and Films and Biomedical Engineering, on topics such as Advancements in Photolithography Techniques, Electron and X-Ray Spectroscopy Techniques and Integrated Circuits and Semiconductor Failure Analysis.

OpenAlex
World rank
#6,983,988
of 7,710,434 ranked researchers
Rank in Germany
#343,003
of 364,343
Works
18
Citations
59
Citations per work
3.3
h-index
5
i10-index 2Top 89% in Electrical and Electronic Engineering
Monika Boettcher

What does Monika Boettcher research?

Monika Boettcher's work is mostly in Engineering (63%), Materials Science (30%), Environmental Science (4%).

Physical Sciences: 17 works · 96.3% of their workEngineering: 11 works · 62.9% of their workElectrical and Electronic Engineering: 9 works · 48.1% of their workBiomedical Engineering: 3 works · 14.8% of their workMaterials Science: 5 works · 29.7% of their workSurfaces, Coatings and Films: 4 works · 24.1% of their workElectronic, Optical and Magnetic Materials: 1 works · 5.6% of their workEnvironmental Science: 1 works · 3.7% of their workGlobal and Planetary Change: 1 works · 3.7% of their workLife Sciences: 0 works · 1.9% of their workBiochemistry, Genetics and Molecular Biology: 0 works · 1.9% of their workStructural Biology: 0 works · 1.9% of their workTHEIR WORKMonika Boettcher18works
Life Sciences2%Physical Sciences96%

Their six largest subfields, inside their fields and domains; the grey slice is everything else they publish. The interactive view splits every one of their works down to single topics.

The fields and subfields, with their numbers
    1. Engineering1162.9%
    2. Materials Science529.7%
    3. Environmental Science13.7%
    1. Biochemistry, Genetics and Molecular Biology01.9%
  1. 1Electrical and Electronic Engineering48% of their works
  2. 2Surfaces, Coatings and Films24% of their works
  3. 3Biomedical Engineering15% of their works
  4. 4Electronic, Optical and Magnetic Materials6% of their works
  5. 5Global and Planetary Change4% of their works
  6. 6Structural Biology2% of their works

Research topics

Which keywords describe Monika Boettcher's research?

The keywords of their largest research topics: Nanofabrication, High-Resolution Patterning, Electron Beam Lithography, Resolution Limits, Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Failure Analysis and Integrated Circuits.

Size is their works in the topics tagged with each word, from their 8 largest topics. Each links to the topic it comes from most. The words come from the keyword list OpenAlex gives each topic, not from the text of the papers, so a word can appear that none of the papers uses.

All 18 words, with their numbers
  1. Nanofabrication202 topics
  2. High-Resolution Patterning192 topics
  3. Electron Beam Lithography171 topic
  4. Resolution Limits171 topic
  5. Scanning Electron Microscopy101 topic
  6. X-ray Photoelectron Spectroscopy101 topic
  7. Failure Analysis71 topic
  8. Integrated Circuits71 topic
  9. Chemical Mechanical Planarization61 topic
  10. Material Removal Mechanism61 topic
  11. Antireflective Coatings31 topic
  12. Low-k Dielectrics31 topic
  13. Microelectronics31 topic
  14. Nanostructures31 topic
  15. Nanolithography21 topic
  16. Soft Lithography21 topic
  17. Cryo-Electron Microscopy11 topic
  18. Single-Particle Analysis11 topic

Where does Monika Boettcher work?

Monika Boettcher's main affiliation in the publication record is Vistec Electron Beam (Germany), Germany.

How many publications and citations does Monika Boettcher have?

OpenAlex counts 18 works and 59 citations for Monika Boettcher, an h-index of 5, ranking #6,983,988 of 7,710,434 researchers worldwide on the quality score.

Ranked on field-normalised citation excellence (50%), output (30%) and citations (20%). Counts come from OpenAlex author records, which occasionally merge different people who share a name or split one person into several.

Papers, co-authors, who cited this work and researchers on the nearest topics have tabs of their own, above. Is this your page? Claim it with your ORCID iD, or request a correction or removal.

Discussion

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